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DE60320198D1 - Piezoelektrischer Aktuator und Plattenlaufwerk mit diesem - Google Patents

Piezoelektrischer Aktuator und Plattenlaufwerk mit diesem

Info

Publication number
DE60320198D1
DE60320198D1 DE60320198T DE60320198T DE60320198D1 DE 60320198 D1 DE60320198 D1 DE 60320198D1 DE 60320198 T DE60320198 T DE 60320198T DE 60320198 T DE60320198 T DE 60320198T DE 60320198 D1 DE60320198 D1 DE 60320198D1
Authority
DE
Germany
Prior art keywords
disk drive
piezoelectric actuator
piezoelectric
actuator
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60320198T
Other languages
English (en)
Other versions
DE60320198T2 (de
Inventor
Hideki Kuwajima
Kaoru Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE60320198D1 publication Critical patent/DE60320198D1/de
Application granted granted Critical
Publication of DE60320198T2 publication Critical patent/DE60320198T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G11B21/08—Track changing or selecting during transducing operation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
DE2003620198 2002-10-16 2003-10-14 Piezoelektrischer Aktuator und Plattenlaufwerk mit diesem Expired - Lifetime DE60320198T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002301604A JP4321034B2 (ja) 2002-10-16 2002-10-16 圧電アクチュエータおよびディスク装置
JP2002301604 2002-10-16

Publications (2)

Publication Number Publication Date
DE60320198D1 true DE60320198D1 (de) 2008-05-21
DE60320198T2 DE60320198T2 (de) 2009-05-14

Family

ID=32040807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003620198 Expired - Lifetime DE60320198T2 (de) 2002-10-16 2003-10-14 Piezoelektrischer Aktuator und Plattenlaufwerk mit diesem

Country Status (6)

Country Link
US (1) US7312955B2 (de)
EP (1) EP1411560B1 (de)
JP (1) JP4321034B2 (de)
KR (1) KR100960771B1 (de)
CN (1) CN1221970C (de)
DE (1) DE60320198T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8756776B1 (en) 2005-12-09 2014-06-24 Western Digital Technologies, Inc. Method for manufacturing a disk drive microactuator that includes a piezoelectric element and a peripheral encapsulation layer
JP2007273589A (ja) * 2006-03-30 2007-10-18 Fujitsu Ltd 薄膜圧電デバイスおよびその作製方法
US7777991B2 (en) * 2007-01-12 2010-08-17 Sae Magnetics (H.K.) Ltd. Head gimbal assembly with improved interconnection between head slider and suspension, fabricating method thereof, and magnetic disk drive with the same
US8144435B2 (en) * 2008-10-20 2012-03-27 Seagate Technology Llc Cost reduced microactuator suspension
US8643980B1 (en) 2008-12-15 2014-02-04 Western Digital (Fremont), Llc Micro-actuator enabling single direction motion of a magnetic disk drive head
JP4820425B2 (ja) * 2009-03-16 2011-11-24 Ｔｄｋ株式会社 ヘッドジンバルアセンブリの製造方法、及び、ハードディスク装置の製造方法
KR101725115B1 (ko) 2010-12-16 2017-04-26 한국전자통신연구원 플렉시블 기판을 이용한 자급자족형 전원 공급 장치 및 센서 노드
JP5943590B2 (ja) * 2011-01-07 2016-07-05 日本発條株式会社 圧電素子の製造方法、圧電素子、圧電アクチュエータ、及びヘッド・サスペンション
US8947831B1 (en) 2011-11-30 2015-02-03 Magnecomp Corporation GSA suspension with microactuators extending to gimbal through flexible connectors
US9190086B1 (en) 2011-11-30 2015-11-17 Magnecomp Corporation GSA suspension having slider clearance for shock performance
US8879210B1 (en) 2011-11-30 2014-11-04 Magnecomp Corporation DSA suspension with microactuators extending to gimbal through flexible connectors
JP6128438B2 (ja) * 2013-09-30 2017-05-17 大日本印刷株式会社 サスペンション用基板、サスペンション、ヘッド付サスペンション、およびハードディスクドライブ
JP6146463B2 (ja) * 2015-03-13 2017-06-14 Tdk株式会社 ヘッドアッセンブリおよび磁気ディスク装置
JP6249320B2 (ja) * 2017-04-17 2017-12-20 大日本印刷株式会社 サスペンション用基板、サスペンション、ヘッド付サスペンション、およびハードディスクドライブ
CN111313751B (zh) * 2020-03-16 2022-10-21 南京航空航天大学 运用于狭窄空腔中的刚柔一体爬行作动器及其工作方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150287A (ja) * 1984-12-24 1986-07-08 Japan Storage Battery Co Ltd 圧電体変位装置
JP2529360B2 (ja) 1988-08-29 1996-08-28 富士写真フイルム株式会社 電動ズ―ムレンズ付きカメラ
US5187458A (en) * 1989-09-21 1993-02-16 Nihon Musen Kabushiki Kaisha Composite longitudinal vibration mechanical filter having central frequency deviation elimination means and method of manufacturing same
JP2888261B2 (ja) 1990-12-19 1999-05-10 富士通株式会社 ヘッド支持機構
US5764444A (en) * 1991-07-23 1998-06-09 Fujitsu Limited Mechanism for minute movement of a head
EP0549814B1 (de) * 1991-07-23 1997-06-18 Fujitsu Limited Gerät zur feineinstellung eines kopfes
JPH08305622A (ja) 1995-05-08 1996-11-22 Nec Corp 情報処理システム及びその排他制御方式
JPH0973746A (ja) 1995-09-01 1997-03-18 Fujitsu Ltd ディスク装置のヘッド支持機構
US6327120B1 (en) * 1997-04-17 2001-12-04 Fujitsu Limited Actuator using piezoelectric element and head-positioning mechanism using the actuator
CN1243604A (zh) * 1997-09-08 2000-02-02 日本碍子株式会社 压电/电致伸缩器件
US6157522A (en) 1998-04-07 2000-12-05 Seagate Technology Llc Suspension-level microactuator
US6715192B2 (en) * 1998-12-28 2004-04-06 Ngk Insulators, Ltd. Method for manufacturing a piezoelectric/electrostrictive device
SG106598A1 (en) * 2000-02-01 2004-10-29 Matsushita Electric Ind Co Ltd Head support mechanism and thin film piezoelectric actuator
US6618220B2 (en) * 2000-07-04 2003-09-09 Matsushita Electric Industrial Co., Ltd. Head actuator and hard disc drive including the same
JP4101492B2 (ja) * 2000-10-23 2008-06-18 松下電器産業株式会社 ヘッド支持機構
JP3900846B2 (ja) * 2001-03-02 2007-04-04 セイコーエプソン株式会社 音叉型水晶振動片、振動子、発振器及び携帯用電話装置
JP3855996B2 (ja) * 2001-06-29 2006-12-13 松下電器産業株式会社 マイクロ移動装置およびその製造方法
JP2003272324A (ja) * 2002-03-15 2003-09-26 Matsushita Electric Ind Co Ltd 薄膜圧電体素子およびその製造方法並びにアクチュエータ
JP2004064877A (ja) * 2002-07-29 2004-02-26 Matsushita Electric Ind Co Ltd 圧電アクチュエータ、圧電アクチュエータを用いたディスク装置、および圧電アクチュエータの製造方法

Also Published As

Publication number Publication date
US7312955B2 (en) 2007-12-25
HK1061601A1 (en) 2004-09-24
EP1411560B1 (de) 2008-04-09
US20040130831A1 (en) 2004-07-08
JP4321034B2 (ja) 2009-08-26
KR20040034463A (ko) 2004-04-28
CN1497593A (zh) 2004-05-19
CN1221970C (zh) 2005-10-05
EP1411560A3 (de) 2006-03-22
KR100960771B1 (ko) 2010-06-01
DE60320198T2 (de) 2009-05-14
EP1411560A2 (de) 2004-04-21
JP2004140069A (ja) 2004-05-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP