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DE69625068D1 - System zur plasmabehandlung grossflächiger substrate - Google Patents

System zur plasmabehandlung grossflächiger substrate

Info

Publication number
DE69625068D1
DE69625068D1 DE69625068T DE69625068T DE69625068D1 DE 69625068 D1 DE69625068 D1 DE 69625068D1 DE 69625068 T DE69625068 T DE 69625068T DE 69625068 T DE69625068 T DE 69625068T DE 69625068 D1 DE69625068 D1 DE 69625068D1
Authority
DE
Germany
Prior art keywords
large area
plasma treatment
area substrates
substrates
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69625068T
Other languages
English (en)
Inventor
Chung Chan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Genesis Corp
Original Assignee
Silicon Genesis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Genesis Corp filed Critical Silicon Genesis Corp
Application granted granted Critical
Publication of DE69625068D1 publication Critical patent/DE69625068D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69625068T 1995-07-19 1996-07-02 System zur plasmabehandlung grossflächiger substrate Expired - Lifetime DE69625068D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/503,973 US5653811A (en) 1995-07-19 1995-07-19 System for the plasma treatment of large area substrates
PCT/US1996/011213 WO1997004478A2 (en) 1995-07-19 1996-07-02 Plasma treatment apparatus for large area substrates

Publications (1)

Publication Number Publication Date
DE69625068D1 true DE69625068D1 (de) 2003-01-09

Family

ID=24004315

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625068T Expired - Lifetime DE69625068D1 (de) 1995-07-19 1996-07-02 System zur plasmabehandlung grossflächiger substrate

Country Status (9)

Country Link
US (3) US5653811A (de)
EP (1) EP0842307B1 (de)
JP (1) JP4128217B2 (de)
KR (1) KR19990029069A (de)
CN (1) CN1192788A (de)
AU (1) AU718941B2 (de)
CA (1) CA2227233C (de)
DE (1) DE69625068D1 (de)
WO (1) WO1997004478A2 (de)

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AU6344996A (en) 1997-02-18
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WO1997004478A3 (en) 1997-03-20
US20020029850A1 (en) 2002-03-14
EP0842307B1 (de) 2002-11-27
US5653811A (en) 1997-08-05
CA2227233C (en) 2001-10-30
KR19990029069A (ko) 1999-04-15
AU718941B2 (en) 2000-05-04
EP0842307A2 (de) 1998-05-20
US6632324B2 (en) 2003-10-14
JPH11510302A (ja) 1999-09-07
EP0842307A4 (de) 1999-12-01
CA2227233A1 (en) 1997-02-06

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