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DE69331620D1 - Elektronische Linse - Google Patents

Elektronische Linse

Info

Publication number
DE69331620D1
DE69331620D1 DE69331620T DE69331620T DE69331620D1 DE 69331620 D1 DE69331620 D1 DE 69331620D1 DE 69331620 T DE69331620 T DE 69331620T DE 69331620 T DE69331620 T DE 69331620T DE 69331620 D1 DE69331620 D1 DE 69331620D1
Authority
DE
Germany
Prior art keywords
electronic lens
lens
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69331620T
Other languages
English (en)
Other versions
DE69331620T2 (de
Inventor
Toshiro Kubo
Toshiyuki Ohashi
Mikio Ichihashi
Yuji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69331620D1 publication Critical patent/DE69331620D1/de
Application granted granted Critical
Publication of DE69331620T2 publication Critical patent/DE69331620T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69331620T 1992-11-06 1993-11-05 Elektronische Linse Expired - Lifetime DE69331620T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32148392 1992-11-06

Publications (2)

Publication Number Publication Date
DE69331620D1 true DE69331620D1 (de) 2002-04-04
DE69331620T2 DE69331620T2 (de) 2002-10-17

Family

ID=18133072

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69331620T Expired - Lifetime DE69331620T2 (de) 1992-11-06 1993-11-05 Elektronische Linse

Country Status (3)

Country Link
US (1) US5442182A (de)
EP (1) EP0596529B1 (de)
DE (1) DE69331620T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6523240B1 (en) 1996-05-09 2003-02-25 Spotless Plastics Pty. Ltd. Method for reusing hangers with size indicia
US6627899B2 (en) * 1998-05-27 2003-09-30 Nikon Corporation Magnetic lenses, charged-particle-beam optical systems, and charged-particle-beam pattern-transfer apparatus
JP2002117800A (ja) * 2000-10-05 2002-04-19 Jeol Ltd 電子線バイプリズム装置を備えた電子顕微鏡
US6624426B2 (en) * 2000-12-11 2003-09-23 Schlumberger Technologies Inc. Split magnetic lens for controlling a charged particle beam
US7078994B2 (en) * 2003-02-18 2006-07-18 Glenn Henry Martin Constant power and temperature coil
DE102004019835B4 (de) * 2004-04-23 2007-08-02 Vistec Electron Beam Gmbh Beleuchtungskondensor für ein Partikeloptik-Projektionssystem
JP6285753B2 (ja) * 2014-02-28 2018-02-28 日本電子株式会社 透過電子顕微鏡
CN106783492A (zh) * 2016-12-14 2017-05-31 聚束科技（北京）有限公司 一种磁透镜及激励电流控制方法
JP2019169362A (ja) * 2018-03-23 2019-10-03 株式会社日立製作所 電子ビーム装置
JP6954885B2 (ja) * 2018-11-26 2021-10-27 日本電子株式会社 荷電粒子線装置及び荷電粒子線装置の制御方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2323328A (en) * 1940-10-31 1943-07-06 Rca Corp Projection lens for electron microscopes
US2418349A (en) * 1945-12-13 1947-04-01 Rca Corp Method of and means for correcting for distortion in electron lens systems
NL6918302A (de) * 1969-12-05 1971-06-08
JPS5213713B2 (de) * 1971-12-15 1977-04-16
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
JPS5981850A (ja) * 1982-11-02 1984-05-11 Internatl Precision Inc 電子レンズ
US4544847A (en) * 1983-07-28 1985-10-01 Varian Associates, Inc. Multi-gap magnetic imaging lens for charged particle beams

Also Published As

Publication number Publication date
EP0596529A1 (de) 1994-05-11
US5442182A (en) 1995-08-15
EP0596529B1 (de) 2002-02-27
DE69331620T2 (de) 2002-10-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition