DE69801069D1 - Vorrichtung zur Kristallhaltung - Google Patents

Vorrichtung zur Kristallhaltung

Info

Publication number: DE69801069D1
Authority: DE; Germany
Prior art keywords: holding device; crystal holding; crystal; holding
Prior art date: 1997-03-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69801069T

Other languages

English (en)

Other versions

DE69801069T2 (de

Inventor

Makoto Iida

Eiichi Iino

Masanori Kimura

Shozo Muraoka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Shin Etsu Handotai Co Ltd

Original Assignee

Shin Etsu Handotai Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-03-17

Filing date

1998-03-11

Publication date

2001-08-16

1998-03-11 Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd

2001-08-16 Application granted granted Critical

2001-08-16 Publication of DE69801069D1 publication Critical patent/DE69801069D1/de

2002-03-14 Publication of DE69801069T2 publication Critical patent/DE69801069T2/de

2018-03-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

DE69801069T 1997-03-17 1998-03-11 Vorrichtung zur Kristallhaltung Expired - Lifetime DE69801069T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP8332297A JP3596226B2 (ja)	1997-03-17	1997-03-17	単結晶保持装置

Publications (2)

Publication Number	Publication Date
DE69801069D1 true DE69801069D1 (de)	2001-08-16
DE69801069T2 DE69801069T2 (de)	2002-03-14

Family

ID=13799201

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69801069T Expired - Lifetime DE69801069T2 (de)	1997-03-17	1998-03-11	Vorrichtung zur Kristallhaltung

Country Status (6)

Country	Link
US (1)	US6053975A (de)
EP (1)	EP0866151B1 (de)
JP (1)	JP3596226B2 (de)
KR (1)	KR100502987B1 (de)
DE (1)	DE69801069T2 (de)
TW (1)	TW391994B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR19980079891A (ko) *	1997-03-27	1998-11-25	모리 레이자로	단결정 성장장치 및 단결정 성장방법
JPH10273390A (ja) *	1997-03-28	1998-10-13	Super Silicon Kenkyusho:Kk	半導体単結晶製造装置
JP3376877B2 (ja) *	1997-09-02	2003-02-10	信越半導体株式会社	種結晶保持具
KR100571693B1 (ko) *	1998-09-09	2006-04-17	가부시키가이샤 스파 시리콘 겐큐쇼	단결정 성장 장치
JP4052753B2 (ja) *	1999-02-24	2008-02-27	株式会社スーパーシリコン研究所	単結晶成長装置及び単結晶成長方法
DE19939715B4 (de) *	1999-08-21	2008-07-24	Crystal Growing Systems Gmbh	Auf einer Ziehwelle einer Kristallziehanlage angeordneter Greifer
JP4689027B2 (ja) *	2000-10-23	2011-05-25	株式会社Sumco	半導体単結晶引上装置
US7102099B2 (en) *	2002-07-23	2006-09-05	Illinois Tool Works Inc.	Method and apparatus for feeding wire to a welding arc
JP4362760B2 (ja) *	2003-10-14	2009-11-11	ＳｕｍｃｏＴｅｃｈｘｉｖ株式会社	半導体単結晶製造装置
JP5765642B2 (ja)	2011-04-06	2015-08-19	株式会社Sumco	単結晶引上げ装置の結晶保持機構および単結晶インゴット製造方法
KR101434196B1 (ko) *	2011-12-13	2014-08-28	(주) 다애테크	사파이어 잉곳 제조장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4190630A (en) *	1978-01-03	1980-02-26	Vsesojuzny Nauchno-Isslekovatelsky Institut Monokristallov Stsintillyatsionnykh Materialov I Osobo Chistykh Khimicheskikh Veschestv	Apparatus for pulling single crystals from melt
JPS62288191A (ja) *	1986-06-06	1987-12-15	Kyushu Denshi Kinzoku Kk	単結晶成長方法及びその装置
US5196086A (en) *	1987-04-09	1993-03-23	Mitsubishi Materials Corporation	Monocrystal rod pulled from a melt
JPS63252991A (ja) *	1987-04-09	1988-10-20	Mitsubishi Metal Corp	落下防止保持部を有するｃｚ単結晶
DE69112463T2 (de) *	1990-03-30	1996-02-15	Shinetsu Handotai Kk	Vorrichtung zur Herstellung von Monokristallen nach dem Czochralski-Verfahren.
JPH07103000B2 (ja) *	1990-03-30	1995-11-08	信越半導体株式会社	結晶引上装置
JPH07515B2 (ja) *	1990-04-11	1995-01-11	信越半導体株式会社	結晶引上装置
JPH078495B2 (ja) *	1990-11-29	1995-02-01	信越半導体株式会社	単結晶引上装置の単結晶絞り部自動切断装置
GB9412629D0 (en) *	1994-06-23	1994-08-10	Secr Defence	Improvements in crystal growth
JP3402012B2 (ja) *	1995-04-21	2003-04-28	信越半導体株式会社	単結晶の成長方法及び装置
JP3402040B2 (ja) *	1995-12-27	2003-04-28	信越半導体株式会社	単結晶保持装置
JP3438492B2 (ja) *	1996-10-18	2003-08-18	信越半導体株式会社	単結晶の引上げ方法

1997
- 1997-03-17 JP JP8332297A patent/JP3596226B2/ja not_active Expired - Lifetime
1998
- 1998-03-06 TW TW087103274A patent/TW391994B/zh not_active IP Right Cessation
- 1998-03-11 DE DE69801069T patent/DE69801069T2/de not_active Expired - Lifetime
- 1998-03-11 EP EP98301794A patent/EP0866151B1/de not_active Expired - Lifetime
- 1998-03-16 US US09/039,830 patent/US6053975A/en not_active Expired - Lifetime
- 1998-03-17 KR KR10-1998-0009061A patent/KR100502987B1/ko not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP3596226B2 (ja)	2004-12-02
US6053975A (en)	2000-04-25
TW391994B (en)	2000-06-01
KR19980080369A (ko)	1998-11-25
DE69801069T2 (de)	2002-03-14
EP0866151B1 (de)	2001-07-11
JPH10259088A (ja)	1998-09-29
EP0866151A1 (de)	1998-09-23
KR100502987B1 (ko)	2005-11-16

Publication	Publication Date	Title
DE69704004D1 (de)	2001-03-08	Vorrichtung zur Programmfehlerbeseitigung
DE69813504D1 (de)	2003-05-22	Verwaltungsvorrichtung zur software-aktualisierung
DE69827463D1 (de)	2004-12-16	Vorrichtung zur Vergrösserung von gewebe
DE69730882D1 (de)	2004-10-28	Vorrichtung zur Spritzenanfertigung
DE69940014D1 (de)	2009-01-15	Vorrichtung zur verhinderung von autodiebstahl
DE69829974D1 (de)	2005-06-02	Vorrichtung zur brustchirurgie
DE69734082D1 (de)	2005-10-06	Vorrichtung zur Synchronisierung
DE69731662D1 (de)	2004-12-23	Vorrichtung zur unterstützung der atmung
DE69619495D1 (de)	2002-04-04	Elektrooptische Vorrichtung
DE69835000D1 (de)	2006-08-03	Vorrichtung zur Gasbehandlung
DE69615722D1 (de)	2001-11-15	Vorrichtung zur Korrektur des Kontrastes
DE69904802D1 (de)	2003-02-13	Vorrichtung zur muenzenrueckgabe fuer muenzautomaten
DE59509949D1 (de)	2002-01-24	Vorrichtung zur strahlteilung
DE59406023D1 (de)	1998-06-25	Vorrichtung zur Verriegelung
DE69720887D1 (de)	2003-05-22	Vorrichtung zur Stabilisierung
DE69802008D1 (de)	2001-11-15	Vorrichtung zur kristallziehung
DE69723878D1 (de)	2003-09-04	Vorrichtung zur positionsbestmmung
DE69840283D1 (de)	2009-01-15	Gerät zur Augenuntersuchung
DE69801069D1 (de)	2001-08-16	Vorrichtung zur Kristallhaltung
DE69836703D1 (de)	2007-02-08	Vorrichtung zur Bierfiltration
DE69912080D1 (de)	2003-11-20	Elektrochrome Vorrichtung
DE59704848D1 (de)	2001-11-15	Vorrichtung zur Krafteinleitung
DE69832437D1 (de)	2005-12-29	Akustooptische Vorrichtung
DE69942530D1 (de)	2010-08-05	Elektrooptische vorrichtung
DE59806021D1 (de)	2002-11-28	Vorrichtung zur Verhinderung von Druckwerksbeschädigungen

Legal Events

Date	Code	Title	Description
2002-08-08	8364	No opposition during term of opposition