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DE68927052D1 - ENCLOSED HIGH BRIGHTNESS ELECTRON SOURCE AND RELATED DEVICE - Google Patents

ENCLOSED HIGH BRIGHTNESS ELECTRON SOURCE AND RELATED DEVICE

Info

Publication number
DE68927052D1
DE68927052D1 DE68927052T DE68927052T DE68927052D1 DE 68927052 D1 DE68927052 D1 DE 68927052D1 DE 68927052 T DE68927052 T DE 68927052T DE 68927052 T DE68927052 T DE 68927052T DE 68927052 D1 DE68927052 D1 DE 68927052D1
Authority
DE
Germany
Prior art keywords
high brightness
electron source
related device
enclosed high
brightness electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68927052T
Other languages
German (de)
Other versions
DE68927052T2 (en
Inventor
Albert Crewe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orchid One Corp
Original Assignee
Orchid One Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orchid One Corp filed Critical Orchid One Corp
Publication of DE68927052D1 publication Critical patent/DE68927052D1/en
Application granted granted Critical
Publication of DE68927052T2 publication Critical patent/DE68927052T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE68927052T 1988-04-19 1989-04-18 ENCLOSED HIGH BRIGHTNESS ELECTRON SOURCE AND RELATED DEVICE Expired - Fee Related DE68927052T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/183,643 US4833362A (en) 1988-04-19 1988-04-19 Encapsulated high brightness electron beam source and system
PCT/US1989/001626 WO1989010628A1 (en) 1988-04-19 1989-04-18 Encapsulated high brightness electron beam source and system therefor

Publications (2)

Publication Number Publication Date
DE68927052D1 true DE68927052D1 (en) 1996-10-02
DE68927052T2 DE68927052T2 (en) 1997-03-20

Family

ID=22673704

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68927052T Expired - Fee Related DE68927052T2 (en) 1988-04-19 1989-04-18 ENCLOSED HIGH BRIGHTNESS ELECTRON SOURCE AND RELATED DEVICE

Country Status (6)

Country Link
US (1) US4833362A (en)
EP (1) EP0411043B1 (en)
JP (1) JP2779026B2 (en)
CA (1) CA1325855C (en)
DE (1) DE68927052T2 (en)
WO (1) WO1989010628A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9000056A (en) * 1990-01-10 1991-08-01 Philips Nv SEALING DEVICE FOR PARTICULATE BUNDLE DEVICE.
NL9000057A (en) * 1990-01-10 1991-08-01 Philips Nv THERMALLY CONTROLLED VACUUM VALVE FOR PARTICULATE BUNDLE DEVICE.
US5150001A (en) * 1990-04-10 1992-09-22 Orchid One Corporation Field emission electron gun and method having complementary passive and active vacuum pumping
US5008549A (en) * 1990-04-10 1991-04-16 Orchid One Corporation High performance, vacuum compatible electromagnetic lens coil
US5241182A (en) * 1991-06-18 1993-08-31 Fei Company Precision electrostatic lens system and method of manufacture
JP2732961B2 (en) * 1991-07-18 1998-03-30 株式会社日立製作所 Charged particle beam equipment
US5304888A (en) * 1992-01-24 1994-04-19 Etec Systems, Inc. Mechanically stable field emission gun
JPH0719554B2 (en) * 1993-03-25 1995-03-06 工業技術院長 Charged beam device
US5909032A (en) * 1995-01-05 1999-06-01 American International Technologies, Inc. Apparatus and method for a modular electron beam system for the treatment of surfaces
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
DE60134718D1 (en) * 2001-04-09 2008-08-21 Integrated Circuit Testing Apparatus and method for controlling focused electron beams
JP4349964B2 (en) * 2003-09-10 2009-10-21 株式会社日立ハイテクノロジーズ Small electron gun
JP4538441B2 (en) * 2003-09-10 2010-09-08 株式会社日立ハイテクノロジーズ Electron beam application equipment
JP4751635B2 (en) * 2005-04-13 2011-08-17 株式会社日立ハイテクノロジーズ Magnetic field superposition type electron gun
JP4977399B2 (en) * 2005-11-10 2012-07-18 株式会社日立ハイテクノロジーズ Charged particle beam equipment
JP5016988B2 (en) * 2007-06-19 2012-09-05 株式会社日立ハイテクノロジーズ Charged particle beam apparatus and vacuum startup method thereof
JP5514472B2 (en) * 2008-05-28 2014-06-04 株式会社日立ハイテクノロジーズ Charged particle beam equipment
WO2009153939A1 (en) 2008-06-20 2009-12-23 株式会社日立ハイテクノロジーズ Charged particle beam apparatus, and method of controlling the same
KR101545193B1 (en) * 2009-02-22 2015-08-18 마퍼 리쏘그라피 아이피 비.브이. Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
US10804084B2 (en) 2015-09-16 2020-10-13 Hitachi High-Tech Corporation Vacuum apparatus
IT201800007349A1 (en) * 2018-07-19 2020-01-19 Multistage vacuum device with stage separation controlled by a shape memory alloy actuator

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
US3881125A (en) * 1972-08-17 1975-04-29 Tektronix Inc Separable-chamber electron-beam tube including means for puncturing a pressure seal therein
JPS49107949U (en) * 1972-12-29 1974-09-14
JPS5034461A (en) * 1973-07-31 1975-04-02
JPS5518014B2 (en) * 1974-12-20 1980-05-15
JPS5249761A (en) * 1975-10-20 1977-04-21 Hitachi Ltd Field emission electronic gun
US4074313A (en) * 1976-06-14 1978-02-14 Rca Corporation Electron beam disc recorder
JPS53137660A (en) * 1977-05-09 1978-12-01 Hitachi Ltd Electron gun
JPS54124966A (en) * 1978-03-23 1979-09-28 Jeol Ltd Exhasut system of particle-beam equipment
IT1198325B (en) * 1980-06-04 1988-12-21 Getters Spa STRUCTURE AND COMPOSITION GETTERANTS, PARTICULARLY SUITABLE FOR LOW TEMPERATURES
JPS58146344U (en) * 1982-03-26 1983-10-01 日本電子株式会社 charged particle source
JPS5971561U (en) * 1982-11-04 1984-05-15 株式会社日立製作所 Vacuum protection device for particle beam equipment
JPS5979969U (en) * 1982-11-18 1984-05-30 日本電子株式会社 Connection structure of cartridge type electron gun
JPS62140333A (en) * 1985-12-16 1987-06-23 Hitachi Ltd field emission cathode
JPS632180U (en) * 1986-06-24 1988-01-08
US4725736A (en) * 1986-08-11 1988-02-16 Electron Beam Memories Electrostatic electron gun with integrated electron beam deflection and/or stigmating system
JPS6351037A (en) * 1986-08-20 1988-03-04 Toshiba Corp Anode chamber of electron beam device
WO1988002180A1 (en) * 1986-09-18 1988-03-24 Crewe Albert V Differential pressure electron beam system, method and gun

Also Published As

Publication number Publication date
EP0411043B1 (en) 1996-08-28
WO1989010628A1 (en) 1989-11-02
JPH03505386A (en) 1991-11-21
EP0411043A1 (en) 1991-02-06
JP2779026B2 (en) 1998-07-23
DE68927052T2 (en) 1997-03-20
CA1325855C (en) 1994-01-04
US4833362A (en) 1989-05-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee