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DE69123866D1 - Rastertunnelmikroskop - Google Patents

Rastertunnelmikroskop

Info

Publication number
DE69123866D1
DE69123866D1 DE69123866T DE69123866T DE69123866D1 DE 69123866 D1 DE69123866 D1 DE 69123866D1 DE 69123866 T DE69123866 T DE 69123866T DE 69123866 T DE69123866 T DE 69123866T DE 69123866 D1 DE69123866 D1 DE 69123866D1
Authority
DE
Germany
Prior art keywords
scanning tunneling
tunneling microscope
microscope
scanning
tunneling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123866T
Other languages
English (en)
Other versions
DE69123866T2 (de
Inventor
Takao Okada
Akira Yagi
Yasuhiro Sugawara
Seizo Morita
Tsugiko Takase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE69123866D1 publication Critical patent/DE69123866D1/de
Application granted granted Critical
Publication of DE69123866T2 publication Critical patent/DE69123866T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/14—STP [Scanning Tunnelling Potentiometry]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69123866T 1990-03-27 1991-03-26 Rastertunnelmikroskop Expired - Fee Related DE69123866T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7956790 1990-03-27

Publications (2)

Publication Number Publication Date
DE69123866D1 true DE69123866D1 (de) 1997-02-13
DE69123866T2 DE69123866T2 (de) 1997-06-26

Family

ID=13693585

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123866T Expired - Fee Related DE69123866T2 (de) 1990-03-27 1991-03-26 Rastertunnelmikroskop

Country Status (2)

Country Link
EP (1) EP0449221B1 (de)
DE (1) DE69123866T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308974B1 (en) * 1992-11-30 1998-01-06 Digital Instr Inc Scanning probe microscope using stored data for vertical probe positioning
JP2743761B2 (ja) * 1993-03-19 1998-04-22 松下電器産業株式会社 走査型プローブ顕微鏡および原子種同定方法
WO1994024575A1 (en) * 1993-04-13 1994-10-27 Teratec Corporation Electrooptic instrument
JPH0792173A (ja) * 1993-09-24 1995-04-07 Agency Of Ind Science & Technol 原子間力顕微鏡用カンチレバーとその製造方法
DE19513529A1 (de) * 1995-04-10 1996-10-17 Zeiss Carl Jena Gmbh Anordnung zur Erfassung der Topographie einer Oberfläche
WO2022258085A1 (en) * 2021-07-13 2022-12-15 Ceske Vysoke Uceni Technicke V Praze A method of examining a sample in a microscope equipped with at least one scanning tunneling tip

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
US4942299A (en) * 1989-03-01 1990-07-17 Midwest Research Institute Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy
US4941753A (en) * 1989-04-07 1990-07-17 International Business Machines Corp. Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control

Also Published As

Publication number Publication date
EP0449221A3 (de) 1991-10-30
EP0449221A2 (de) 1991-10-02
EP0449221B1 (de) 1997-01-02
DE69123866T2 (de) 1997-06-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee