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DE69213245D1 - Dielektrischer interferenzspiegel und herstellungsverfahren eines derartigen spiegels - Google Patents

Dielektrischer interferenzspiegel und herstellungsverfahren eines derartigen spiegels

Info

Publication number
DE69213245D1
DE69213245D1 DE69213245T DE69213245T DE69213245D1 DE 69213245 D1 DE69213245 D1 DE 69213245D1 DE 69213245 T DE69213245 T DE 69213245T DE 69213245 T DE69213245 T DE 69213245T DE 69213245 D1 DE69213245 D1 DE 69213245D1
Authority
DE
Germany
Prior art keywords
mirror
producing
dielectric interference
dielectric
interference mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69213245T
Other languages
English (en)
Other versions
DE69213245T2 (de
Inventor
Herve Ter Floch
Michel Berger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69213245D1 publication Critical patent/DE69213245D1/de
Application granted granted Critical
Publication of DE69213245T2 publication Critical patent/DE69213245T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24413—Metal or metal compound
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laminated Bodies (AREA)
DE69213245T 1991-10-15 1992-10-13 Dielektrischer interferenzspiegel und herstellungsverfahren eines derartigen spiegels Expired - Fee Related DE69213245T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9112685A FR2682486B1 (fr) 1991-10-15 1991-10-15 Miroir dielectrique interferentiel et procede de fabrication d'un tel miroir.
PCT/FR1992/000962 WO1993008490A1 (fr) 1991-10-15 1992-10-13 Miroir dielectrique interferentiel et procede de fabrication d'un tel miroir

Publications (2)

Publication Number Publication Date
DE69213245D1 true DE69213245D1 (de) 1996-10-02
DE69213245T2 DE69213245T2 (de) 1997-03-06

Family

ID=9417921

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213245T Expired - Fee Related DE69213245T2 (de) 1991-10-15 1992-10-13 Dielektrischer interferenzspiegel und herstellungsverfahren eines derartigen spiegels

Country Status (6)

Country Link
US (1) US5623375A (de)
EP (1) EP0608375B1 (de)
AU (1) AU2911292A (de)
DE (1) DE69213245T2 (de)
FR (1) FR2682486B1 (de)
WO (1) WO1993008490A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747152A (en) * 1993-12-02 1998-05-05 Dai Nippon Printing Co., Ltd. Transparent functional membrane containing functional ultrafine particles, transparent functional film, and process for producing the same
EP0816875A1 (de) * 1996-06-28 1998-01-07 Alusuisse Technology & Management AG Reflektor mit reflexionserhöhendem Schichtverbund
FR2759464B1 (fr) * 1997-02-10 1999-03-05 Commissariat Energie Atomique Procede de preparation d'un materiau optique multicouches avec reticulation-densification par insolation aux rayons ultraviolets et materiau optique ainsi prepare
FR2759360B1 (fr) 1997-02-10 1999-03-05 Commissariat Energie Atomique Materiau polymerique inorganique a base d'oxyde de tantale notamment a indice de refraction eleve, mecaniquement resistant a l'abrasion, son procede de fabrication et materiau optique comprenant ce materiau
FR2785897B1 (fr) * 1998-11-16 2000-12-08 Commissariat Energie Atomique Couche mince d'oxyde d'hafnium et procede de depot
JP3751778B2 (ja) * 1999-04-26 2006-03-01 日本板硝子株式会社 ゾルゲル成形物の製造方法
US7843632B2 (en) * 2006-08-16 2010-11-30 Cymer, Inc. EUV optics
US6656332B1 (en) * 2002-05-29 2003-12-02 General Motors Corporation Replicating method for surface finish inspection
AU2004287785B2 (en) * 2003-10-28 2010-01-07 Tru Vue, Inc. Anti-reflective coating for a substrate
US7874060B2 (en) * 2004-06-24 2011-01-25 Northwestern University Method of making optics element
FR2900351B1 (fr) 2006-04-26 2008-06-13 Commissariat Energie Atomique Procede de preparation d'une couche nanoporeuse de nanoparticules et couche ainsi obtenue
US20090115060A1 (en) 2007-11-01 2009-05-07 Infineon Technologies Ag Integrated circuit device and method
FR2974800B1 (fr) * 2011-05-05 2013-04-26 Saint Gobain Substrat transparent revetu d'un empilement de couches minerales dont une poreuse recouverte
US20140063585A1 (en) * 2012-08-31 2014-03-06 John G. Hagoplan Phase-controlled magnetic mirror, mirror system, and methods of using the mirror
WO2017164155A1 (ja) * 2016-03-25 2017-09-28 東レ株式会社 光源ユニット、積層部材ならびにそれらを用いたディスプレイおよび照明装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2432484A (en) * 1943-03-12 1947-12-09 American Optical Corp Reflection reducing coating having a gradually increasing index of refraction
US3976890A (en) * 1974-09-09 1976-08-24 Itek Corporation Radiation damage resistant mirror
MX144554A (es) * 1976-07-30 1981-10-26 Pont A Mousson Mejoras a procedimiento y sistema para modificar el espesor de un cuerpo extruido a caudal constante
US4576850A (en) * 1978-07-20 1986-03-18 Minnesota Mining And Manufacturing Company Shaped plastic articles having replicated microstructure surfaces
US4357395A (en) * 1980-08-22 1982-11-02 General Electric Company Transfer lamination of vapor deposited foils, method and product
US4414316A (en) * 1980-09-05 1983-11-08 Rexham Corporation Composite lenticular screen sheet
US4451119A (en) * 1981-04-02 1984-05-29 Eastman Kodak Company Composite mirror and method of construction
JPH0642002B2 (ja) * 1983-07-29 1994-06-01 セイコーエプソン株式会社 プラスチックレンズ
JPS60214302A (ja) * 1984-04-11 1985-10-26 Seiko Epson Corp 高屈折率プラスチツクレンズ
JPS61110101A (ja) * 1984-11-05 1986-05-28 Yuken Kogyo Kk ハ−フミラ−の製造方法
JPS61196201A (ja) * 1985-02-26 1986-08-30 Canon Inc 低温蒸着成膜法
JPS6374005A (ja) * 1986-09-18 1988-04-04 Hoya Corp 多層膜裏面反射鏡
US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
US4997674A (en) * 1987-06-30 1991-03-05 Akzo America Inc. Conductive metallization of substrates via developing agents
US5183597A (en) * 1989-02-10 1993-02-02 Minnesota Mining And Manufacturing Company Method of molding microstructure bearing composite plastic articles
US5149578A (en) * 1989-12-26 1992-09-22 The Dow Chemical Company Multilayer film for tamper indication by use of optical interference reflection

Also Published As

Publication number Publication date
FR2682486A1 (fr) 1993-04-16
EP0608375A1 (de) 1994-08-03
EP0608375B1 (de) 1996-08-28
US5623375A (en) 1997-04-22
FR2682486B1 (fr) 1993-11-12
AU2911292A (en) 1993-05-21
DE69213245T2 (de) 1997-03-06
WO1993008490A1 (fr) 1993-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee