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DE69007833D1 - Grob-/Feinausrichtvorrichtung. - Google Patents

Grob-/Feinausrichtvorrichtung.

Info

Publication number
DE69007833D1
DE69007833D1 DE90104272T DE69007833T DE69007833D1 DE 69007833 D1 DE69007833 D1 DE 69007833D1 DE 90104272 T DE90104272 T DE 90104272T DE 69007833 T DE69007833 T DE 69007833T DE 69007833 D1 DE69007833 D1 DE 69007833D1
Authority
DE
Germany
Prior art keywords
coarse
alignment device
fine alignment
fine
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90104272T
Other languages
English (en)
Other versions
DE69007833T2 (de
Inventor
Shigeru Sakuta
Katsunobu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1054601A external-priority patent/JPH02232704A/ja
Priority claimed from JP1054602A external-priority patent/JPH02232705A/ja
Priority claimed from JP34435289A external-priority patent/JPH03202907A/ja
Priority claimed from JP2613190A external-priority patent/JPH03231314A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69007833D1 publication Critical patent/DE69007833D1/de
Application granted granted Critical
Publication of DE69007833T2 publication Critical patent/DE69007833T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Automatic Control Of Machine Tools (AREA)
DE69007833T 1989-03-07 1990-03-06 Grob-/Feinausrichtvorrichtung. Expired - Fee Related DE69007833T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1054601A JPH02232704A (ja) 1989-03-07 1989-03-07 摩擦駆動装置
JP1054602A JPH02232705A (ja) 1989-03-07 1989-03-07 位置決め装置
JP34435289A JPH03202907A (ja) 1989-12-28 1989-12-28 位置決め装置
JP2613190A JPH03231314A (ja) 1990-02-07 1990-02-07 位置決め装置

Publications (2)

Publication Number Publication Date
DE69007833D1 true DE69007833D1 (de) 1994-05-11
DE69007833T2 DE69007833T2 (de) 1994-08-18

Family

ID=27458435

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69007833T Expired - Fee Related DE69007833T2 (de) 1989-03-07 1990-03-06 Grob-/Feinausrichtvorrichtung.

Country Status (3)

Country Link
US (1) US5062712A (de)
EP (1) EP0386702B1 (de)
DE (1) DE69007833T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5546186A (en) * 1991-06-08 1996-08-13 Fuji Photo Optical Co., Ltd. Apparatus for holographic interferometry suitable for inspection of cylindrical optical surfaces
JP3217522B2 (ja) * 1992-03-02 2001-10-09 キヤノン株式会社 精密位置決め装置
JPH07302748A (ja) * 1994-05-02 1995-11-14 Canon Inc 半導体露光装置
DE69943311D1 (de) * 1998-12-24 2011-05-12 Canon Kk Trägerplattesteuerungsvorrichtung, Belichtungsapparat und Verfahren zur Herstellung einer Halbleitervorrichtung
US20080060133A1 (en) * 2006-08-24 2008-03-13 General Electric Company Dual-stage positioning system
US8605294B2 (en) * 2012-03-09 2013-12-10 Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense Actuating apparatus, actuating system and method for actuating a working stage to move relative to a platform with high-precision positioning capability

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4378709A (en) * 1980-10-08 1983-04-05 Anorad Corp. Friction drive for positioning table
JPS5978533A (ja) * 1982-10-27 1984-05-07 Canon Inc 露光装置
JPS60116506U (ja) * 1984-01-18 1985-08-07 日本精工株式会社 テ−ブルの超精密位置決め機構
NL8500930A (nl) * 1985-03-29 1986-10-16 Philips Nv Verplaatsingsinrichting met voorgespannen contactloze lagers.
US4654571A (en) * 1985-09-16 1987-03-31 Hinds Walter E Single plane orthogonally movable drive system
US4676649A (en) * 1985-11-27 1987-06-30 Compact Spindle Bearing Corp. Multi-axis gas bearing stage assembly
US4971445A (en) * 1987-05-12 1990-11-20 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus

Also Published As

Publication number Publication date
US5062712A (en) 1991-11-05
EP0386702A3 (de) 1991-08-07
EP0386702B1 (de) 1994-04-06
EP0386702A2 (de) 1990-09-12
DE69007833T2 (de) 1994-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee