[go: up one dir, main page]

DE69217721D1 - Mikroverschiebungselement für ein Tunnelrastermikroskop - Google Patents

Mikroverschiebungselement für ein Tunnelrastermikroskop

Info

Publication number
DE69217721D1
DE69217721D1 DE69217721T DE69217721T DE69217721D1 DE 69217721 D1 DE69217721 D1 DE 69217721D1 DE 69217721 T DE69217721 T DE 69217721T DE 69217721 T DE69217721 T DE 69217721T DE 69217721 D1 DE69217721 D1 DE 69217721D1
Authority
DE
Germany
Prior art keywords
displacement element
thin film
scanning microscope
micro
micro displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69217721T
Other languages
English (en)
Other versions
DE69217721T2 (de
Inventor
Keisuke Yamamoto
Yutaka Hirai
Masaru Nakayama
Takayuki Yagi
Yuji Kasanuki
Yoshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69217721D1 publication Critical patent/DE69217721D1/de
Application granted granted Critical
Publication of DE69217721T2 publication Critical patent/DE69217721T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
    • Y10S977/837—Piezoelectric property of nanomaterial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Micromachines (AREA)
DE69217721T 1991-05-28 1992-05-27 Mikroverschiebungselement für ein Tunnelrastermikroskop Expired - Fee Related DE69217721T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15094291 1991-05-28
JP15125592A JP3198355B2 (ja) 1991-05-28 1992-05-20 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置

Publications (2)

Publication Number Publication Date
DE69217721D1 true DE69217721D1 (de) 1997-04-10
DE69217721T2 DE69217721T2 (de) 1997-07-17

Family

ID=26480370

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69217721T Expired - Fee Related DE69217721T2 (de) 1991-05-28 1992-05-27 Mikroverschiebungselement für ein Tunnelrastermikroskop

Country Status (6)

Country Link
US (1) US5268571A (de)
EP (1) EP0516380B1 (de)
JP (1) JP3198355B2 (de)
AT (1) ATE149685T1 (de)
CA (1) CA2069702C (de)
DE (1) DE69217721T2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
JPH06132579A (ja) * 1992-09-01 1994-05-13 Canon Inc 変位素子及びそれを用いたプローブ、同プローブを有する機器
US5338932A (en) * 1993-01-04 1994-08-16 Motorola, Inc. Method and apparatus for measuring the topography of a semiconductor device
JPH06241777A (ja) * 1993-02-16 1994-09-02 Mitsubishi Electric Corp 原子間力顕微鏡用カンチレバー、その製造方法、このカンチレバーを用いた原子間力顕微鏡及びこのカンチレバーを用いた試料表面密着性評価方法
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
US5537863A (en) * 1993-07-15 1996-07-23 Nikon Corporation Scanning probe microscope having a cantilever used therein
US5475318A (en) * 1993-10-29 1995-12-12 Robert B. Marcus Microprobe
US5679889A (en) * 1995-02-06 1997-10-21 Nikon Corporation Method for extracting electrode and cantilever for AFM using said method for extracting electrode
JP3581421B2 (ja) * 1995-02-23 2004-10-27 キヤノン株式会社 情報処理装置
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
DE19520796A1 (de) * 1995-06-07 1996-12-12 Siemens Ag Piezoelektrischer Biegewandler
US7260051B1 (en) 1998-12-18 2007-08-21 Nanochip, Inc. Molecular memory medium and molecular memory integrated circuit
MY128744A (en) * 2000-02-01 2007-02-28 Matsushita Electric Ind Co Ltd Head support machanism and thin film piezolectric actuator
US6887873B2 (en) 2001-03-23 2005-05-03 Aventis Pharma S.A. Triazine derivatives and their application as antitelomerase agents
US6912778B2 (en) * 2001-07-19 2005-07-05 Micron Technology, Inc. Methods of fabricating full-wafer silicon probe cards for burn-in and testing of semiconductor devices
WO2003049209A1 (en) * 2001-11-21 2003-06-12 Apogent Robotics Limited Actuator structure
KR100746768B1 (ko) * 2002-03-19 2007-08-06 주식회사 엘지이아이 캔틸레버를 이용한 정보 기록 및 판독 장치
US7063909B2 (en) * 2002-08-14 2006-06-20 Hewlett-Packard Development Company, L.P. Fuel-cell element stack with stress relief and methods
JP4329322B2 (ja) * 2002-10-04 2009-09-09 ソニー株式会社 相互反応作用検出方法及びバイオアッセイ装置、並びにバイオアッセイ用基板
US7233517B2 (en) 2002-10-15 2007-06-19 Nanochip, Inc. Atomic probes and media for high density data storage
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
US7367119B2 (en) 2005-06-24 2008-05-06 Nanochip, Inc. Method for forming a reinforced tip for a probe storage device
US7463573B2 (en) 2005-06-24 2008-12-09 Nanochip, Inc. Patterned media for a high density data storage device
US7309630B2 (en) 2005-07-08 2007-12-18 Nanochip, Inc. Method for forming patterned media for a high density data storage device
JP4316590B2 (ja) 2006-06-23 2009-08-19 株式会社東芝 圧電駆動型ｍｅｍｓアクチュエータ
KR100790893B1 (ko) * 2006-10-20 2008-01-03 삼성전자주식회사 볼록한 저항성 팁을 구비한 반도체 탐침 및 그 제조방법
JP5267559B2 (ja) 2008-05-29 2013-08-21 株式会社村田製作所 シート型振動体および音響機器
CN102037740B (zh) 2008-05-29 2014-08-27 株式会社村田制作所 压电扬声器、扬声器装置以及触觉反馈装置
JP5609244B2 (ja) * 2010-04-28 2014-10-22 パナソニック株式会社 振動発電デバイス
CN102064745B (zh) * 2010-11-15 2013-07-31 中国人民解放军国防科学技术大学 一种双稳压电悬臂梁振子装置
FR3022690B1 (fr) 2014-06-24 2016-07-22 Commissariat Energie Atomique Dispositif de connexion electrique comportant des elements de connexion a position commandable

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946432B2 (ja) * 1980-04-11 1984-11-12 株式会社東芝 バイモルフ圧電素子
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
EP0262637B1 (de) * 1986-09-29 1995-03-22 Mitsubishi Chemical Corporation Piezoelektrischer Antrieb
EP0262253A1 (de) * 1986-10-03 1988-04-06 International Business Machines Corporation Mikromechanische Fühlervorrichtung für atomare Kräfte
DE3789373T2 (de) * 1986-12-24 1994-06-23 Canon Kk Aufnahmegerät und Wiedergabegerät.
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
EP0363550B1 (de) * 1988-10-14 1994-08-03 International Business Machines Corporation Abstandsgesteuerter Tunneleffektwandler und den Wandler verwendende Speichereinheit mit direktem Zugriff
US5079958A (en) * 1989-03-17 1992-01-14 Olympus Optical Co., Ltd. Sensor having a cantilever
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
US5075548A (en) * 1989-07-17 1991-12-24 Olympus Optical Co., Ltd. Tunnel current probe moving mechanism having parallel cantilevers
JPH0483104A (ja) * 1990-07-26 1992-03-17 Olympus Optical Co Ltd 走査型トンネル顕微鏡
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構

Also Published As

Publication number Publication date
JPH05347439A (ja) 1993-12-27
US5268571A (en) 1993-12-07
EP0516380A2 (de) 1992-12-02
CA2069702C (en) 1999-01-19
EP0516380B1 (de) 1997-03-05
JP3198355B2 (ja) 2001-08-13
CA2069702A1 (en) 1992-11-29
EP0516380A3 (en) 1993-06-16
ATE149685T1 (de) 1997-03-15
DE69217721T2 (de) 1997-07-17

Similar Documents

Publication Publication Date Title
DE69217721D1 (de) Mikroverschiebungselement für ein Tunnelrastermikroskop
EP0511763A3 (de)
EP0472342A3 (en) Micro-displacement type information detection probe device and microscope and information processing device by use thereof
EP0499149B1 (de) Antriebsvorrichtung und Aufnahme- und Wiedergabegerät unter Verwendung derselben Vorrichtung
DE69126830D1 (de) Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung
US3794410A (en) Articulated mirror
DE69121868D1 (de) Freitragende Sonde und Apparat zur Anwendung derselben
JPS6364640A (ja) アクチユエ−タ
DE69221944D1 (de) Informationsaufzeichnungs/Wiedergabegerät
ATE148582T1 (de) Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung
KR970017286A (ko) 트랙킹방법과 기억장치
JPH04155635A (ja) 情報記録ユニットと情報記録及び／又は再生装置と情報記録及び／又は再生方法と情報記録媒体
US5444191A (en) Information processing apparatus and device for use in same
JPS633375B2 (de)
US20240386908A1 (en) Tape drive device and method of detecting state of head unit of tape drive device
JP2002093095A (ja) 微小位置決めアクチュエータを備えたヘッドジンバルアセンブリの特性検査方法
JPH0926427A (ja) 位置決め装置、およびこれを用いたメディア移動型メモリ装置
KR100331444B1 (ko) 강유전체 박막을 이용한 초고밀도 정보 저장 장치
JPS60147926A (ja) 磁気ヘツド駆動素子
US6975481B1 (en) Driver systems and methods for an actuator of a hard disk drive
JP3023901B2 (ja) 情報記録再生装置
SU1265840A1 (ru) Устройство дл управлени перемещением видеоголовки в системе автотрекинга
JPH0434226A (ja) 微小変位装置
KR0128060Y1 (ko) 자기헤드의 트랙추종장치
KR100331450B1 (ko) 미세 탐침을 이용한 초소형 고밀도 정보 저장 장치

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee