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DE69625538D1 - Optomechanischer Mikro-Strahlablenker unter Verwendung der Verschiebung von Mikrolinsen - Google Patents

Optomechanischer Mikro-Strahlablenker unter Verwendung der Verschiebung von Mikrolinsen

Info

Publication number
DE69625538D1
DE69625538D1 DE69625538T DE69625538T DE69625538D1 DE 69625538 D1 DE69625538 D1 DE 69625538D1 DE 69625538 T DE69625538 T DE 69625538T DE 69625538 T DE69625538 T DE 69625538T DE 69625538 D1 DE69625538 D1 DE 69625538D1
Authority
DE
Germany
Prior art keywords
optomechanical
microlenses
micro
displacement
beam deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69625538T
Other languages
English (en)
Other versions
DE69625538T2 (de
Inventor
Marc Rabarot
Engin Molva
Eric Ollier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69625538D1 publication Critical patent/DE69625538D1/de
Publication of DE69625538T2 publication Critical patent/DE69625538T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE69625538T 1995-05-12 1996-05-10 Optomechanischer Mikro-Strahlablenker unter Verwendung der Verschiebung von Mikrolinsen Expired - Fee Related DE69625538T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9505652A FR2734065B1 (fr) 1995-05-12 1995-05-12 Composants microoptiques et microdeflecteurs optomecaniques a deplacement de microlentilles

Publications (2)

Publication Number Publication Date
DE69625538D1 true DE69625538D1 (de) 2003-02-06
DE69625538T2 DE69625538T2 (de) 2003-09-25

Family

ID=9478920

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625538T Expired - Fee Related DE69625538T2 (de) 1995-05-12 1996-05-10 Optomechanischer Mikro-Strahlablenker unter Verwendung der Verschiebung von Mikrolinsen

Country Status (5)

Country Link
US (1) US5734490A (de)
EP (1) EP0742459B1 (de)
JP (1) JPH08313830A (de)
DE (1) DE69625538T2 (de)
FR (1) FR2734065B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2747802B1 (fr) * 1996-04-18 1998-05-15 Commissariat Energie Atomique Microdispositif optomecanique, et application a un microdeflecteur optomecanique
US6074888A (en) * 1998-08-18 2000-06-13 Trw Inc. Method for fabricating semiconductor micro epi-optical components
US6415068B1 (en) * 2000-07-07 2002-07-02 Xerox Corporation Microlens switching assembly and method
WO2002023251A2 (en) * 2000-09-18 2002-03-21 Duke University Scanner apparatus having optical elements coupled to mems acuators
GB2389457B (en) * 2002-06-07 2006-07-26 Microsaic Systems Ltd Microengineered optical scanner
SE521533C2 (sv) * 2002-11-05 2003-11-11 Imego Ab Förfarande för att tillverka en rörlig struktur för en ljusformande enhet
JP4003129B2 (ja) * 2003-01-22 2007-11-07 ソニー株式会社 立体撮像装置、立体表示装置、立体撮像表示装置および情報記録方法
US6912090B2 (en) * 2003-03-18 2005-06-28 Lucent Technologies Inc. Adjustable compound microlens apparatus with MEMS controller
US7196301B2 (en) * 2003-07-18 2007-03-27 Honeywell International, Inc. System for detecting incoming light from a remote laser source
US7242541B2 (en) * 2004-09-16 2007-07-10 Sony Corporation Fabrication of MEMS zoom lens structure
EP1851808B1 (de) * 2005-02-15 2013-08-14 Nokia Corporation Piezoelektrisches stellgliedelement für mikrobewegung
US9042042B2 (en) * 2009-11-18 2015-05-26 Nidec Sankyo Corporation Lens drive device
US9733448B1 (en) * 2011-09-13 2017-08-15 Bae Systems Information And Electronic Systems Integration Inc. Flexure-based focus mechanism

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4170397A (en) * 1976-12-16 1979-10-09 Decca Limited Vibratile optical boresight
US4385373A (en) * 1980-11-10 1983-05-24 Eastman Kodak Company Device for focus and alignment control in optical recording and/or playback apparatus
JPS57103131A (en) * 1980-12-18 1982-06-26 Sony Corp Biaxial driver
JPS6191620A (ja) * 1984-10-11 1986-05-09 Hitachi Ltd 光学レンズ装置
EP0289449A1 (de) * 1987-05-01 1988-11-02 Aziz Y. Anis Hinterkammer-Linse
US4794581A (en) * 1987-06-25 1988-12-27 International Business Machines Corporation Lens support system enabling focussing and tracking motions employing a unitary lens holder
JPH01300433A (ja) * 1988-05-30 1989-12-04 Fuji Elelctrochem Co Ltd レンズアクチュエータ
GB8923135D0 (en) * 1989-10-13 1989-11-29 Bt & D Technologies Ltd Mounting optical components
GB9017015D0 (en) * 1990-08-02 1990-09-19 British Telecomm Optical component holder
US5257279A (en) * 1992-06-04 1993-10-26 Spectra-Physics Laserplane, Inc. Adjustable focus technique and apparatus using a moveable weak lens

Also Published As

Publication number Publication date
EP0742459A1 (de) 1996-11-13
EP0742459B1 (de) 2003-01-02
FR2734065B1 (fr) 1997-06-06
FR2734065A1 (fr) 1996-11-15
US5734490A (en) 1998-03-31
DE69625538T2 (de) 2003-09-25
JPH08313830A (ja) 1996-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee