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DE69517369D1 - Eine Vorrichtung zur Röntgenstrahlerzeugung - Google Patents

Eine Vorrichtung zur Röntgenstrahlerzeugung

Info

Publication number
DE69517369D1
DE69517369D1 DE69517369T DE69517369T DE69517369D1 DE 69517369 D1 DE69517369 D1 DE 69517369D1 DE 69517369 T DE69517369 T DE 69517369T DE 69517369 T DE69517369 T DE 69517369T DE 69517369 D1 DE69517369 D1 DE 69517369D1
Authority
DE
Germany
Prior art keywords
ray generation
ray
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69517369T
Other languages
English (en)
Other versions
DE69517369T2 (de
Inventor
Yoshiyuki Yamamoto
Keiichiro Tanabe
Naoji Fujimori
Nobuhiro Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69517369D1 publication Critical patent/DE69517369D1/de
Publication of DE69517369T2 publication Critical patent/DE69517369T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/122—Cooling of the window
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
DE69517369T 1994-08-20 1995-08-16 Eine Vorrichtung zur Röntgenstrahlerzeugung Expired - Lifetime DE69517369T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21807494 1994-08-20
JP14808195A JP3612795B2 (ja) 1994-08-20 1995-05-22 Ｘ線発生装置

Publications (2)

Publication Number Publication Date
DE69517369D1 true DE69517369D1 (de) 2000-07-13
DE69517369T2 DE69517369T2 (de) 2000-12-28

Family

ID=26478419

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69517369T Expired - Lifetime DE69517369T2 (de) 1994-08-20 1995-08-16 Eine Vorrichtung zur Röntgenstrahlerzeugung

Country Status (5)

Country Link
US (1) US5657365A (de)
EP (1) EP0697712B1 (de)
JP (1) JP3612795B2 (de)
KR (1) KR0172651B1 (de)
DE (1) DE69517369T2 (de)

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US5878110A (en) * 1994-08-20 1999-03-02 Sumitomo Electric Industries, Ltd. X-ray generation apparatus
US6377846B1 (en) 1997-02-21 2002-04-23 Medtronic Ave, Inc. Device for delivering localized x-ray radiation and method of manufacture
US5602899A (en) * 1996-01-31 1997-02-11 Physical Electronics Inc. Anode assembly for generating x-rays and instrument with such anode assembly
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
US6289079B1 (en) 1999-03-23 2001-09-11 Medtronic Ave, Inc. X-ray device and deposition process for manufacture
US6353658B1 (en) 1999-09-08 2002-03-05 The Regents Of The University Of California Miniature x-ray source
ATE453204T1 (de) * 2004-01-13 2010-01-15 Koninkl Philips Electronics Nv Zusammengesetzter rahmen für röntgenröhren
DE202005017496U1 (de) * 2005-11-07 2007-03-15 Comet Gmbh Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre
DE102005053324B4 (de) * 2005-11-07 2012-08-02 Diamond Materials Gmbh Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre
GB2453570A (en) * 2007-10-11 2009-04-15 Kratos Analytical Ltd Electrode for x-ray apparatus
JP5424158B2 (ja) * 2008-06-30 2014-02-26 住友重機械工業株式会社 ターゲット装置
JP5670111B2 (ja) * 2009-09-04 2015-02-18 東京エレクトロン株式会社 Ｘ線発生用ターゲット、ｘ線発生装置、及びｘ線発生用ターゲットの製造方法
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
WO2013111255A1 (ja) * 2012-01-23 2013-08-01 キヤノン株式会社 放射線ターゲット及びその製造方法
JP5936895B2 (ja) 2012-03-27 2016-06-22 株式会社リガク Ｘ線発生装置のターゲット及びその製造方法並びにｘ線発生装置
US9008278B2 (en) * 2012-12-28 2015-04-14 General Electric Company Multilayer X-ray source target with high thermal conductivity
US20150092924A1 (en) * 2013-09-04 2015-04-02 Wenbing Yun Structured targets for x-ray generation
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9390881B2 (en) 2013-09-19 2016-07-12 Sigray, Inc. X-ray sources using linear accumulation
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
GB2557182B (en) * 2016-11-29 2020-02-12 Roseland Holdings Ltd Electrode and electrochemical cell comprising the same
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
JP7117452B2 (ja) 2018-07-26 2022-08-12 シグレイ、インコーポレイテッド 高輝度反射型ｘ線源
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
CN112638261A (zh) 2018-09-04 2021-04-09 斯格瑞公司 利用滤波的x射线荧光的系统和方法
CN112823280B (zh) 2018-09-07 2024-11-05 斯格瑞公司 用于深度可选x射线分析的系统和方法
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
WO2021011209A1 (en) 2019-07-15 2021-01-21 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

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US1279423A (en) * 1916-09-25 1918-09-17 Pfanstiehl Company Inc X-ray target.
US3329847A (en) * 1964-07-22 1967-07-04 Friedman Herbert Stroboscopic x-ray tube
US3992633A (en) * 1973-09-04 1976-11-16 The Machlett Laboratories, Incorporated Broad aperture X-ray generator
US4266138A (en) * 1978-07-11 1981-05-05 Cornell Research Foundation, Inc. Diamond targets for producing high intensity soft x-rays and a method of exposing x-ray resists
US4323780A (en) * 1980-07-21 1982-04-06 Siemens Medical Laboratories, Inc. Target assembly for a linear accelerator
JPS5738548A (en) * 1980-08-21 1982-03-03 Seiko Epson Corp X-ray generator device
FR2593638B1 (fr) * 1986-01-30 1988-03-18 Lorraine Carbone Support pour anticathode tournante de tubes a rayons x
FR2617332B1 (fr) * 1987-06-26 1995-06-23 Thomson Cgr Tube radiogene a faible rayonnement extra-focal
JPH02267844A (ja) * 1989-04-08 1990-11-01 Seiko Epson Corp Ｘ線発生装置
JPH02309596A (ja) * 1989-05-23 1990-12-25 Seiko Epson Corp Ｘ線発生装置
EP0432568A3 (en) * 1989-12-11 1991-08-28 General Electric Company X ray tube anode and tube having same
JPH03274001A (ja) * 1990-03-24 1991-12-05 Seiko Epson Corp Ｘ線反射膜
US5148462A (en) * 1991-04-08 1992-09-15 Moltech Corporation High efficiency X-ray anode sources
DE69316040T2 (de) * 1992-01-27 1998-07-23 Koninkl Philips Electronics Nv Röntgenröhre mit verbessertem Wärmehaushalt
JPH05299355A (ja) * 1992-04-16 1993-11-12 Kobe Steel Ltd ホウ素ドープダイヤモンド膜の製造方法
JPH0760757B2 (ja) * 1992-06-03 1995-06-28 科学技術庁無機材質研究所長 無機化合物／金属薄膜二層構造ｘ線対陰極
JPH0636718A (ja) * 1992-07-15 1994-02-10 Sumitomo Electric Ind Ltd 回折用ｘ線管球

Also Published As

Publication number Publication date
DE69517369T2 (de) 2000-12-28
EP0697712A1 (de) 1996-02-21
JPH08115798A (ja) 1996-05-07
JP3612795B2 (ja) 2005-01-19
US5657365A (en) 1997-08-12
EP0697712B1 (de) 2000-06-07
KR960009806A (ko) 1996-03-22
KR0172651B1 (ko) 1999-03-20

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