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DE69307525D1 - Heizelement aus pyrolitischem bornitrid - Google Patents

Heizelement aus pyrolitischem bornitrid

Info

Publication number
DE69307525D1
DE69307525D1 DE69307525T DE69307525T DE69307525D1 DE 69307525 D1 DE69307525 D1 DE 69307525D1 DE 69307525 T DE69307525 T DE 69307525T DE 69307525 T DE69307525 T DE 69307525T DE 69307525 D1 DE69307525 D1 DE 69307525D1
Authority
DE
Germany
Prior art keywords
bornitride
pyrolitic
heating element
heating
pyrolitic bornitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69307525T
Other languages
English (en)
Other versions
DE69307525T2 (de
Inventor
Michael Gilbert
Timothy Hejl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
Advanced Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Ceramics Corp filed Critical Advanced Ceramics Corp
Publication of DE69307525D1 publication Critical patent/DE69307525D1/de
Application granted granted Critical
Publication of DE69307525T2 publication Critical patent/DE69307525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/145—Carbon only, e.g. carbon black, graphite
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
DE69307525T 1992-09-29 1993-09-24 Heizelement aus pyrolitischem bornitrid Expired - Lifetime DE69307525T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/953,156 US5343022A (en) 1992-09-29 1992-09-29 Pyrolytic boron nitride heating unit
PCT/US1993/009053 WO1994008436A1 (en) 1992-09-29 1993-09-24 Pyrolytic boron nitride heating unit

Publications (2)

Publication Number Publication Date
DE69307525D1 true DE69307525D1 (de) 1997-02-27
DE69307525T2 DE69307525T2 (de) 1997-04-30

Family

ID=25493651

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69307525T Expired - Lifetime DE69307525T2 (de) 1992-09-29 1993-09-24 Heizelement aus pyrolitischem bornitrid

Country Status (7)

Country Link
US (1) US5343022A (de)
EP (1) EP0663138B1 (de)
JP (1) JP2702609B2 (de)
KR (1) KR0174587B1 (de)
CA (1) CA2141340C (de)
DE (1) DE69307525T2 (de)
WO (1) WO1994008436A1 (de)

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JPH07172963A (ja) * 1993-12-22 1995-07-11 Shin Etsu Chem Co Ltd 熱分解窒化ホウ素被覆複層成形体及びその製造方法
JPH07307377A (ja) * 1993-12-27 1995-11-21 Shin Etsu Chem Co Ltd 静電チャック付セラミックスヒーター
JP3606472B2 (ja) * 1994-07-12 2005-01-05 信越化学工業株式会社 熱分解窒化ホウ素被覆複層成形体及びその製造方法
US5495550A (en) * 1994-09-28 1996-02-27 Advanced Ceramics Corporation Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating
JPH08302474A (ja) * 1995-04-28 1996-11-19 Anelva Corp Ｃｖｄ装置の加熱装置
US6035101A (en) * 1997-02-12 2000-03-07 Applied Materials, Inc. High temperature multi-layered alloy heater assembly and related methods
JP3477062B2 (ja) * 1997-12-26 2003-12-10 京セラ株式会社 ウエハ加熱装置
JP4040814B2 (ja) * 1998-11-30 2008-01-30 株式会社小松製作所 円盤状ヒータ及び温度制御装置
US5977526A (en) * 1999-03-05 1999-11-02 Board Of Regents The University Of Texas Heater for high vacuum optical view port
US6537372B1 (en) 1999-06-29 2003-03-25 American Crystal Technologies, Inc. Heater arrangement for crystal growth furnace
US6602345B1 (en) 1999-06-29 2003-08-05 American Crystal Technologies, Inc., Heater arrangement for crystal growth furnace
US6140624A (en) * 1999-07-02 2000-10-31 Advanced Ceramics Corporation Pyrolytic boron nitride radiation heater
US6410172B1 (en) 1999-11-23 2002-06-25 Advanced Ceramics Corporation Articles coated with aluminum nitride by chemical vapor deposition
JP4697909B2 (ja) * 2000-05-25 2011-06-08 コバレントマテリアル株式会社 カーボンワイヤー発熱体封入ヒータ
KR100396092B1 (ko) * 2001-06-05 2003-08-27 재단법인 포항산업과학연구원 카본 발열체 및 그 제조 방법
JP4509433B2 (ja) * 2001-07-12 2010-07-21 株式会社日立国際電気 基板処理装置および半導体装置の製造方法
US6624423B2 (en) 2002-01-14 2003-09-23 General Electric Company Semiconductor detector for thermal neutrons based on pyrolytic boron nitride
US20040074898A1 (en) * 2002-10-21 2004-04-22 Mariner John T. Encapsulated graphite heater and process
KR20050088159A (ko) * 2003-01-17 2005-09-01 제너럴 일렉트릭 캄파니 웨이퍼 처리 장치
US20050022743A1 (en) * 2003-07-31 2005-02-03 Semiconductor Energy Laboratory Co., Ltd. Evaporation container and vapor deposition apparatus
KR101352150B1 (ko) 2004-09-27 2014-02-17 갈리움 엔터프라이지즈 피티와이 엘티디 Ⅲa족 금속 질화물 막의 성장 방법 및 장치 및 ⅲa족 금속 질화물 막
US20060096946A1 (en) * 2004-11-10 2006-05-11 General Electric Company Encapsulated wafer processing device and process for making thereof
WO2006060134A2 (en) * 2004-11-15 2006-06-08 Cree, Inc. Restricted radiated heating assembly for high temperature processing
JP4435742B2 (ja) 2005-08-09 2010-03-24 信越化学工業株式会社 加熱素子
JP2007134088A (ja) * 2005-11-08 2007-05-31 Shin Etsu Chem Co Ltd セラミックスヒーターおよびセラミックスヒーターの製造方法
KR101299495B1 (ko) * 2005-12-08 2013-08-29 신에쓰 가가꾸 고교 가부시끼가이샤 세라믹스 히터, 히터 급전 부품 및 세라믹스 히터의제조방법
US20070224451A1 (en) * 2006-03-24 2007-09-27 General Electric Company Composition, coating, coated article, and method
JP4654153B2 (ja) * 2006-04-13 2011-03-16 信越化学工業株式会社 加熱素子
KR101329630B1 (ko) * 2006-04-13 2013-11-14 신에쓰 가가꾸 고교 가부시끼가이샤 가열소자
US7420143B2 (en) * 2006-06-11 2008-09-02 Momentive Performance Materials Inc. Durable graphite connector and method for manufacturing thereof
US7901509B2 (en) 2006-09-19 2011-03-08 Momentive Performance Materials Inc. Heating apparatus with enhanced thermal uniformity and method for making thereof
US7741584B2 (en) 2007-01-21 2010-06-22 Momentive Performance Materials Inc. Encapsulated graphite heater and process
DE102009026340B4 (de) * 2009-08-06 2013-01-31 Solibro Gmbh Effusionszelle
US8481896B2 (en) * 2009-12-08 2013-07-09 Phillip G. Quinton, Jr. Heater plate with embedded hyper-conductive thermal diffusion layer for increased temperature rating and uniformity
JP5603601B2 (ja) * 2010-01-15 2014-10-08 株式会社ブリヂストン ヒータユニット
JP2013004247A (ja) * 2011-06-15 2013-01-07 Shin Etsu Chem Co Ltd セラミックスヒーター
JP5996519B2 (ja) * 2013-03-13 2016-09-21 信越化学工業株式会社 セラミックヒーター
EP3022986A4 (de) * 2013-07-15 2017-03-01 Momentive Performance Materials Inc. Beschichtete graphitheizerkonfiguration
US10687393B2 (en) 2014-06-13 2020-06-16 Momentive Performance Materials Inc. One-coat encapsulated graphite heater and process
WO2016138047A1 (en) * 2015-02-23 2016-09-01 Syntalli, Inc. Pill management and health monitoring system
US10237921B2 (en) 2016-03-18 2019-03-19 Momentive Performance Materials Inc. Cylindrical heater
CN108863443B (zh) * 2018-07-10 2021-05-14 山东国晶新材料有限公司 一种平面复合加热器的制备方法
KR20250032004A (ko) 2023-08-30 2025-03-07 주식회사 제이몬 장방형 증착장치

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US1528388A (en) * 1923-11-26 1925-03-03 Morgan Crucible Co Resistor for electric heating
US2640861A (en) * 1950-11-27 1953-06-02 Harshaw Chem Corp Resistance furnace
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
DE2402111C3 (de) * 1974-01-17 1979-01-11 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Reihenverdampfer für Vakuumbedampfungsanlagen
DE2654606A1 (de) * 1976-12-02 1978-06-08 Leybold Heraeus Gmbh & Co Kg Einklemmvorrichtung fuer verdampferschiffchen
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
US4164646A (en) * 1978-04-24 1979-08-14 Grise Frederick Gerard J Solid current carrying and heatable member with electric connection
US4755658A (en) * 1985-11-12 1988-07-05 Ultra Carbon Corporation Segmented heater system
FR2627658B3 (fr) * 1988-02-18 1990-05-04 Lgd Paris Elements chauffants en fibres de carbone
US4927994A (en) * 1989-02-28 1990-05-22 The United States Of America As Represented By The Secretary Of The Air Force Modular resistance heater assembly
US5031229A (en) * 1989-09-13 1991-07-09 Chow Loren A Deposition heaters
US5059770A (en) * 1989-09-19 1991-10-22 Watkins-Johnson Company Multi-zone planar heater assembly and method of operation
JPH0432182A (ja) * 1990-05-25 1992-02-04 Toshiba Lighting & Technol Corp 赤外線ヒータ
US5155652A (en) * 1991-05-02 1992-10-13 International Business Machines Corporation Temperature cycling ceramic electrostatic chuck
FR2677840B1 (fr) * 1991-06-11 1993-10-15 Propulsion Ste Europeenne Resistance electrique chauffante utilisant des elements resistifs en materiau composite carbone/carbone.

Also Published As

Publication number Publication date
EP0663138A1 (de) 1995-07-19
KR0174587B1 (ko) 1999-05-01
CA2141340C (en) 1999-01-12
EP0663138B1 (de) 1997-01-15
US5343022A (en) 1994-08-30
WO1994008436A1 (en) 1994-04-14
JP2702609B2 (ja) 1998-01-21
DE69307525T2 (de) 1997-04-30
CA2141340A1 (en) 1994-04-14
JPH08500932A (ja) 1996-01-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US