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DE69014750D1 - Verfahren zur Positions- und Vibrationssteuerung und eine aktive Vibrationssteuervorrichtung. - Google Patents

Verfahren zur Positions- und Vibrationssteuerung und eine aktive Vibrationssteuervorrichtung.

Info

Publication number
DE69014750D1
DE69014750D1 DE69014750T DE69014750T DE69014750D1 DE 69014750 D1 DE69014750 D1 DE 69014750D1 DE 69014750 T DE69014750 T DE 69014750T DE 69014750 T DE69014750 T DE 69014750T DE 69014750 D1 DE69014750 D1 DE 69014750D1
Authority
DE
Germany
Prior art keywords
vibration control
control device
control method
active
active vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014750T
Other languages
English (en)
Other versions
DE69014750T2 (de
Inventor
Masashi Yasuda
Fumiaki Itojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokkyokiki Corp
Original Assignee
Tokkyokiki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19210789A external-priority patent/JPH03121328A/ja
Priority claimed from JP2097482A external-priority patent/JP2878777B2/ja
Priority claimed from JP2136252A external-priority patent/JP2673321B2/ja
Priority claimed from JP2137968A external-priority patent/JP2913064B2/ja
Application filed by Tokkyokiki Corp filed Critical Tokkyokiki Corp
Publication of DE69014750D1 publication Critical patent/DE69014750D1/de
Application granted granted Critical
Publication of DE69014750T2 publication Critical patent/DE69014750T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
DE69014750T 1989-07-24 1990-07-19 Verfahren zur Positions- und Vibrationssteuerung und eine aktive Vibrationssteuervorrichtung. Expired - Fee Related DE69014750T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP19210789A JPH03121328A (ja) 1989-07-24 1989-07-24 除振台の水平位置の維持と水平振動の除振方法並びにその回路
JP19210689 1989-07-24
JP19210889 1989-07-24
JP2097482A JP2878777B2 (ja) 1989-07-24 1990-04-11 空気ばね式除振台のレベル維持並びに微小振動の除振方法とその回路
JP2136252A JP2673321B2 (ja) 1989-07-24 1990-05-25 除振台の水平位置の維持と水平振動の除振方法並びにその回路
JP2137968A JP2913064B2 (ja) 1989-07-24 1990-05-28 能動制振台

Publications (2)

Publication Number Publication Date
DE69014750D1 true DE69014750D1 (de) 1995-01-19
DE69014750T2 DE69014750T2 (de) 1995-07-06

Family

ID=27552022

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014750T Expired - Fee Related DE69014750T2 (de) 1989-07-24 1990-07-19 Verfahren zur Positions- und Vibrationssteuerung und eine aktive Vibrationssteuervorrichtung.

Country Status (3)

Country Link
US (1) US5121898A (de)
EP (1) EP0410647B1 (de)
DE (1) DE69014750T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104168C1 (de) * 1991-02-12 1992-04-02 Fa. Carl Freudenberg, 6940 Weinheim, De
FR2680848B1 (fr) * 1991-08-29 1995-03-17 Aerospatiale Ste Nat Indle Procede et dispositif pour filtrer les excitations vibratoires transmises entre deux pieces, notamment entre le rotor et le fuselage d'un helicoptere.
US5379980A (en) * 1991-12-23 1995-01-10 Newport Corporation Stabilization systems for vibration isolators
FR2692017B1 (fr) * 1992-06-03 1996-01-26 Clausin Jacques Dispositif de reduction de la transmission des vibrations de machines vibrantes a l'environnement par l'intermediaire de leurs liaisons.
US5242140A (en) * 1992-06-30 1993-09-07 Ritland Gerald D Casting stand
JP2816513B2 (ja) * 1992-08-26 1998-10-27 鹿島建設株式会社 電磁式浮き床構造
DE4332921C2 (de) * 1993-09-28 2003-04-10 Outokumpu Oy Rüttelanlage zur Herstellung von Formkörpern durch Verdichtung
US5526609A (en) * 1994-01-28 1996-06-18 Research Foundation Of State University Of New York Method and apparatus for real-time structure parameter modification
KR100399812B1 (ko) 1994-10-11 2003-12-01 가부시키가이샤 니콘 스테이지용진동방지장치
US5631506A (en) * 1994-12-14 1997-05-20 Tritium Technologies Sloped facet electromagnetic actuator adapted for vibration compensation
US5812420A (en) * 1995-09-05 1998-09-22 Nikon Corporation Vibration-preventive apparatus and exposure apparatus
JP3337906B2 (ja) * 1996-04-02 2002-10-28 キヤノン株式会社 空圧式振動絶縁除去装置、投影露光装置及びこれを用いたデバイス製造方法
JPH09326362A (ja) * 1996-04-05 1997-12-16 Nikon Corp 除振装置及び露光装置
JPH09329185A (ja) * 1996-06-06 1997-12-22 Bridgestone Corp 制振装置
DE19628974C1 (de) * 1996-07-18 1997-11-20 Leica Mikroskopie & Syst Einrichtung zur Schwingungsisolierung
US5802966A (en) * 1996-08-05 1998-09-08 The Minster Machine Company Dual mount control system
JP3825869B2 (ja) * 1997-03-19 2006-09-27 キヤノン株式会社 能動除振装置
JPH11315883A (ja) 1998-04-30 1999-11-16 Canon Inc 除振装置、露光装置およびデバイス製造方法
US6209841B1 (en) * 1998-07-14 2001-04-03 Newport Corporation Active isolation module
US6604451B1 (en) 1998-11-13 2003-08-12 Tokkyokiki Corporation Fluid actuator
JP2002221249A (ja) * 2000-11-27 2002-08-09 Canon Inc 能動制振装置、その制御方法および能動制振装置を備えた露光装置
US6937911B2 (en) * 2002-03-18 2005-08-30 Nikon Corporation Compensating for cable drag forces in high precision stages
JP2008166497A (ja) * 2006-12-28 2008-07-17 Canon Inc 露光装置およびそれを用いたデバイス製造方法
KR101584827B1 (ko) * 2008-03-07 2016-01-13 가부시키가이샤 니콘 이동체 장치 및 노광 장치
US8235351B1 (en) * 2009-08-27 2012-08-07 Lockheed Martin Corporation Shock load isolation mounting
EP3181944B1 (de) 2015-12-16 2023-04-26 Integrated Dynamics Engineering GmbH Schwingungsisolator mit einer vertikal wirksamen pneumatischen feder
EP3260733B1 (de) * 2016-06-23 2019-08-07 Integrated Dynamics Engineering GmbH Aktives stationäres schwingungsisolationssystem
EP3260732B1 (de) 2016-06-23 2019-03-27 Integrated Dynamics Engineering GmbH Pneumatischer aktor sowie verfahren zum betrieb eines aktiven schwingungsisolationssystem
EP3667696A1 (de) * 2018-12-14 2020-06-17 ASML Netherlands B.V. Für elektronenstrahlinspektionsvorrichtung geeignete stufenvorrichtung
CN113255577B (zh) * 2021-06-18 2021-12-14 中铁大桥科学研究院有限公司 一种斜拉桥施工振动参数的主动控制智能数据处理方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4101102A (en) * 1976-04-26 1978-07-18 Westinghouse Electric Corp. Vibration isolation load support apparatus
FR2379732A1 (fr) * 1977-02-04 1978-09-01 Europ Propulsion Dispositif de stabilisation horizontale d'une masse a support inertiel vertical
JPS5511954A (en) * 1978-07-14 1980-01-28 Hitachi Ltd Method and device for controlling vibration of vehicle
US4336917A (en) * 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
JPS60248417A (ja) * 1984-05-21 1985-12-09 Toyota Central Res & Dev Lab Inc アクテイブサスペンシヨン装置
DE3434660A1 (de) * 1984-09-21 1986-04-03 Fa. Carl Freudenberg, 6940 Weinheim Luftfeder
US4635892A (en) * 1985-08-19 1987-01-13 Vibrastop, Inc. Active vibration suppressor
US4821205A (en) * 1986-05-30 1989-04-11 Eaton Corporation Seismic isolation system with reaction mass
US4744539A (en) * 1987-01-21 1988-05-17 Mack Trucks, Inc. Vehicle mounting arrangement
DE3705579C2 (de) * 1987-02-21 1995-11-02 Bosch Gmbh Robert Verstellbares Motorlager
JPH069845Y2 (ja) * 1987-11-05 1994-03-16 三菱自動車工業株式会社 アクテイブサスペンシヨン制御装置
GB8816188D0 (en) * 1988-07-07 1988-11-16 Marconi Gec Ltd Mounting for machinery
US5011108A (en) * 1989-08-10 1991-04-30 Mechanical Technology Incorporated Active mounts

Also Published As

Publication number Publication date
EP0410647B1 (de) 1994-12-07
EP0410647A1 (de) 1991-01-30
DE69014750T2 (de) 1995-07-06
US5121898A (en) 1992-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee