DE69123370D1 - Oberflächenbearbeitung durch Strahlen mit submikronischen Teilchen - Google Patents
Oberflächenbearbeitung durch Strahlen mit submikronischen TeilchenInfo
- Publication number
- DE69123370D1 DE69123370D1 DE69123370T DE69123370T DE69123370D1 DE 69123370 D1 DE69123370 D1 DE 69123370D1 DE 69123370 T DE69123370 T DE 69123370T DE 69123370 T DE69123370 T DE 69123370T DE 69123370 D1 DE69123370 D1 DE 69123370D1
- Authority
- DE
- Germany
- Prior art keywords
- blasting
- surface treatment
- submicron particles
- submicron
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005422 blasting Methods 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
- 238000004381 surface treatment Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
- B05B7/1404—Arrangements for supplying particulate material
- B05B7/144—Arrangements for supplying particulate material the means for supplying particulate material comprising moving mechanical means
- B05B7/1445—Arrangements for supplying particulate material the means for supplying particulate material comprising moving mechanical means involving vibrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/20—Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising
- B05B15/25—Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising using moving elements, e.g. rotating blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
- B05B7/1404—Arrangements for supplying particulate material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/166—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed the material to be sprayed being heated in a container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/12—Applying particulate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
- B24C9/006—Treatment of used abrasive material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49988—Metal casting
- Y10T29/49989—Followed by cutting or removing material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/263—With means to apply transient nonpropellant fluent material to tool or work
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Drying Of Semiconductors (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2026860A JP2890599B2 (ja) | 1990-02-06 | 1990-02-06 | 加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69123370D1 true DE69123370D1 (de) | 1997-01-16 |
DE69123370T2 DE69123370T2 (de) | 1997-06-19 |
Family
ID=12205040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69123370T Expired - Fee Related DE69123370T2 (de) | 1990-02-06 | 1991-02-04 | Oberflächenbearbeitung durch Strahlen mit submikronischen Teilchen |
Country Status (5)
Country | Link |
---|---|
US (2) | US5928719A (de) |
EP (1) | EP0441300B1 (de) |
JP (1) | JP2890599B2 (de) |
KR (1) | KR100229557B1 (de) |
DE (1) | DE69123370T2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5533922A (en) * | 1993-03-22 | 1996-07-09 | Eikichi Yamaharu | Method and apparatus for pretreating electronic component manufacturing frame |
DE4426264A1 (de) * | 1994-07-25 | 1996-02-01 | Siemens Ag | Verfahren und Vorrichtung zur Erzeugung und Dosierung eines Pulveraerosols |
US7622294B2 (en) * | 1997-03-14 | 2009-11-24 | Trustees Of Tufts College | Methods for detecting target analytes and enzymatic reactions |
US6015586A (en) * | 1998-02-19 | 2000-01-18 | Acheson Industries, Inc. | Cold dry plating process for forming a polycrystalline structure film of zinc-iron by mechanical projection of a composite material |
DE19826550C2 (de) * | 1998-06-15 | 2001-07-12 | Siemens Ag | Verfahren und Vorrichtung zum Erzeugen eines Pulveraerosols |
