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DE60316469D1 - Lichtemissionseinrichtung mit beugendem optischem film auf einer lichtemissionsoberfläche und herstellungsverfahren dafür - Google Patents

Lichtemissionseinrichtung mit beugendem optischem film auf einer lichtemissionsoberfläche und herstellungsverfahren dafür

Info

Publication number
DE60316469D1
DE60316469D1 DE60316469T DE60316469T DE60316469D1 DE 60316469 D1 DE60316469 D1 DE 60316469D1 DE 60316469 T DE60316469 T DE 60316469T DE 60316469 T DE60316469 T DE 60316469T DE 60316469 D1 DE60316469 D1 DE 60316469D1
Authority
DE
Germany
Prior art keywords
light
manufacturing
optical film
emission surface
emissioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60316469T
Other languages
English (en)
Other versions
DE60316469T2 (de
Inventor
Toshihiko Ushiro
Soichiro Okubo
Takashi Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE60316469D1 publication Critical patent/DE60316469D1/de
Application granted granted Critical
Publication of DE60316469T2 publication Critical patent/DE60316469T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
DE60316469T 2002-12-12 2003-12-04 Lichtemissionseinrichtung mit beugendem optischem film auf einer lichtemissionsoberfläche und herstellungsverfahren dafür Expired - Fee Related DE60316469T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002360493 2002-12-12
JP2002360493A JP4207554B2 (ja) 2002-12-12 2002-12-12 光射出面上に回折光学膜を有する発光素子とその製造方法
PCT/JP2003/015562 WO2004054053A1 (ja) 2002-12-12 2003-12-04 光射出面上に回折光学膜を有する発光素子とその製造方法

Publications (2)

Publication Number Publication Date
DE60316469D1 true DE60316469D1 (de) 2007-10-31
DE60316469T2 DE60316469T2 (de) 2008-06-26

Family

ID=32500991

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316469T Expired - Fee Related DE60316469T2 (de) 2002-12-12 2003-12-04 Lichtemissionseinrichtung mit beugendem optischem film auf einer lichtemissionsoberfläche und herstellungsverfahren dafür

Country Status (10)

Country Link
US (1) US7342254B2 (de)
EP (1) EP1571742B1 (de)
JP (1) JP4207554B2 (de)
KR (1) KR20050083560A (de)
CN (1) CN1332485C (de)
AU (1) AU2003289190A1 (de)
CA (1) CA2474474A1 (de)
DE (1) DE60316469T2 (de)
TW (1) TW200425539A (de)
WO (1) WO2004054053A1 (de)

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TWI581026B (zh) * 2015-08-07 2017-05-01 高準精密工業股份有限公司 光學裝置
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CN113325503A (zh) * 2021-05-31 2021-08-31 江西欧迈斯微电子有限公司 衍射光学元件及光学设备
CN114509838B (zh) * 2022-01-05 2023-11-14 中国科学院苏州纳米技术与纳米仿生研究所 氮化镓基激光器及其内氮化镓纳米超结构的制备方法

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Also Published As

Publication number Publication date
US7342254B2 (en) 2008-03-11
JP4207554B2 (ja) 2009-01-14
US20050230687A1 (en) 2005-10-20
EP1571742A4 (de) 2006-01-18
CA2474474A1 (en) 2004-06-24
CN1332485C (zh) 2007-08-15
DE60316469T2 (de) 2008-06-26
AU2003289190A1 (en) 2004-06-30
TW200425539A (en) 2004-11-16
JP2004191716A (ja) 2004-07-08
EP1571742B1 (de) 2007-09-19
KR20050083560A (ko) 2005-08-26
CN1692536A (zh) 2005-11-02
WO2004054053A1 (ja) 2004-06-24
EP1571742A1 (de) 2005-09-07

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee