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DE69714334D1 - Optomechanische Mikrovorrichtung und ihre optomechanischen Anwendung in einem Mikro-Strahlablenker - Google Patents

Optomechanische Mikrovorrichtung und ihre optomechanischen Anwendung in einem Mikro-Strahlablenker

Info

Publication number
DE69714334D1
DE69714334D1 DE69714334T DE69714334T DE69714334D1 DE 69714334 D1 DE69714334 D1 DE 69714334D1 DE 69714334 T DE69714334 T DE 69714334T DE 69714334 T DE69714334 T DE 69714334T DE 69714334 D1 DE69714334 D1 DE 69714334D1
Authority
DE
Germany
Prior art keywords
optomechanical
micro
application
beam deflector
micro device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69714334T
Other languages
English (en)
Other versions
DE69714334T2 (de
Inventor
Pierre Labeye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69714334D1 publication Critical patent/DE69714334D1/de
Application granted granted Critical
Publication of DE69714334T2 publication Critical patent/DE69714334T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE69714334T 1996-04-18 1997-04-16 Optomechanische Mikrovorrichtung und ihre optomechanischen Anwendung in einem Mikro-Strahlablenker Expired - Fee Related DE69714334T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9604861A FR2747802B1 (fr) 1996-04-18 1996-04-18 Microdispositif optomecanique, et application a un microdeflecteur optomecanique

Publications (2)

Publication Number Publication Date
DE69714334D1 true DE69714334D1 (de) 2002-09-05
DE69714334T2 DE69714334T2 (de) 2003-03-27

Family

ID=9491334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714334T Expired - Fee Related DE69714334T2 (de) 1996-04-18 1997-04-16 Optomechanische Mikrovorrichtung und ihre optomechanischen Anwendung in einem Mikro-Strahlablenker

Country Status (5)

Country Link
US (1) US5923480A (de)
EP (1) EP0802439B1 (de)
JP (1) JPH1054947A (de)
DE (1) DE69714334T2 (de)
FR (1) FR2747802B1 (de)

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DE19804209C2 (de) * 1998-02-03 2001-08-02 Fraunhofer Ges Forschung Vorrichtung zur Ausleuchtung einer Fläche unter einem veränderbaren Lichteinfallswinkel
US6091549A (en) * 1998-04-14 2000-07-18 Siros Technologies, Inc. Method and apparatus for adjustable spherical aberration correction and focusing
NL1015131C1 (nl) * 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
JP4290314B2 (ja) * 2000-04-26 2009-07-01 Ｎｅｃエレクトロニクス株式会社 高周波回路及びそれを実装したモジュール、通信機
US20020006247A1 (en) * 2000-06-28 2002-01-17 Vladimir Vaganov Optical switch
US6415068B1 (en) * 2000-07-07 2002-07-02 Xerox Corporation Microlens switching assembly and method
DE10053899A1 (de) * 2000-10-31 2002-05-08 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes
JP2002214546A (ja) * 2000-11-15 2002-07-31 Oki Electric Ind Co Ltd 光スイッチ
US6961525B2 (en) * 2000-11-17 2005-11-01 Sycamore Networks, Inc. Method for channel balance
WO2002048762A2 (en) * 2000-12-12 2002-06-20 L-A-Omega, Inc. Method and system for aligning an optical system via single axis adjustments
JP2002182095A (ja) * 2000-12-19 2002-06-26 Fuji Photo Film Co Ltd 焦点位置調整装置および露光ヘッドならびに画像記録装置
JP3750561B2 (ja) * 2001-05-23 2006-03-01 株式会社村田製作所 圧電部品の製造方法
JP2002357773A (ja) * 2001-06-04 2002-12-13 Olympus Optical Co Ltd 光学コンポーネントとそれを用いた内視鏡、内視鏡光学系
KR100452112B1 (ko) * 2001-07-18 2004-10-12 한국과학기술원 정전 구동기
US7155129B2 (en) * 2002-01-07 2006-12-26 Xerox Corporation Steerable free space optical interconnect apparatus
SE521533C2 (sv) * 2002-11-05 2003-11-11 Imego Ab Förfarande för att tillverka en rörlig struktur för en ljusformande enhet
US6912090B2 (en) * 2003-03-18 2005-06-28 Lucent Technologies Inc. Adjustable compound microlens apparatus with MEMS controller
US7196301B2 (en) * 2003-07-18 2007-03-27 Honeywell International, Inc. System for detecting incoming light from a remote laser source
JP4517744B2 (ja) * 2004-06-24 2010-08-04 株式会社デンソー 光スキャナ
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
CA2795329C (en) * 2005-02-23 2015-04-07 Pixtronix, Inc. Methods and apparatus for actuating displays
US9087486B2 (en) 2005-02-23 2015-07-21 Pixtronix, Inc. Circuits for controlling display apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
KR100826452B1 (ko) * 2006-12-18 2008-04-29 삼성전기주식회사 광학 부품 및 그 제조방법
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US20140348513A1 (en) * 2013-05-24 2014-11-27 Alcatel-Lucent Usa, Inc. Optical assembly for optical communication systems
WO2017184757A1 (en) * 2016-04-20 2017-10-26 Coopersurgical, Inc. Beam steering for laser systems and related methods
DE102017213465A1 (de) * 2017-08-03 2019-02-07 Robert Bosch Gmbh Lichtleiter-basiertes LiDAR-System
EP4127813B1 (de) * 2020-04-17 2025-07-02 Exciting Technology LLC Dezentrierte linsenlichtstrahlsteuerung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057546A (ja) * 1983-09-07 1985-04-03 Seiko Epson Corp 光学ヘッド
US4733944A (en) * 1986-01-24 1988-03-29 Xmr, Inc. Optical beam integration system
US5097354A (en) * 1989-07-27 1992-03-17 Omron Corporation Beam scanner
US5059008A (en) * 1990-03-26 1991-10-22 General Electric Company Wide angle beam steerer using translation of plural lens arrays
US5392157A (en) * 1993-08-18 1995-02-21 Trw Inc. Line-of-sight steering system for high power laser beams and method using same
FR2712742B1 (fr) * 1993-11-15 1995-12-15 Commissariat Energie Atomique Microlaser solide, monolithique, autoaligné, à déclenchement passif par absorbant saturable et son procédé de fabrication.
FR2734065B1 (fr) * 1995-05-12 1997-06-06 Commissariat Energie Atomique Composants microoptiques et microdeflecteurs optomecaniques a deplacement de microlentilles

Also Published As

Publication number Publication date
EP0802439B1 (de) 2002-07-31
FR2747802B1 (fr) 1998-05-15
DE69714334T2 (de) 2003-03-27
FR2747802A1 (fr) 1997-10-24
JPH1054947A (ja) 1998-02-24
EP0802439A1 (de) 1997-10-22
US5923480A (en) 1999-07-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee