DE69031884D1 - Schmalband-Laservorrichtung - Google Patents

Schmalband-Laservorrichtung

Info

Publication number: DE69031884D1
Authority: DE; Germany
Prior art keywords: laser device; narrow band; band laser; narrow; laser
Prior art date: 1989-06-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69031884T

Other languages

English (en)

Other versions

DE69031884T2 (de

Inventor

Nobuaki Furuya

Takuhiro Ono

Naoya Horiuchi

Keiichiro Yamanaka

Takeo Miyata

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Panasonic Corp

Original Assignee

Matsushita Electric Industrial Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-06-14

Filing date

1990-03-01

Publication date

1998-02-12

1989-11-01 Priority claimed from JP1286840A external-priority patent/JPH0797680B2/ja

1990-01-12 Priority claimed from JP498490A external-priority patent/JP2715608B2/ja

1990-01-12 Priority claimed from JP498590A external-priority patent/JP2715609B2/ja

1990-01-12 Priority claimed from JP498690A external-priority patent/JP2715610B2/ja

1990-03-01 Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd

1998-02-12 Publication of DE69031884D1 publication Critical patent/DE69031884D1/de

1998-06-10 Application granted granted Critical

1998-06-10 Publication of DE69031884T2 publication Critical patent/DE69031884T2/de

2010-03-02 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0811—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Optics & Photonics (AREA)
General Physics & Mathematics (AREA)
Lasers (AREA)

DE69031884T 1989-06-14 1990-03-01 Schmalband-Laservorrichtung Expired - Lifetime DE69031884T2 (de)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
JP15178989		1989-06-14
JP1286840A JPH0797680B2 (ja)	1989-06-14	1989-11-01	狭帯域化レーザ装置
JP498490A JP2715608B2 (ja)	1990-01-12	1990-01-12	狭帯域化レーザ装置
JP498590A JP2715609B2 (ja)	1990-01-12	1990-01-12	狭帯域化レーザ装置
JP498690A JP2715610B2 (ja)	1990-01-12	1990-01-12	狭帯域化レーザ装置

Publications (2)

Publication Number	Publication Date
DE69031884D1 true DE69031884D1 (de)	1998-02-12
DE69031884T2 DE69031884T2 (de)	1998-06-10

Family

ID=27518549

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69031884T Expired - Lifetime DE69031884T2 (de)	1989-06-14	1990-03-01	Schmalband-Laservorrichtung

Country Status (5)

Country	Link
US (1)	US4985898A (de)
EP (1)	EP0402570B1 (de)
KR (1)	KR930002821B1 (de)
CA (1)	CA2011361C (de)
DE (1)	DE69031884T2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CA2010084C (en) *	1989-02-14	1993-11-02	Koichi Wani	Laser device
JP2531788B2 (ja) *	1989-05-18	1996-09-04	株式会社小松製作所	狭帯域発振エキシマレ―ザ
US5150370A (en) *	1989-06-14	1992-09-22	Matsushita Electric Industrial Co., Ltd.	Narrow-band laser apparatus
US5404366A (en) *	1989-07-14	1995-04-04	Kabushiki Kaisha Komatsu Seisakusho	Narrow band excimer laser and wavelength detecting apparatus
US5107515A (en) *	1989-11-08	1992-04-21	Kabushiki Kaisha Toshiba	Narrow-band laser apparatus
JPH0810776B2 (ja) *	1990-06-28	1996-01-31	浜松ホトニクス株式会社	狭スペクトル短パルス光源装置及び電圧検出装置
EP0489956B1 (de) *	1990-12-12	1998-03-25	Matsushita Electric Industrial Co., Ltd.	Schmalband-Laser-Apparat
US5802094A (en) *	1991-11-14	1998-09-01	Kabushiki Kaisha Komatsu	Narrow band excimer laser
US5307368A (en) *	1992-09-08	1994-04-26	Hamar M R	Laser apparatus for simultaneously generating mutually perpendicular planes
US5559816A (en) *	1994-10-26	1996-09-24	Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh	Narrow-band laser apparatus
WO1996031929A1 (fr) *	1995-04-03	1996-10-10	Komatsu Ltd.	Laser a bande etroite
DE19603637C1 (de)	1996-02-01	1997-07-31	Lambda Physik Gmbh	Laser zur Erzeugung schmalbandiger Strahlung
US5929984A (en) *	1996-12-10	1999-07-27	Hamar Laser Instruments, Inc.	System and method for generating multiple parallel beams and planes
US5898725A (en) *	1997-01-21	1999-04-27	Cymer, Inc.	Excimer laser with greater spectral bandwidth and beam stability
US6240110B1 (en) *	1997-06-04	2001-05-29	Cymer, Inc.	Line narrowed F2 laser with etalon based output coupler
US6424666B1 (en)	1999-06-23	2002-07-23	Lambda Physik Ag	Line-narrowing module for high power laser
US6381256B1 (en)	1999-02-10	2002-04-30	Lambda Physik Ag	Molecular fluorine laser with spectral linewidth of less than 1 pm
US6476987B1 (en)	1999-08-04	2002-11-05	Lambda Physik Ag	Excimer laser with line narrowing
US6067311A (en) *	1998-09-04	2000-05-23	Cymer, Inc.	Excimer laser with pulse multiplier
US6463086B1 (en)	1999-02-10	2002-10-08	Lambda Physik Ag	Molecular fluorine laser with spectral linewidth of less than 1 pm
US6546037B2 (en)	1999-02-10	2003-04-08	Lambda Physik Ag	Molecular fluorine laser with spectral linewidth of less than 1 pm
US6292303B1 (en)	1999-03-10	2001-09-18	Hamar Laser Instruments, Inc.	Laser apparatus for simultaneously generating a plurality of laser planes from a single laser source
US6594291B1 (en) *	1999-06-16	2003-07-15	Komatsu Ltd.	Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus
US6304692B1 (en)	1999-09-03	2001-10-16	Zolo Technologies, Inc.	Echelle grating dense wavelength division multiplexer/demultiplexer with two dimensional single channel array
US7075963B2 (en)	2000-01-27	2006-07-11	Lambda Physik Ag	Tunable laser with stabilized grating
US6577663B2 (en)	2000-06-19	2003-06-10	Lambda Physik Ag	Narrow bandwidth oscillator-amplifier system
US6731666B1 (en) *	2000-07-20	2004-05-04	Komatsu Ltd.	Laser device
US8750702B1 (en) *	2002-06-21	2014-06-10	Rockstar Consortium Us Lp	Passive optical loopback
JP4027164B2 (ja) *	2002-06-21	2007-12-26	株式会社日立製作所	表示装置
US7432517B2 (en) *	2004-11-19	2008-10-07	Asml Netherlands B.V.	Pulse modifier, lithographic apparatus, and device manufacturing method
JP5154838B2 (ja) *	2007-05-31	2013-02-27	株式会社ディスコ	レーザー加工装置
CN105048262B (zh) *	2015-08-03	2018-10-19	中国科学院光电研究院	一种改进谐振腔的窄线宽准分子激光器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3739295A (en) *	1972-04-03	1973-06-12	Bell Telephone Labor Inc	Laser with means for suppressing back-ground fluorescence in the output
FR2402320A1 (fr) *	1977-09-02	1979-03-30	Anvar	Selecteur de mode pour laser
WO1986003066A1 (en) *	1984-11-09	1986-05-22	The Commonwealth Of Australia Care Of The Assistan	Birefringence compensation in polarisation coupled lasers
IT1214682B (it) *	1986-05-28	1990-01-18	Selenia Ind Elettroniche	Configurazione ottica di multipassaggio della radiazione laser attraverso un medesimo assorbitore saturabile posto nella cavita' ottica di un laser di alta potenza operante,mediante il medesimo assorbitore saturabile,in regime di q-switch omode locking
WO1988000767A1 (en) *	1986-06-09	1988-01-28	Kabushiki Kaisha Komatsu Seisakusho	Multi-mode narrow-band oscillation excimer laser
JPS63160287A (ja) *	1986-12-23	1988-07-04	Nikon Corp	フアブリペロ−エタロンを備えるエキシマレ−ザ−装置
KR910006307B1 (ko) *	1987-09-26	1991-08-19	미쓰비시덴기 가부시기가이샤	레이저 파장의 안정화 방법 및 파장 안정화 장치
EP0310000B1 (de) *	1987-09-28	1994-06-01	Matsushita Electric Industrial Co., Ltd.	Laser-Apparat
DE3744323C2 (de) *	1987-12-28	1999-03-11	Lambda Physik Forschung	Verfahren und Vorrichtung zum Stabilisieren der Frequenz eines Laserstrahles

1990
- 1990-03-01 US US07/487,080 patent/US4985898A/en not_active Expired - Lifetime
- 1990-03-01 DE DE69031884T patent/DE69031884T2/de not_active Expired - Lifetime
- 1990-03-01 EP EP90103985A patent/EP0402570B1/de not_active Expired - Lifetime
- 1990-03-02 CA CA002011361A patent/CA2011361C/en not_active Expired - Lifetime
- 1990-03-09 KR KR1019900003141A patent/KR930002821B1/ko not_active IP Right Cessation

Also Published As

Publication number	Publication date
EP0402570A2 (de)	1990-12-19
EP0402570B1 (de)	1998-01-07
CA2011361C (en)	1994-07-12
DE69031884T2 (de)	1998-06-10
CA2011361A1 (en)	1990-12-14
KR930002821B1 (ko)	1993-04-10
KR910002053A (ko)	1991-01-31
EP0402570A3 (de)	1991-09-11
US4985898A (en)	1991-01-15

Publication	Publication Date	Title
DE69031884D1 (de)	1998-02-12	Schmalband-Laservorrichtung
DE69012813D1 (de)	1994-10-27	Schmalbandiger excimerlaser.
DE69013662D1 (de)	1994-12-01	Schmalbandige Laserquelle.
DE69030930D1 (de)	1997-07-24	Halbleiterlaservorrichtung
IT9020656A0 (it)	1990-06-15	dispositivo
IT9020522A0 (it)	1990-06-04	dispositivo ottico
DE69132473D1 (de)	2000-12-21	Schnittgerät
KR900012220A (ko)	1990-08-03	광헤드장치
DE69026972D1 (de)	1996-06-20	Halbleiterlaservorrichtung
DE69030325D1 (de)	1997-04-30	Positionierungseinrichtung
DE69029150D1 (de)	1996-12-19	Entladungsangeregte Impulslaservorrichtung
DE69118563D1 (de)	1996-05-15	Laservorrichtung
KR880701985A (ko)	1988-11-07	레이저 장치
DK576889D0 (da)	1989-11-17	Hoerevaern
DE69012369D1 (de)	1994-10-20	Laservorrichtung.
DK47590A (da)	1990-08-24	Skabsenhed
ATA211489A (de)	1992-10-15	Spannglied
IT9020658A0 (it)	1990-06-15	apparecchio
DE69131432D1 (de)	1999-08-19	Schnittgerät
TR24963A (tr)	1992-07-29	Kendiliginden acilabilir semsiye
DE69020689D1 (de)	1995-08-10	Schmalband-Laservorrichtung.
DE69303277D1 (de)	1996-07-25	Laservorrichtung
DE69027754D1 (de)	1996-08-14	Vormagnetisierungsfeld-Erzeugungsgerät
FI915613A0 (fi)	1991-11-28	Nesteenannostuslaite
DE69032181D1 (de)	1998-04-30	Schmalband-Laser-Apparat

Legal Events

Date	Code	Title	Description
1999-02-11	8364	No opposition during term of opposition
2009-05-07	8327	Change in the person/name/address of the patent owner	Owner name: PANASONIC CORP., KADOMA, OSAKA, JP