US6612909B2 (en) * | 1998-09-11 | 2003-09-02 | Engineered Abrasives, Inc. | Media blasting apparatus and method to prevent gear pitting |
US6531187B2 (en) * | 1999-04-23 | 2003-03-11 | Agency Of Industrial Science And Technology | Method of forming a shaped body of brittle ultra fine particles with mechanical impact force and without heating |
US6827634B2 (en) * | 2000-05-22 | 2004-12-07 | Agency Of Industrial Science And Technology | Ultra fine particle film forming method and apparatus |
US6331689B1 (en) | 1999-06-15 | 2001-12-18 | Siemens Aktiengesellschaft | Method and device for producing a powder aerosol and use thereof |
TWI232894B (en) * | 1999-10-12 | 2005-05-21 | Nat Inst Of Advanced Ind And T | Composite structure and the manufacturing method and apparatus thereof |
JP3500393B2 (ja) * | 2000-10-23 | 2004-02-23 | 独立行政法人産業技術総合研究所 | 複合構造物およびその作製方法 |
US6444259B1 (en) * | 2001-01-30 | 2002-09-03 | Siemens Westinghouse Power Corporation | Thermal barrier coating applied with cold spray technique |
JP4873798B2 (ja) * | 2001-07-19 | 2012-02-08 | 株式会社不二製作所 | 直圧式ブラスト加工装置における微粉研磨材圧送方法、微粉研磨材圧送手段、及び前記微粉研磨材圧送手段を備えた微粉研磨材供給装置 |
US7303600B2 (en) | 2002-04-25 | 2007-12-04 | Advanced Minerals Corporation | Unexpanded perlite ore polishing composition and methods |
US20030203337A1 (en) * | 2002-04-25 | 2003-10-30 | Roulston John S. | Unexpanded perlite ore polishing composition and methods |
JP4769979B2 (ja) * | 2004-03-30 | 2011-09-07 | ブラザー工業株式会社 | 圧電膜の製造方法 |
EP1583163B1 (de) | 2004-03-30 | 2012-02-15 | Brother Kogyo Kabushiki Kaisha | Verfahren zur Herstellung eines Films oder piezoelektrischen Films |
KR20060022597A (ko) * | 2004-09-07 | 2006-03-10 | 엘지전자 주식회사 | 플라즈마 디스플레이 패널의 제조방법 |
JP2006118669A (ja) * | 2004-10-25 | 2006-05-11 | Sanoh Industrial Co Ltd | 樹脂チューブ |
DE102005032711A1 (de) * | 2005-07-07 | 2007-01-11 | Siemens Ag | Verfahren zum Herstellen einer Nanopartikel aufweisenden Schicht auf einem Substrat |
GB0609829D0 (en) * | 2006-05-18 | 2006-06-28 | Vapormatt Ltd | A sump for a wet blast machine |
DE102006032184B4 (de) * | 2006-07-12 | 2010-06-17 | Eisenmann Anlagenbau Gmbh & Co. Kg | Vorrichtung zum Fördern pulverförmiger fluidisierter Medien |
FR2904252B1 (fr) * | 2006-07-27 | 2009-04-24 | Lifco Ind Sarl | Procede physique de depolissage et installation |
JP5246632B2 (ja) * | 2007-03-05 | 2013-07-24 | 富士通株式会社 | 成膜方法および成膜装置 |
US8114473B2 (en) * | 2007-04-27 | 2012-02-14 | Toto Ltd. | Composite structure and production method thereof |
JP5584884B2 (ja) * | 2007-10-01 | 2014-09-10 | シャープ株式会社 | ガラス基板の欠陥修正方法、ガラス基板の製造方法 |
FI123691B (fi) * | 2007-12-10 | 2013-09-30 | Beneq Oy | Menetelmä erittäin hydrofobisen pinnan tuottamiseksi |
FI20080264L (fi) * | 2008-04-03 | 2009-10-04 | Beneq Oy | Pinnoitusmenetelmä ja -laite |
CN102476131A (zh) * | 2010-11-26 | 2012-05-30 | 宝山钢铁股份有限公司 | 一种防止高硅带钢断带的冷轧方法 |
US8771040B1 (en) * | 2011-08-10 | 2014-07-08 | Gus Lyras | Mobile abrasive blasting material separation device and method |
JP5782338B2 (ja) * | 2011-09-01 | 2015-09-24 | 株式会社不二製作所 | 板材の端部処理方法及びブラスト加工装置 |
US9022835B1 (en) * | 2013-02-11 | 2015-05-05 | Lyras Gus | Mobile abrasive blasting material separation device and method |
JP6122666B2 (ja) * | 2013-03-07 | 2017-04-26 | 東京エレクトロン株式会社 | ホッパー及び溶射装置 |
JP6033145B2 (ja) * | 2013-03-26 | 2016-11-30 | 東芝ホクト電子株式会社 | サーマルプリントヘッドおよびその製造方法 |
JP2016067991A (ja) * | 2014-09-29 | 2016-05-09 | 株式会社リコー | 洗浄媒体吸引ユニット及び乾式洗浄装置 |
GB201517128D0 (en) * | 2015-09-28 | 2015-11-11 | Enbio Ltd | Abrasive blast modification of surfaces |
JP6511009B2 (ja) * | 2016-05-11 | 2019-05-08 | 株式会社スギノマシン | ノズル装置 |
RU2637538C1 (ru) * | 2016-07-06 | 2017-12-05 | Автономная некоммерческая организация высшего образования "Белгородский университет кооперации, экономики и права" | Способ декорирования стеклоизделий |
DE102018202857A1 (de) * | 2018-02-26 | 2019-08-29 | MTU Aero Engines AG | Beschichtungsvorrichtung für Turbinen- oder Verdichterscheiben mit integral ausgebildeten Schaufeln |
DE102018127450A1 (de) * | 2018-11-04 | 2020-05-07 | systeco GmbH | Oberflächenreinigungs- und Graviermaschine mittels Vakuumstrahlverfahren |
DE102019219919A1 (de) * | 2019-12-17 | 2021-06-17 | Ab Dry Solutions Ltd | Vorrichtung zur Entnahme und Dosierung von Strahlgut |
US11780051B2 (en) | 2019-12-31 | 2023-10-10 | Cold Jet, Llc | Method and apparatus for enhanced blast stream |
CN111438640B (zh) * | 2020-05-12 | 2020-12-01 | 杭州拉段机械科技有限公司 | 一种机械零件表面喷砂装置 |
CN111996523A (zh) * | 2020-07-15 | 2020-11-27 | 国营芜湖机械厂 | 一种飞机操纵手柄薄壁壳体防变形修复方法 |
RU2760667C1 (ru) * | 2021-03-30 | 2021-11-29 | Автономная некоммерческая организация высшего образования «Белгородский университет кооперации, экономики и права» | Способ нанесения декоративного покрытия на закаленные стекла |
CN116652837B (zh) * | 2023-07-31 | 2023-10-03 | 烟台大学 | 一种金刚石涂层抛光设备及方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2062905A1 (en) * | 1970-12-21 | 1972-06-29 | Siemens Ag | Electric field dispersion powder dispensing method - employs alternating dispersing field through which a conveyor gas is passed |
US4051275A (en) * | 1974-06-21 | 1977-09-27 | Forestek Clarence W | Embedding and compacting particles in porous surfaces |
US4020535A (en) * | 1975-08-01 | 1977-05-03 | Metropolitan Circuits, Inc. | Method of making an electro-discharge electrode |
US4201799A (en) * | 1976-12-27 | 1980-05-06 | Stephens Charles E | Refinish painting apparatus |
US4370538A (en) * | 1980-05-23 | 1983-01-25 | Browning Engineering Corporation | Method and apparatus for ultra high velocity dual stream metal flame spraying |
US4397671A (en) * | 1981-11-30 | 1983-08-09 | Ford Motor Company | Method of placing a metal oxide film on a surface of a heated glass substrate |
FR2575679B1 (fr) * | 1985-01-07 | 1988-05-27 | Saint Gobain Vitrage | Perfectionnement au procede de revetement d'un substrat tel un ruban de verre, par un produit pulverulent, et dispositif pour la mise en oeuvre de ce procede |
JPS6234778A (ja) * | 1985-08-06 | 1987-02-14 | Niigata Eng Co Ltd | サンドブラストによる物体の加工方法 |
DE3844649C2 (de) * | 1987-06-23 | 1992-04-23 | Taiyo Sanso Co. Ltd., Osaka, Jp | |
KR930001712B1 (ko) * | 1988-11-18 | 1993-03-12 | 가부시기 가이샤 다구마 | 와니스 함침(含浸)방법 및 장치 |
-
1990
- 1990-02-06 JP JP2026860A patent/JP2890599B2/ja not_active Expired - Fee Related
-
1991
- 1991-02-04 KR KR1019910001855A patent/KR100229557B1/ko not_active IP Right Cessation
- 1991-02-04 DE DE69123370T patent/DE69123370T2/de not_active Expired - Fee Related
- 1991-02-04 EP EP91101472A patent/EP0441300B1/de not_active Expired - Lifetime
-
1992
- 1992-10-15 US US07/962,035 patent/US5928719A/en not_active Expired - Fee Related
-
1999
- 1999-03-25 US US09/275,959 patent/US20010007808A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20010007808A1 (en) | 2001-07-12 |
JPH03231096A (ja) | 1991-10-15 |
KR100229557B1 (ko) | 1999-11-15 |
KR910016045A (ko) | 1991-09-30 |
DE69123370T2 (de) | 1997-06-19 |
JP2890599B2 (ja) | 1999-05-17 |
US5928719A (en) | 1999-07-27 |
EP0441300B1 (de) | 1996-12-04 |
EP0441300A2 (de) | 1991-08-14 |
EP0441300A3 (en) | 1993-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |