DE69131870D1 - Ladungsträgerstrahl-Vorrichtung - Google Patents

Ladungsträgerstrahl-Vorrichtung

Info

Publication number: DE69131870D1
Authority: DE; Germany
Prior art keywords: beam device; charge beam; charge
Prior art date: 1990-08-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69131870T

Other languages

English (en)

Other versions

DE69131870T2 (de

Inventor

Petrus Maria Mul

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

FEI Co

Original Assignee

Koninklijke Philips Electronics NV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-08-10

Filing date

1991-08-06

Publication date

2000-01-27

1991-08-06 Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV

2000-01-27 Application granted granted Critical

2000-01-27 Publication of DE69131870D1 publication Critical patent/DE69131870D1/de

2000-08-17 Publication of DE69131870T2 publication Critical patent/DE69131870T2/de

2011-08-07 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0216—Means for avoiding or correcting vibration effects

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Sources, Ion Sources (AREA)
Electron Beam Exposure (AREA)

DE69131870T 1990-08-10 1991-08-06 Ladungsträgerstrahl-Vorrichtung Expired - Lifetime DE69131870T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL9001799		1990-08-10

Publications (2)

Publication Number	Publication Date
DE69131870D1 true DE69131870D1 (de)	2000-01-27
DE69131870T2 DE69131870T2 (de)	2000-08-17

Family

ID=19857535

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
DE69131870T Expired - Lifetime DE69131870T2 (de)	1990-08-10	1991-08-06	Ladungsträgerstrahl-Vorrichtung
DE69131869T Expired - Lifetime DE69131869T2 (de)	1990-08-10	1991-08-06	Ladungsträgerstrahl-Vorrichtung
DE69125229T Expired - Lifetime DE69125229T2 (de)	1990-08-10	1991-08-06	Ladungspartikelstrahlanordnung

Family Applications After (2)

Application Number	Title	Priority Date	Filing Date
DE69131869T Expired - Lifetime DE69131869T2 (de)	1990-08-10	1991-08-06	Ladungsträgerstrahl-Vorrichtung
DE69125229T Expired - Lifetime DE69125229T2 (de)	1990-08-10	1991-08-06	Ladungspartikelstrahlanordnung

Country Status (4)

Country	Link
US (1)	US5235188A (de)
EP (3)	EP0473216B1 (de)
JP (3)	JP3117752B2 (de)
DE (3)	DE69131870T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5463268A (en) *	1994-05-23	1995-10-31	National Electrostatics Corp.	Magnetically shielded high voltage electron accelerator
US6246190B1 (en)	1999-07-30	2001-06-12	Etec Systems, Inc.	Integrated electron gun and electronics module
US6753533B2 (en) *	2002-11-04	2004-06-22	Jeol Ltd.	Electron beam apparatus and method of controlling same
US8501136B2 (en) *	2006-02-06	2013-08-06	The University Of North Carolina At Chapel Hill	Synthesis and processing of rare-earth boride nanowires as electron emitters
US8170604B2 (en) *	2006-06-27	2012-05-01	Motorola Mobility, Inc.	Method and system for managing communications for a multi-mode communications device
US20080102874A1 (en) *	2006-10-28	2008-05-01	Motorola, Inc.	Control of transmit power of a second transmitter based on antenna loading parameters measured on a first transmitter
US8059702B2 (en) *	2006-11-30	2011-11-15	Motorola Mobility, Inc.	Monitoring multiple modem transmission in a communication device
US8665778B2 (en) *	2006-11-30	2014-03-04	Motorola Mobility Llc	Monitoring and control of transmit power in a multi-modem wireless communication device
US8744519B2 (en) *	2006-12-14	2014-06-03	Motorola Mobility Llc	Multimodal phone data session management enhancement that alleviates dual transmission problems
JP4636032B2 (ja)	2007-02-01	2011-02-23	トヨタ自動車株式会社	電源装置
US8195250B2 (en) *	2008-04-30	2012-06-05	Motorola Mobility, Inc.	Method and apparatus for controlling power among modems in a multi-mode mobile communication device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE633078A (de) *	1962-05-30
JPS4922371B1 (de) *	1970-01-16	1974-06-07
US3605009A (en) *	1970-05-06	1971-09-14	Deltaray Corp	Stabilized power supply
US3766427A (en) *	1970-06-15	1973-10-16	American Optical Corp	Field emission electron gun
US3678333A (en) *	1970-06-15	1972-07-18	American Optical Corp	Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
US3676670A (en) *	1970-10-09	1972-07-11	Etec Corp	Electron gun biasing system
GB1331113A (en) *	1970-11-05	1973-09-19	Secr Defence	Control apparatus for an electron beam welding machine
JPS5247660B2 (de) *	1971-11-17	1977-12-03
US3809899A (en) *	1972-08-17	1974-05-07	Tektronix Inc	Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
JPS529971B2 (de) *	1973-07-02	1977-03-19
JPS5279759A (en) *	1975-12-26	1977-07-05	Hitachi Ltd	Multi-stage accelerating tube
JPS6381742A (ja) *	1986-09-26	1988-04-12	Jeol Ltd	電界放射型電子銃
JP2796305B2 (ja) *	1988-06-17	1998-09-10	株式会社日立製作所	電界放射電子銃
US5059859A (en) *	1989-04-14	1991-10-22	Hitachi, Ltd.	Charged particle beam generating apparatus of multi-stage acceleration type

1991
- 1991-08-06 EP EP91202016A patent/EP0473216B1/de not_active Expired - Lifetime
- 1991-08-06 DE DE69131870T patent/DE69131870T2/de not_active Expired - Lifetime
- 1991-08-06 EP EP95202599A patent/EP0689225B1/de not_active Expired - Lifetime
- 1991-08-06 EP EP95202598A patent/EP0689224B1/de not_active Expired - Lifetime
- 1991-08-06 DE DE69131869T patent/DE69131869T2/de not_active Expired - Lifetime
- 1991-08-06 DE DE69125229T patent/DE69125229T2/de not_active Expired - Lifetime
- 1991-08-07 US US07/741,282 patent/US5235188A/en not_active Expired - Lifetime
- 1991-08-07 JP JP03221144A patent/JP3117752B2/ja not_active Expired - Lifetime
2000
- 2000-07-10 JP JP2000208280A patent/JP3325557B2/ja not_active Expired - Lifetime
- 2000-07-10 JP JP2000208279A patent/JP3325556B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0689224A1 (de)	1995-12-27
EP0689225B1 (de)	1999-12-22
JP3117752B2 (ja)	2000-12-18
DE69131870T2 (de)	2000-08-17
EP0689225A1 (de)	1995-12-27
EP0473216A2 (de)	1992-03-04
JP2001052641A (ja)	2001-02-23
EP0473216B1 (de)	1997-03-19
JP2001060446A (ja)	2001-03-06
EP0473216A3 (de)	1992-03-11
DE69131869D1 (de)	2000-01-27
DE69125229T2 (de)	1997-08-28
DE69131869T2 (de)	2000-11-02
JPH04233146A (ja)	1992-08-21
JP3325557B2 (ja)	2002-09-17
DE69125229D1 (de)	1997-04-24
US5235188A (en)	1993-08-10
JP3325556B2 (ja)	2002-09-17
EP0689224B1 (de)	1999-12-22

Publication	Publication Date	Title
DE69132441D1 (de)	2000-11-16	Ladungsträgerstrahlgerät
ITRM910809A0 (it)	1991-10-25	Apparecchio ricevente
DE69124900D1 (de)	1997-04-10	Implantationshilfsvorrichtung
DE69115552D1 (de)	1996-02-01	Bezugsgenerator
DE69133063D1 (de)	2002-08-14	Ladungsträgerstrahlgerät
FI925852L (fi)	1992-12-23	Aerosolkompositioner under tryck
DE59108193D1 (de)	1996-10-24	Teilchenstrahlgerät
DE69121930D1 (de)	1996-10-17	Bildaufnahmevorrichtung
DE69132887D1 (de)	2002-02-07	Bilderzeugungsvorrichtungen
NO914890D0 (no)	1991-12-12	Sikkerhetstenner for eksplosivinnretninger
KR900012401A (ko)	1990-08-04	충전장치
DE69120746D1 (de)	1996-08-14	Bilderzeugungsgerät
BR9100295A (pt)	1991-11-26	Dispositivo de conexao
DE69117854D1 (de)	1996-04-18	Bilderzeugungsgerät
DE69120029D1 (de)	1996-07-11	Bilderzeugungsgerät
FI932367L (fi)	1993-11-27	Laddningsanordning
DE69130523D1 (de)	1999-01-07	Aufladevorrichtung
DE69122431D1 (de)	1996-11-07	Bilderzeugungsgerät
DE69115784D1 (de)	1996-02-08	Bilderzeugungsgerät
DE69115586D1 (de)	1996-02-01	Bilderzeugungsgerät
DE69115785D1 (de)	1996-02-08	Bilderzeugungsgerät
DE69122449D1 (de)	1996-11-07	Scharfeinstellungsvorrichtung
FI910902L (fi)	1992-08-26	Snabbladdningsanordning
PT8740T (pt)	1993-09-30	Dispositivo de fixacao
DE69131869D1 (de)	2000-01-27	Ladungsträgerstrahl-Vorrichtung

Legal Events

Date	Code	Title	Description
2001-01-11	8364	No opposition during term of opposition
2003-04-03	8327	Change in the person/name/address of the patent owner	Owner name: FEI CO., HILLSBORO, OREG., US