DE69501569D1 - High vacuum system - Google Patents

High vacuum system

Info

Publication number: DE69501569D1
Authority: DE; Germany
Prior art keywords: high vacuum; vacuum system; vacuum
Prior art date: 1994-06-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69501569T

Other languages

German (de)

Other versions

DE69501569T2 (en

Inventor

Norikazu Ishida

Yoshiharu Mae

Kenji Yajima

Takuro Iwamura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsubishi Materials Corp

Original Assignee

Mitsubishi Materials Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-06-20

Filing date

1995-05-17

Publication date

1998-03-12

1995-05-17 Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp

1998-03-12 Application granted granted Critical

1998-03-12 Publication of DE69501569D1 publication Critical patent/DE69501569D1/en

1998-06-10 Publication of DE69501569T2 publication Critical patent/DE69501569T2/en

2015-05-18 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Manufacture And Refinement Of Metals (AREA)

DE1995601569 1994-06-20 1995-05-17 High vacuum system Expired - Fee Related DE69501569T2 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP16059694A JPH083664A (en)	1994-06-20	1994-06-20	Member for vacuum device and vacuum device

Publications (2)

Publication Number	Publication Date
DE69501569D1 true DE69501569D1 (en)	1998-03-12
DE69501569T2 DE69501569T2 (en)	1998-06-10

Family

ID=15718373

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE1995601569 Expired - Fee Related DE69501569T2 (en)	1994-06-20	1995-05-17	High vacuum system

Country Status (3)

Country	Link
EP (1)	EP0688879B1 (en)
JP (1)	JPH083664A (en)
DE (1)	DE69501569T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4943095B2 (en) *	2006-08-30	2012-05-30	三菱電機株式会社	Copper alloy and manufacturing method thereof
CN107109633B (en) *	2015-05-21	2020-08-11	捷客斯金属株式会社	Copper alloy sputtering target and manufacturing method thereof
JP7131376B2 (en) *	2018-12-27	2022-09-06	三菱マテリアル株式会社	Copper material for sputtering targets
CN113290217B (en) *	2021-05-28	2022-09-23	金川集团股份有限公司	Vacuum continuous casting process of high-purity oxygen-free copper rod

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2175009B (en) *	1985-03-27	1990-02-07	Mitsubishi Metal Corp	Wire for bonding a semiconductor device and process for producing the same
JPS62207834A (en) *	1986-03-10	1987-09-12	Nippon Mining Co Ltd	Copper material for use in high-vacuum atmosphere
JPS62243727A (en) *	1986-04-16	1987-10-24	Hitachi Cable Ltd	Rolled copper foil for printed circuit board
JPS63312934A (en) *	1987-06-16	1988-12-21	Hitachi Cable Ltd	Lead frame material for semiconductors
JPS643903A (en) *	1987-06-25	1989-01-09	Furukawa Electric Co Ltd	Thin copper wire for electronic devices and manufacture thereof
JP2726939B2 (en) *	1989-03-06	1998-03-11	日鉱金属株式会社	Highly conductive copper alloy with excellent workability and heat resistance

1994
- 1994-06-20 JP JP16059694A patent/JPH083664A/en not_active Withdrawn
1995
- 1995-05-17 DE DE1995601569 patent/DE69501569T2/en not_active Expired - Fee Related
- 1995-05-17 EP EP19950107446 patent/EP0688879B1/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0688879A1 (en)	1995-12-27
DE69501569T2 (en)	1998-06-10
EP0688879B1 (en)	1998-02-04
JPH083664A (en)	1996-01-09

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Legal Events

Date	Code	Title	Description
1999-03-11	8364	No opposition during term of opposition
2000-07-06	8339	Ceased/non-payment of the annual fee