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DE69111493D1 - Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten. - Google Patents

Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten.

Info

Publication number
DE69111493D1
DE69111493D1 DE69111493T DE69111493T DE69111493D1 DE 69111493 D1 DE69111493 D1 DE 69111493D1 DE 69111493 T DE69111493 T DE 69111493T DE 69111493 T DE69111493 T DE 69111493T DE 69111493 D1 DE69111493 D1 DE 69111493D1
Authority
DE
Germany
Prior art keywords
heaters
manufacture
wafer
heating system
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69111493T
Other languages
English (en)
Other versions
DE69111493T2 (de
Inventor
Takao Soma
Ryusuke Ushikoshi
Kazuhiro Nobori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2060505A external-priority patent/JPH0736391B2/ja
Priority claimed from JP17372290A external-priority patent/JPH0791653B2/ja
Priority claimed from JP2190699A external-priority patent/JPH0628258B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69111493D1 publication Critical patent/DE69111493D1/de
Application granted granted Critical
Publication of DE69111493T2 publication Critical patent/DE69111493T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
DE69111493T 1990-03-12 1991-03-11 Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten. Expired - Lifetime DE69111493T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2060505A JPH0736391B2 (ja) 1990-03-12 1990-03-12 半導体製造装置用ウエハー加熱装置
JP17372290A JPH0791653B2 (ja) 1990-06-29 1990-06-29 ウエハー加熱体の測温装置およびこれを利用したウエハー加熱装置
JP2190699A JPH0628258B2 (ja) 1990-07-20 1990-07-20 半導体ウエハー加熱装置及びその製造方法

Publications (2)

Publication Number Publication Date
DE69111493D1 true DE69111493D1 (de) 1995-08-31
DE69111493T2 DE69111493T2 (de) 1996-03-21

Family

ID=27297213

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111493T Expired - Lifetime DE69111493T2 (de) 1990-03-12 1991-03-11 Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten.

Country Status (3)

Country Link
US (2) US5231690A (de)
EP (1) EP0447155B1 (de)
DE (1) DE69111493T2 (de)

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DE69111493T2 (de) 1996-03-21
EP0447155A3 (en) 1991-12-27

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