DE69417376D1 - Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu - Google Patents

Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu

Info

Publication number: DE69417376D1
Authority: DE; Germany
Prior art keywords: resolution; film thickness; measuring method; thickness measuring; device therefor
Prior art date: 1993-12-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69417376T

Other languages

English (en)

Other versions

DE69417376T2 (de

Inventor

John S Huizinga

John J Costello Iii

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

3M Co

Original Assignee

Minnesota Mining and Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-12-21

Filing date

1994-12-17

Publication date

1999-04-29

1994-12-17 Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co

1999-04-29 Application granted granted Critical

1999-04-29 Publication of DE69417376D1 publication Critical patent/DE69417376D1/de

1999-11-11 Publication of DE69417376T2 publication Critical patent/DE69417376T2/de

2014-12-18 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)

DE69417376T 1993-12-21 1994-12-17 Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu Expired - Fee Related DE69417376T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US08/171,106 US5506407A (en)	1993-12-21	1993-12-21	High resolution high speed film measuring apparatus and method

Publications (2)

Publication Number	Publication Date
DE69417376D1 true DE69417376D1 (de)	1999-04-29
DE69417376T2 DE69417376T2 (de)	1999-11-11

Family

ID=22622552

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69417376T Expired - Fee Related DE69417376T2 (de)	1993-12-21	1994-12-17	Hochauflösendes und Hochgeschwindigkeits-Filmdickemessverfahren und Vorrichtung dazu

Country Status (6)

Country	Link
US (1)	US5506407A (de)
EP (1)	EP0660075B1 (de)
JP (1)	JPH07234109A (de)
KR (1)	KR950019636A (de)
CA (1)	CA2136506A1 (de)
DE (1)	DE69417376T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1312204B1 (it) *	1999-04-22	2002-04-09	Electronic Systems Spa	Dispositivo per la misura dello spessore di materiale in foglio mentre questo avanza e relativo metodo di misurazione
DE10104684A1 (de) *	2001-02-02	2002-08-08	Creat Stefan Kipp Kg	Schichtdickenmeßverfahren an einem Werkstück
US20040046969A1 (en) *	2002-09-10	2004-03-11	Honeywell International Inc.	System and method for monitoring thin film deposition on optical substrates
WO2009069075A2 (en) *	2007-11-29	2009-06-04	Nxp B.V.	Method of and device for determining and controlling the distance between an integrated circuit and a substrate
KR100955964B1 (ko) *	2008-03-26	2010-05-04	이종국	이형필름 검사장치
US8553228B2 (en)	2011-09-30	2013-10-08	3M Innovative Properties Company	Web inspection calibration system and related methods
KR101893771B1 (ko) *	2012-05-10	2018-08-31	삼성전자주식회사	3d 정보 처리 장치 및 방법
EP3047313B1 (de) *	2013-09-16	2021-01-20	CoeLux S.r.l.	Lichtdiffusor mit einem verbundsystem mit einer polymermatrix und kern-hülle-nanopartikeln, und verfahren zur herstellung davon
KR102287586B1 (ko) *	2017-05-31	2021-08-10	(주)아모레퍼시픽	화장료의 두께 측정 장치 및 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3737234A (en) *	1970-12-17	1973-06-05	Shimadzu Corp	Spectrophotometer for measurement of derivative spectra
GB1382081A (en) *	1972-03-14	1975-01-29	Ici Ltd	Transmission spectra
DE2252527A1 (de) *	1972-10-26	1974-05-02	Messerschmitt Boelkow Blohm	Verfahren zur schichtdickenbestimmung organischer methylverbindungen
US4027161A (en) *	1976-04-05	1977-05-31	Industrial Nucleonics Corporation	Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation
JPS58103604A (ja) *	1981-12-16	1983-06-20	Teijin Ltd	フイルムの厚さ測定方法及び測定装置
JPS6073406A (ja) *	1983-09-30	1985-04-25	Kurabo Ind Ltd	赤外線厚み計
US4672196A (en) *	1984-02-02	1987-06-09	Canino Lawrence S	Method and apparatus for measuring properties of thin materials using polarized light
JPS61133810A (ja) *	1984-12-05	1986-06-21	Hiyuutec:Kk	厚さ測定方法
US4954719A (en) *	1988-09-07	1990-09-04	Harrel, Inc.	Sheet thickness gauging method and system with auto calibration
JP2743974B2 (ja) *	1992-06-29	1998-04-28	川崎製鉄株式会社	金属粉末射出成形法における脱脂された成形体の炭素量及び酸素量の制御方法

1993
- 1993-12-21 US US08/171,106 patent/US5506407A/en not_active Expired - Lifetime
1994
- 1994-11-23 CA CA002136506A patent/CA2136506A1/en not_active Abandoned
- 1994-12-16 KR KR1019940034612A patent/KR950019636A/ko not_active Application Discontinuation
- 1994-12-17 EP EP94120062A patent/EP0660075B1/de not_active Expired - Lifetime
- 1994-12-17 DE DE69417376T patent/DE69417376T2/de not_active Expired - Fee Related
- 1994-12-21 JP JP6318048A patent/JPH07234109A/ja active Pending

Also Published As

Publication number	Publication date
US5506407A (en)	1996-04-09
JPH07234109A (ja)	1995-09-05
DE69417376T2 (de)	1999-11-11
KR950019636A (ko)	1995-07-24
EP0660075A2 (de)	1995-06-28
EP0660075B1 (de)	1999-03-24
CA2136506A1 (en)	1995-06-22
EP0660075A3 (de)	1996-06-26

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Legal Events

Date	Code	Title	Description
2000-04-20	8364	No opposition during term of opposition
2009-10-22	8339	Ceased/non-payment of the annual fee