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DE69104393D1 - Flachgestaltete Kaltkathode mit spitzen Enden und Herstellungsverfahren derselben. - Google Patents

Flachgestaltete Kaltkathode mit spitzen Enden und Herstellungsverfahren derselben.

Info

Publication number
DE69104393D1
DE69104393D1 DE69104393T DE69104393T DE69104393D1 DE 69104393 D1 DE69104393 D1 DE 69104393D1 DE 69104393 T DE69104393 T DE 69104393T DE 69104393 T DE69104393 T DE 69104393T DE 69104393 D1 DE69104393 D1 DE 69104393D1
Authority
DE
Germany
Prior art keywords
flat
manufacturing
same
cold cathode
pointed ends
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69104393T
Other languages
English (en)
Other versions
DE69104393T2 (de
Inventor
Hiroyuki Kado
Masanori Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69104393D1 publication Critical patent/DE69104393D1/de
Application granted granted Critical
Publication of DE69104393T2 publication Critical patent/DE69104393T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
DE69104393T 1990-03-01 1991-02-28 Flachgestaltete Kaltkathode mit spitzen Enden und Herstellungsverfahren derselben. Expired - Fee Related DE69104393T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4977090A JP2574500B2 (ja) 1990-03-01 1990-03-01 プレーナ型冷陰極の製造方法

Publications (2)

Publication Number Publication Date
DE69104393D1 true DE69104393D1 (de) 1994-11-10
DE69104393T2 DE69104393T2 (de) 1995-05-04

Family

ID=12840407

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104393T Expired - Fee Related DE69104393T2 (de) 1990-03-01 1991-02-28 Flachgestaltete Kaltkathode mit spitzen Enden und Herstellungsverfahren derselben.

Country Status (4)

Country Link
US (1) US5148079A (de)
EP (1) EP0444670B1 (de)
JP (1) JP2574500B2 (de)
DE (1) DE69104393T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2601091B2 (ja) * 1991-02-22 1997-04-16 松下電器産業株式会社 電子放出素子
JP3235172B2 (ja) * 1991-05-13 2001-12-04 セイコーエプソン株式会社 電界電子放出装置
US5382867A (en) * 1991-10-02 1995-01-17 Sharp Kabushiki Kaisha Field-emission type electronic device
JP2635879B2 (ja) * 1992-02-07 1997-07-30 株式会社東芝 電子放出素子及びこれを用いた平面ディスプレイ装置
JP2669749B2 (ja) * 1992-03-27 1997-10-29 工業技術院長 電界放出素子
EP0578512B1 (de) * 1992-07-09 1998-11-11 Varian Associates, Inc. Einkristalline Feldemissionsvorrichtung
JP2639308B2 (ja) * 1992-11-19 1997-08-13 富士電機株式会社 力センサ，温度センサおよび温度・力センサ装置
JPH08138561A (ja) * 1992-12-07 1996-05-31 Mitsuteru Kimura 微小真空デバイス
KR970000963B1 (ko) * 1992-12-22 1997-01-21 재단법인 한국전자통신연구소 광게이트를 갖는 진공 트랜지스터 및 그 제조방법
US5519414A (en) * 1993-02-19 1996-05-21 Off World Laboratories, Inc. Video display and driver apparatus and method
JP3599765B2 (ja) * 1993-04-20 2004-12-08 株式会社東芝 陰極線管装置
US5502314A (en) * 1993-07-05 1996-03-26 Matsushita Electric Industrial Co., Ltd. Field-emission element having a cathode with a small radius
EP0681312B1 (de) * 1993-11-24 2003-02-26 TDK Corporation Kaltkathoden-elektrodenquellenelement und verfahren zur herstellung desselben
JPH07254354A (ja) * 1994-01-28 1995-10-03 Toshiba Corp 電界電子放出素子、電界電子放出素子の製造方法およびこの電界電子放出素子を用いた平面ディスプレイ装置
US5771039A (en) * 1994-06-06 1998-06-23 Ditzik; Richard J. Direct view display device integration techniques
US5712527A (en) * 1994-09-18 1998-01-27 International Business Machines Corporation Multi-chromic lateral field emission devices with associated displays and methods of fabrication
JP3532275B2 (ja) * 1994-12-28 2004-05-31 ソニー株式会社 平面表示パネル
KR100366694B1 (ko) * 1995-03-28 2003-03-12 삼성에스디아이 주식회사 다중팁전계방출소자의그제조방법
KR100322696B1 (ko) * 1995-03-29 2002-06-20 김순택 전계효과전자방출용마이크로-팁및그제조방법
KR100343207B1 (ko) * 1995-03-29 2002-11-22 삼성에스디아이 주식회사 전계효과전자방출소자및그제조방법
US5859493A (en) * 1995-06-29 1999-01-12 Samsung Display Devices Co., Ltd. Lateral field emission display with pointed micro tips
US5990619A (en) * 1996-03-28 1999-11-23 Tektronix, Inc. Electrode structures for plasma addressed liquid crystal display devices
CA2345629A1 (en) * 1999-07-26 2001-02-01 Advanced Vision Technologies, Inc. Vacuum field-effect device and fabrication process therefor
KR20010075311A (ko) * 1999-07-26 2001-08-09 어드밴스드 비젼 테크놀러지스 인코포레이티드 절연-게이트 전자의 전계 방출 소자 및 그 제작 공정
JP3907667B2 (ja) * 2004-05-18 2007-04-18 キヤノン株式会社 電子放出素子、電子放出装置およびそれを用いた電子源並びに画像表示装置および情報表示再生装置
JP2011018491A (ja) * 2009-07-08 2011-01-27 Canon Inc 電子放出素子とこれを用いた電子線装置、画像表示装置
CN110875165A (zh) * 2018-08-30 2020-03-10 中国科学院微电子研究所 一种场发射阴极电子源及其阵列

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
JP2654012B2 (ja) * 1987-05-06 1997-09-17 キヤノン株式会社 電子放出素子およびその製造方法
US4904895A (en) * 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
JPS6433833A (en) * 1987-07-29 1989-02-03 Canon Kk Electron emitting element
JPH0340332A (ja) * 1989-07-07 1991-02-21 Matsushita Electric Ind Co Ltd 電界放出型スウィチング素子およびその製造方法
JP3151837B2 (ja) * 1990-02-22 2001-04-03 セイコーエプソン株式会社 電界電子放出装置

Also Published As

Publication number Publication date
EP0444670A3 (en) 1991-11-06
US5148079A (en) 1992-09-15
EP0444670A2 (de) 1991-09-04
EP0444670B1 (de) 1994-10-05
JPH03252025A (ja) 1991-11-11
JP2574500B2 (ja) 1997-01-22
DE69104393T2 (de) 1995-05-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee