[go: up one dir, main page]

DE69423720D1 - Vorrichtung mit integriert-optischem Wellenleiterpaar - Google Patents

Vorrichtung mit integriert-optischem Wellenleiterpaar

Info

Publication number
DE69423720D1
DE69423720D1 DE69423720T DE69423720T DE69423720D1 DE 69423720 D1 DE69423720 D1 DE 69423720D1 DE 69423720 T DE69423720 T DE 69423720T DE 69423720 T DE69423720 T DE 69423720T DE 69423720 D1 DE69423720 D1 DE 69423720D1
Authority
DE
Germany
Prior art keywords
optical waveguide
integrated optical
waveguide pair
pair
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69423720T
Other languages
English (en)
Other versions
DE69423720T2 (de
Inventor
Tohru Nakamura
Tomonori Tanoue
Takeshi Kato
Mitsuo Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69423720D1 publication Critical patent/DE69423720D1/de
Application granted granted Critical
Publication of DE69423720T2 publication Critical patent/DE69423720T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
DE69423720T 1993-12-27 1994-12-21 Vorrichtung mit integriert-optischem Wellenleiterpaar Expired - Fee Related DE69423720T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33050393A JP3345143B2 (ja) 1993-12-27 1993-12-27 光導波路の製造方法

Publications (2)

Publication Number Publication Date
DE69423720D1 true DE69423720D1 (de) 2000-05-04
DE69423720T2 DE69423720T2 (de) 2000-11-23

Family

ID=18233360

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69423720T Expired - Fee Related DE69423720T2 (de) 1993-12-27 1994-12-21 Vorrichtung mit integriert-optischem Wellenleiterpaar

Country Status (5)

Country Link
US (1) US5604835A (de)
EP (1) EP0661561B1 (de)
JP (1) JP3345143B2 (de)
KR (1) KR950019788A (de)
DE (1) DE69423720T2 (de)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same
US6198168B1 (en) 1998-01-20 2001-03-06 Micron Technologies, Inc. Integrated circuits using high aspect ratio vias through a semiconductor wafer and method for forming same
US6150188A (en) 1998-02-26 2000-11-21 Micron Technology Inc. Integrated circuits using optical fiber interconnects formed through a semiconductor wafer and methods for forming same
US6090636A (en) * 1998-02-26 2000-07-18 Micron Technology, Inc. Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same
US6775453B1 (en) * 1998-12-21 2004-08-10 Lsi Logic Corporation On-chip graded index of refraction optical waveguide and damascene method of fabricating the same
US6282358B1 (en) * 1998-12-21 2001-08-28 Lsi Logic Corporation On-chip single layer horizontal deflecting waveguide and damascene method of fabricating the same
KR100333900B1 (ko) * 1999-01-21 2002-04-24 윤종용 모드모양 변환기, 그 제작 방법 및 이를 구비한 집적광학 소자
US6403393B1 (en) 1999-09-01 2002-06-11 International Business Machines Corporation Device having integrated optical and copper conductors and method of fabricating same
US20050054084A1 (en) * 1999-10-06 2005-03-10 Infineon Technologies Ag Substrate with at least one pore
US6470130B1 (en) * 2000-02-01 2002-10-22 Agere Systems Guardian Corp. Waveguide structures
US6392257B1 (en) 2000-02-10 2002-05-21 Motorola Inc. Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same
JP2001337302A (ja) * 2000-05-26 2001-12-07 Nec Corp 光導波路素子およびその製造方法ならびに光ポーリング方法
WO2001093336A1 (en) 2000-05-31 2001-12-06 Motorola, Inc. Semiconductor device and method for manufacturing the same
WO2002009187A2 (en) 2000-07-24 2002-01-31 Motorola, Inc. Heterojunction tunneling diodes and process for fabricating same
US6450699B1 (en) 2000-12-19 2002-09-17 Intel Corporation Photonic and electronic components on a shared substrate
US6869882B2 (en) * 2000-12-19 2005-03-22 Intel Corporation Method of creating a photonic via using deposition
US7000434B2 (en) * 2000-12-19 2006-02-21 Intel Corporation Method of creating an angled waveguide using lithographic techniques
US6650823B1 (en) 2000-12-19 2003-11-18 Intel Corporation Method of creating a photonic via using fiber optic
US6819836B2 (en) 2000-12-19 2004-11-16 Intel Corporation Photonic and electronic components on a shared substrate with through substrate communication
US20020096683A1 (en) 2001-01-19 2002-07-25 Motorola, Inc. Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate
US20020118942A1 (en) * 2001-02-26 2002-08-29 Shin-Etsu Chemical Co., Ltd. Method for producing an optical waveguide substrate and an optical waveguide substrate
WO2002082551A1 (en) 2001-04-02 2002-10-17 Motorola, Inc. A semiconductor structure exhibiting reduced leakage current
EP2261953A3 (de) * 2001-05-17 2011-05-25 Optronx, Inc. Lichtwellenleiter mit zusätzlichen Polysiliziumschichten
US6709989B2 (en) 2001-06-21 2004-03-23 Motorola, Inc. Method for fabricating a semiconductor structure including a metal oxide interface with silicon
US6992321B2 (en) 2001-07-13 2006-01-31 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials
US20030015770A1 (en) * 2001-07-20 2003-01-23 Motorola, Inc. Optical waveguide trenches in composite integrated circuits
US7019332B2 (en) 2001-07-20 2006-03-28 Freescale Semiconductor, Inc. Fabrication of a wavelength locker within a semiconductor structure
US6693298B2 (en) 2001-07-20 2004-02-17 Motorola, Inc. Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same
US6855992B2 (en) 2001-07-24 2005-02-15 Motorola Inc. Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same
US20030022456A1 (en) * 2001-07-25 2003-01-30 Motorola, Inc. Interferometer gating of an optical clock for an integrated circuit
US20030034491A1 (en) 2001-08-14 2003-02-20 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices for detecting an object
US20050211664A1 (en) * 2001-09-19 2005-09-29 Applied Materials, Inc. Method of forming optical waveguides in a semiconductor substrate
US20030071327A1 (en) 2001-10-17 2003-04-17 Motorola, Inc. Method and apparatus utilizing monocrystalline insulator
US6670210B2 (en) * 2002-05-01 2003-12-30 Intel Corporation Optical waveguide with layered core and methods of manufacture thereof
US6916717B2 (en) 2002-05-03 2005-07-12 Motorola, Inc. Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate
EP1776610A2 (de) * 2002-07-22 2007-04-25 Applied Materials, Inc. Optisch fertige substrate mit optischem wellenleiter und mikroelkronischem schaltkreis
US7072534B2 (en) 2002-07-22 2006-07-04 Applied Materials, Inc. Optical ready substrates
WO2004027471A1 (ja) 2002-09-18 2004-04-01 Fujitsu Limited 光導波路デバイスおよび光導波路デバイスの製造方法
US7169619B2 (en) 2002-11-19 2007-01-30 Freescale Semiconductor, Inc. Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process
US6885065B2 (en) 2002-11-20 2005-04-26 Freescale Semiconductor, Inc. Ferromagnetic semiconductor structure and method for forming the same
US6806202B2 (en) 2002-12-03 2004-10-19 Motorola, Inc. Method of removing silicon oxide from a surface of a substrate
US6965128B2 (en) 2003-02-03 2005-11-15 Freescale Semiconductor, Inc. Structure and method for fabricating semiconductor microresonator devices
US7786983B2 (en) 2003-04-08 2010-08-31 Poa Sana Liquidating Trust Apparatus and method for a data input device using a light lamina screen
JP2007501448A (ja) 2003-05-29 2007-01-25 アプライド　マテリアルズ　インコーポレイテッド 光学信号の直列経路
WO2004106986A2 (en) 2003-05-29 2004-12-09 Applied Materials Inc. Maskless fabrication of waveguide mirrors
US20050016446A1 (en) 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
US7509011B2 (en) * 2004-01-15 2009-03-24 Poa Sana Liquidating Trust Hybrid waveguide
US7676131B2 (en) * 2004-06-04 2010-03-09 Poa Sana Liquidating Trust Waveguide with a three-dimensional lens
US7471865B2 (en) * 2004-06-04 2008-12-30 Poa Sana Liquidating Trust Apparatus and method for a molded waveguide for use with touch screen displays
US7267930B2 (en) * 2004-06-04 2007-09-11 National Semiconductor Corporation Techniques for manufacturing a waveguide with a three-dimensional lens
JP2006053662A (ja) * 2004-08-10 2006-02-23 Matsushita Electric Ind Co Ltd 多重プロセッサ
JP4543956B2 (ja) * 2005-02-18 2010-09-15 ソニー株式会社 半導体装置およびそれを用いた電子機器
WO2007027615A1 (en) 2005-09-01 2007-03-08 Applied Materials, Inc. Ridge technique for fabricating an optical detector and an optical waveguide
US7551814B1 (en) 2006-02-21 2009-06-23 National Semiconductor Corporation Optical detection of user interaction based on external light source
WO2007105393A1 (ja) * 2006-03-14 2007-09-20 Konica Minolta Opto, Inc. 記録ヘッド及び記録装置
US20080031584A1 (en) * 2006-08-02 2008-02-07 National Semiconductor Corporation Apparatus and method for a singulation of polymer waveguides using photolithography
US7369724B2 (en) 2006-10-03 2008-05-06 National Semiconductor Corporation Apparatus and method for an improved lens structure for polymer wave guides which maximizes free space light coupling
DE102008012858B4 (de) * 2008-03-06 2016-08-04 Infineon Technologies Austria Ag Halbleiterbauelement mit einem das Halbleiterbauelement durchdringenden Isoliergraben und metallischen Bahnen zur galvanisch getrennten Signalübertragung und Verfahren zu dessen Herstellung
US8791405B2 (en) * 2009-12-03 2014-07-29 Samsung Electronics Co., Ltd. Optical waveguide and coupler apparatus and method of manufacturing the same
US8513037B2 (en) * 2010-12-03 2013-08-20 Bae Systems Information And Electronic Systems Integration Inc. Method of integrating slotted waveguide into CMOS process
US11532574B2 (en) * 2019-03-12 2022-12-20 Intel Coropration Through-substrate waveguide
US11886001B2 (en) * 2019-12-20 2024-01-30 Snap Inc. Optical waveguide fabrication process
US20240176067A1 (en) * 2022-11-28 2024-05-30 Globalfoundries U.S. Inc. Enlarged multilayer nitride waveguide for photonic integrated circuit

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2152464B1 (de) * 1971-09-16 1974-05-31 Thomson Csf
JPS57163207A (en) * 1981-03-31 1982-10-07 Matsushita Electric Ind Co Ltd Substrate for optical circuit
JPS57176006A (en) * 1981-04-23 1982-10-29 Nippon Sheet Glass Co Ltd Manufacture of optical waveguide circuit
JPS59220703A (ja) * 1983-05-31 1984-12-12 Fujitsu Ltd 光導波路の製造方法
US5163118A (en) * 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
JPS63224252A (ja) * 1987-02-06 1988-09-19 シーメンス、アクチエンゲゼルシヤフト 導波路−ホトダイオードアレー
JPS6442132A (en) * 1987-08-10 1989-02-14 Hitachi Ltd Formation of pattern
JPH0329903A (ja) * 1989-06-27 1991-02-07 Seiko Epson Corp 光導波路及びその製造方法
JPH03132705A (ja) * 1989-10-19 1991-06-06 Brother Ind Ltd 光導波路アレイ及びその製造方法
JPH03144514A (ja) * 1989-10-31 1991-06-19 Brother Ind Ltd 光導波路アレイおよびその製造方法
JPH0494536A (ja) * 1990-08-10 1992-03-26 Fujitsu Ltd レジストパターンの形成方法
GB9021944D0 (en) * 1990-10-09 1990-11-21 British Telecomm Self-aligned-v-groves and waveguides
US5194079A (en) * 1991-09-17 1993-03-16 The Charles Stark Draper Laboratory, Inc. Method of forming an optical channel waveguide by thermal diffusion
US5319727A (en) * 1992-12-28 1994-06-07 Honeywell Inc. Ion-beam deposited, gain enhanced ring resonators
JP3029903U (ja) 1996-04-08 1996-10-18 八重 藤川 頭髪巻付けタオル

Also Published As

Publication number Publication date
JPH07191224A (ja) 1995-07-28
JP3345143B2 (ja) 2002-11-18
DE69423720T2 (de) 2000-11-23
EP0661561B1 (de) 2000-03-29
EP0661561A3 (de) 1995-09-20
KR950019788A (ko) 1995-07-24
EP0661561A2 (de) 1995-07-05
US5604835A (en) 1997-02-18

Similar Documents

Publication Publication Date Title
DE69423720D1 (de) Vorrichtung mit integriert-optischem Wellenleiterpaar
DE69519076D1 (de) Optische Vorrichtung mit Resonator
DE69428861D1 (de) Optische vorrichtung
DE69419370D1 (de) Optische Vorrichtung
DE69315359D1 (de) Elektro-optische vorrichtung
DE69428638D1 (de) Elektrooptische Vorrichtung
DE69429466D1 (de) Optische Vorrichtung
DE69420892D1 (de) Optisches Gerät
DE69422866D1 (de) Optisches Messgerät
DE69628119D1 (de) Optischer Wellenleiter mit positiver Dispersion
DE69405427D1 (de) Vorrichtung mit fokussierendem oberflächenemittierendem Halbleiterlaser
DE69430323D1 (de) Optischer polarisator
DE69530969D1 (de) Optischer Wellenleiter mit kontrollierter Dispersion
DE69433531D1 (de) Laserbehandlungsvorrichtung mit elektronischer visualisierung
KR910006740A (ko) 평판형 플라스틱 광 도파로
DE69420628D1 (de) Rein optische Vorrichtung
DE69411789D1 (de) Optischer Wellenleiter
DE69118597D1 (de) Elektrooptische Vorrichtung
DE69532083D1 (de) Optische vorrichtung
DE69530900D1 (de) Optische Vorrichtung
DE69131612D1 (de) Optische Vorrichtung mit strukturierten Domänen
DE69526174D1 (de) Optische Wellenleitervorrichtung
DE69415238D1 (de) Optische Wellenleiter-Vorrichtung
DE69504496D1 (de) Optische vorrichtung mit gerichteter reflexion
DE69431459D1 (de) Optisches Wellenleitermodul

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee