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DE69009030D1 - Integrierter Tintenstrahldruckkopf. - Google Patents

Integrierter Tintenstrahldruckkopf.

Info

Publication number
DE69009030D1
DE69009030D1 DE69009030T DE69009030T DE69009030D1 DE 69009030 D1 DE69009030 D1 DE 69009030D1 DE 69009030 T DE69009030 T DE 69009030T DE 69009030 T DE69009030 T DE 69009030T DE 69009030 D1 DE69009030 D1 DE 69009030D1
Authority
DE
Germany
Prior art keywords
inkjet printhead
integrated inkjet
integrated
printhead
inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009030T
Other languages
English (en)
Other versions
DE69009030T2 (de
Inventor
Si-Ty Lam
William J Lloyd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE69009030D1 publication Critical patent/DE69009030D1/de
Publication of DE69009030T2 publication Critical patent/DE69009030T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69009030T 1990-01-09 1990-12-19 Integrierter Tintenstrahldruckkopf. Expired - Lifetime DE69009030T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/462,670 US5016024A (en) 1990-01-09 1990-01-09 Integral ink jet print head

Publications (2)

Publication Number Publication Date
DE69009030D1 true DE69009030D1 (de) 1994-06-23
DE69009030T2 DE69009030T2 (de) 1994-12-01

Family

ID=23837334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009030T Expired - Lifetime DE69009030T2 (de) 1990-01-09 1990-12-19 Integrierter Tintenstrahldruckkopf.

Country Status (5)

Country Link
US (1) US5016024A (de)
EP (1) EP0436889B1 (de)
JP (1) JP3086486B2 (de)
DE (1) DE69009030T2 (de)
HK (1) HK12195A (de)

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US5469199A (en) * 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
US5229785A (en) * 1990-11-08 1993-07-20 Hewlett-Packard Company Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate
AU657720B2 (en) * 1991-01-30 1995-03-23 Canon Kabushiki Kaisha A bubblejet image reproducing apparatus
JP3264971B2 (ja) * 1991-03-28 2002-03-11 セイコーエプソン株式会社 インクジェット記録ヘッドの製造方法
US7628339B2 (en) 1991-04-24 2009-12-08 Novartis Pharma Ag Systems and methods for controlling fluid feed to an aerosol generator
US6540154B1 (en) 1991-04-24 2003-04-01 Aerogen, Inc. Systems and methods for controlling fluid feed to an aerosol generator
US5194877A (en) * 1991-05-24 1993-03-16 Hewlett-Packard Company Process for manufacturing thermal ink jet printheads having metal substrates and printheads manufactured thereby
US5208980A (en) * 1991-12-31 1993-05-11 Compag Computer Corporation Method of forming tapered orifice arrays in fully assembled ink jet printheads
US5537133A (en) * 1992-04-02 1996-07-16 Hewlett-Packard Company Restraining element for a print cartridge body to reduce thermally induced stress
US5434607A (en) * 1992-04-02 1995-07-18 Hewlett-Packard Company Attachment of nozzle plate to flexible circuit for facilitating assembly of printhead
US5450113A (en) * 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5297331A (en) * 1992-04-03 1994-03-29 Hewlett-Packard Company Method for aligning a substrate with respect to orifices in an inkjet printhead
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5230926A (en) * 1992-04-28 1993-07-27 Xerox Corporation Application of a front face coating to ink jet printheads or printhead dies
DE4214554C2 (de) * 1992-04-28 1995-07-06 Eastman Kodak Co Mehrschichtiger elektrothermischer Tintendruckkopf
DE4214555C2 (de) * 1992-04-28 1996-04-25 Eastman Kodak Co Elektrothermischer Tintendruckkopf
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
US5311252A (en) * 1992-05-29 1994-05-10 Eastman Kodak Company Method of proximity imaging photolithographic structures for ink jet printers
US5463413A (en) * 1993-06-03 1995-10-31 Hewlett-Packard Company Internal support for top-shooter thermal ink-jet printhead
EP0636481B1 (de) * 1993-07-26 1998-06-17 Canon Kabushiki Kaisha Flüssigkeitsstrahlaufzeichnungskopf und damit versehene Flüssigkeitsstrahldruckvorrichtung
US5636441A (en) * 1995-03-16 1997-06-10 Hewlett-Packard Company Method of forming a heating element for a printhead
EP0734866B1 (de) * 1995-03-31 1999-08-11 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Tintenstrahlkopfes
US6085740A (en) 1996-02-21 2000-07-11 Aerogen, Inc. Liquid dispensing apparatus and methods
US5758637A (en) 1995-08-31 1998-06-02 Aerogen, Inc. Liquid dispensing apparatus and methods
US20020121274A1 (en) * 1995-04-05 2002-09-05 Aerogen, Inc. Laminated electroformed aperture plate
US6113221A (en) * 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
US6336714B1 (en) 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6003977A (en) * 1996-02-07 1999-12-21 Hewlett-Packard Company Bubble valving for ink-jet printheads
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
US6305790B1 (en) 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
US5847737A (en) * 1996-06-18 1998-12-08 Kaufman; Micah Abraham Filter for ink jet printhead
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
US6183067B1 (en) 1997-01-21 2001-02-06 Agilent Technologies Inkjet printhead and fabrication method for integrating an actuator and firing chamber
US6155675A (en) * 1997-08-28 2000-12-05 Hewlett-Packard Company Printhead structure and method for producing the same
US6154234A (en) * 1998-01-09 2000-11-28 Hewlett-Packard Company Monolithic ink jet nozzle formed from an oxide and nitride composition
GB2364276B (en) * 1998-01-09 2002-03-06 Hewlett Packard Co Method of forming ink jet nozzles
US6235177B1 (en) 1999-09-09 2001-05-22 Aerogen, Inc. Method for the construction of an aperture plate for dispensing liquid droplets
US6986566B2 (en) 1999-12-22 2006-01-17 Eastman Kodak Company Liquid emission device
US6948491B2 (en) 2001-03-20 2005-09-27 Aerogen, Inc. Convertible fluid feed system with comformable reservoir and methods
US7971588B2 (en) 2000-05-05 2011-07-05 Novartis Ag Methods and systems for operating an aerosol generator
MXPA02010884A (es) 2000-05-05 2003-03-27 Aerogen Ireland Ltd Aparato y metodo para el suministro de medicamentos al sistema respiratorio.
US7100600B2 (en) 2001-03-20 2006-09-05 Aerogen, Inc. Fluid filled ampoules and methods for their use in aerosolizers
US8336545B2 (en) 2000-05-05 2012-12-25 Novartis Pharma Ag Methods and systems for operating an aerosol generator
US7600511B2 (en) 2001-11-01 2009-10-13 Novartis Pharma Ag Apparatus and methods for delivery of medicament to a respiratory system
US6644789B1 (en) 2000-07-06 2003-11-11 Lexmark International, Inc. Nozzle assembly for an ink jet printer
KR100506080B1 (ko) * 2000-12-15 2005-08-04 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조 방법
KR100668296B1 (ko) * 2001-01-19 2007-01-12 삼성전자주식회사 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드
TW504462B (en) * 2001-03-08 2002-10-01 Ind Tech Res Inst Backside jetting ink-jet printer head
US6684504B2 (en) * 2001-04-09 2004-02-03 Lexmark International, Inc. Method of manufacturing an imageable support matrix for printhead nozzle plates
US6732944B2 (en) 2001-05-02 2004-05-11 Aerogen, Inc. Base isolated nebulizing device and methods
GB0113639D0 (en) * 2001-06-05 2001-07-25 Xaar Technology Ltd Nozzle plate for droplet deposition apparatus
EP1471960B1 (de) 2002-01-07 2019-03-13 Novartis AG Vorrichtungen zur vernebelung von flüssigkeiten zur inhalation
US7677467B2 (en) 2002-01-07 2010-03-16 Novartis Pharma Ag Methods and devices for aerosolizing medicament
ES2603067T3 (es) 2002-01-15 2017-02-23 Novartis Ag Métodos y sistemas para hacer funcionar un generador de aerosol
AU2003256253A1 (en) 2002-05-20 2003-12-02 Aerogen, Inc. Aerosol for medical treatment and methods
KR100428793B1 (ko) * 2002-06-26 2004-04-28 삼성전자주식회사 잉크젯 프린터 헤드 및 그 제조 방법
KR100438733B1 (ko) * 2002-08-09 2004-07-05 삼성전자주식회사 잉크 젯 프린트 헤드 및 이의 제조 방법
US8616195B2 (en) 2003-07-18 2013-12-31 Novartis Ag Nebuliser for the production of aerosolized medication
US7290541B2 (en) 2004-04-20 2007-11-06 Aerogen, Inc. Aerosol delivery apparatus and method for pressure-assisted breathing systems
US7946291B2 (en) 2004-04-20 2011-05-24 Novartis Ag Ventilation systems and methods employing aerosol generators
US7267121B2 (en) 2004-04-20 2007-09-11 Aerogen, Inc. Aerosol delivery apparatus and method for pressure-assisted breathing systems
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US9108211B2 (en) 2005-05-25 2015-08-18 Nektar Therapeutics Vibration systems and methods
JP5159069B2 (ja) * 2006-08-29 2013-03-06 キヤノン株式会社 液体吐出方法
US10737359B2 (en) * 2018-04-09 2020-08-11 Lam Research Corporation Manufacture of an orifice plate for use in gas calibration

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US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
US4490728A (en) * 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
US4438191A (en) * 1982-11-23 1984-03-20 Hewlett-Packard Company Monolithic ink jet print head
US4580149A (en) * 1985-02-19 1986-04-01 Xerox Corporation Cavitational liquid impact printer
US4660058A (en) * 1985-09-11 1987-04-21 Pitney Bowes Inc. Viscosity switched ink jet
US4809428A (en) * 1987-12-10 1989-03-07 Hewlett-Packard Company Thin film device for an ink jet printhead and process for the manufacturing same
US4847630A (en) * 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture

Also Published As

Publication number Publication date
JPH04211955A (ja) 1992-08-03
JP3086486B2 (ja) 2000-09-11
EP0436889A1 (de) 1991-07-17
DE69009030T2 (de) 1994-12-01
EP0436889B1 (de) 1994-05-18
HK12195A (en) 1995-02-03
US5016024A (en) 1991-05-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE