DE60315483D1 - Kapselungsstruktur für abbildungsdetektoren - Google Patents
Kapselungsstruktur für abbildungsdetektorenInfo
- Publication number
- DE60315483D1 DE60315483D1 DE60315483T DE60315483T DE60315483D1 DE 60315483 D1 DE60315483 D1 DE 60315483D1 DE 60315483 T DE60315483 T DE 60315483T DE 60315483 T DE60315483 T DE 60315483T DE 60315483 D1 DE60315483 D1 DE 60315483D1
- Authority
- DE
- Germany
- Prior art keywords
- detectors
- photo
- sub
- capacity structure
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003491 array Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000011159 matrix material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
- H10F39/1895—X-ray, gamma-ray or corpuscular radiation imagers of the hybrid type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12043—Photo diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Packaging Of Machine Parts And Wound Products (AREA)
- Basic Packing Technique (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Light Receiving Elements (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0219044A GB2392308B (en) | 2002-08-15 | 2002-08-15 | Packaging structure for imaging detectors |
GB0219044 | 2002-08-15 | ||
PCT/FI2003/000602 WO2004017429A1 (en) | 2002-08-15 | 2003-08-12 | Packaging structure for imaging detectors |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60315483D1 true DE60315483D1 (de) | 2007-09-20 |
DE60315483T2 DE60315483T2 (de) | 2008-04-30 |
Family
ID=9942401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2003615483 Expired - Fee Related DE60315483T2 (de) | 2002-08-15 | 2003-08-12 | Kapselungsstruktur für abbildungsdetektoren |
Country Status (9)
Country | Link |
---|---|
US (1) | US7375340B2 (de) |
EP (1) | EP1547161B1 (de) |
JP (1) | JP4279253B2 (de) |
CN (1) | CN100407445C (de) |
AT (1) | ATE369629T1 (de) |
AU (1) | AU2003254522A1 (de) |
DE (1) | DE60315483T2 (de) |
GB (1) | GB2392308B (de) |
WO (1) | WO2004017429A1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080080666A1 (en) * | 2004-09-29 | 2008-04-03 | Koninklijke Philips Electronics N.V. | Computed Tomography Imaging With Rotated Detection Modules |
US7505554B2 (en) * | 2005-07-25 | 2009-03-17 | Digimd Corporation | Apparatus and methods of an X-ray and tomosynthesis and dual spectra machine |
US7576371B1 (en) | 2006-03-03 | 2009-08-18 | Array Optronix, Inc. | Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays |
US7682930B2 (en) | 2006-06-09 | 2010-03-23 | Aptina Imaging Corporation | Method of forming elevated photosensor and resulting structure |
KR100922929B1 (ko) * | 2007-12-28 | 2009-10-22 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
US8049292B2 (en) * | 2008-03-27 | 2011-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
JP2010210590A (ja) * | 2009-03-12 | 2010-09-24 | Fujifilm Corp | 放射線検出器 |
US8274127B2 (en) * | 2009-06-30 | 2012-09-25 | Sumitomo Electric Industries, Ltd. | Photodiode array for image pickup device |
EP3281040B1 (de) | 2015-04-07 | 2021-11-24 | Shenzhen Xpectvision Technology Co., Ltd. | Halbleiterröntgendetektor |
CN108271415B (zh) | 2015-04-07 | 2019-03-05 | 深圳帧观德芯科技有限公司 | 半导体x射线检测器 |
EP3281041B1 (de) | 2015-04-07 | 2020-06-10 | Shenzhen Xpectvision Technology Co., Ltd. | Verfahren zur herstellung eines halbleiterröntgendetektors |
EP3320371A4 (de) | 2015-06-10 | 2019-03-06 | Shenzhen Xpectvision Technology Co., Ltd. | Detektor für die röntgenfluoreszenz |
EP3320374B1 (de) | 2015-07-09 | 2020-05-20 | Shenzhen Xpectvision Technology Co., Ltd. | Verfahren zur herstellung eines halbleiterröntgendetektors |
WO2017031740A1 (en) | 2015-08-27 | 2017-03-02 | Shenzhen Xpectvision Technology Co., Ltd. | X-ray imaging with a detector capable of resolving photon energy |
WO2017041221A1 (en) * | 2015-09-08 | 2017-03-16 | Shenzhen Xpectvision Technology Co., Ltd. | Methods for making an x-ray detector |
KR102163117B1 (ko) * | 2015-10-16 | 2020-10-07 | 한국전자기술연구원 | 3차원 레이저 스캐닝 장치 및 이를 포함하는 3차원 레이저 스캐닝 시스템 |
US10283557B2 (en) * | 2015-12-31 | 2019-05-07 | General Electric Company | Radiation detector assembly |
US10121771B2 (en) * | 2016-03-02 | 2018-11-06 | Sol Chip Ltd. | Target integrated circuit combined with a plurality of photovoltaic cells |
JP6879476B2 (ja) * | 2016-11-01 | 2021-06-02 | 住友電工デバイス・イノベーション株式会社 | 光モジュール |
EP3658963A4 (de) | 2017-07-26 | 2021-03-03 | Shenzhen Xpectvision Technology Co., Ltd. | Röntgendetektor |
JP6932580B2 (ja) | 2017-08-04 | 2021-09-08 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子 |
CN109738792B (zh) * | 2018-12-16 | 2020-06-12 | 深圳先进技术研究院 | SiPM阵列的信号读出方法、装置及SiPM阵列模块 |
CN114902081A (zh) * | 2020-02-26 | 2022-08-12 | 深圳帧观德芯科技有限公司 | 辐射检测器 |
EP3901612B1 (de) | 2020-04-23 | 2024-06-12 | Sensirion AG | Integrierter partikelsensor mit hohlraum |
CN115172353A (zh) * | 2022-06-30 | 2022-10-11 | 重庆秦嵩科技有限公司 | 一种基于光电混合集成的4通道光电探测器 |
CN118131175A (zh) * | 2022-11-28 | 2024-06-04 | 上海禾赛科技有限公司 | 探测器阵列、芯片、光接收模组、激光雷达、探测器阵列控制方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4826777A (en) * | 1987-04-17 | 1989-05-02 | The Standard Oil Company | Making a photoresponsive array |
US4785191A (en) * | 1987-04-17 | 1988-11-15 | Stemcor Corporation | Interconnected array of photosensors for simultaneously sensing light intensities at each of a number of locations |
US5352994A (en) * | 1987-10-06 | 1994-10-04 | The Board Of Trustees Of The Leland Stanford Junior University | Gallium arsenide monolithically integrated nonlinear transmission line impedance transformer |
JPH03265171A (ja) * | 1990-03-14 | 1991-11-26 | Nippon Steel Corp | イメージセンサ及び光電変換装置 |
US5227656A (en) * | 1990-11-06 | 1993-07-13 | Cincinnati Electronics Corporation | Electro-optical detector array |
GB9226890D0 (en) * | 1992-12-23 | 1993-02-17 | Philips Electronics Uk Ltd | An imaging device |
US5352884A (en) * | 1993-04-14 | 1994-10-04 | General Electric Corporation | Method and apparatus for providing offset for light detector |
KR987001092A (ko) * | 1994-12-23 | 1998-04-30 | 엘. 린그렌 클린턴 | 반도체 감마 선 카메라 및 의학 화상 시스템(Semiconductor Gamma-Ray Camera and Medical Imaging System) |
US6046454A (en) * | 1995-10-13 | 2000-04-04 | Digirad Corporation | Semiconductor radiation detector with enhanced charge collection |
US5635718A (en) * | 1996-01-16 | 1997-06-03 | Minnesota Mining And Manufacturing Company | Multi-module radiation detecting device and fabrication method |
JP2840941B2 (ja) * | 1997-04-02 | 1998-12-24 | 株式会社日立メディコ | 多素子放射線検出器及びその製造方法 |
US6369853B1 (en) * | 1997-11-13 | 2002-04-09 | Foveon, Inc. | Intra-pixel frame storage element, array, and electronic shutter method suitable for electronic still camera applications |
US6144718A (en) * | 1997-11-26 | 2000-11-07 | General Electric Company | Flexible cable connection for detector module |
JP2002502129A (ja) * | 1998-02-02 | 2002-01-22 | ユニアックス コーポレイション | 切替え可能な光電感度を有する有機ダイオード |
US6586812B1 (en) * | 1999-04-13 | 2003-07-01 | Agilent Technologies, Inc. | Isolation of alpha silicon diode sensors through ion implantation |
JP2003084066A (ja) * | 2001-04-11 | 2003-03-19 | Nippon Kessho Kogaku Kk | 放射線検出器用部品、放射線検出器および放射線検出装置 |
-
2002
- 2002-08-15 GB GB0219044A patent/GB2392308B/en not_active Expired - Lifetime
-
2003
- 2003-08-12 WO PCT/FI2003/000602 patent/WO2004017429A1/en active IP Right Grant
- 2003-08-12 EP EP03787828A patent/EP1547161B1/de not_active Expired - Lifetime
- 2003-08-12 US US10/523,943 patent/US7375340B2/en not_active Expired - Lifetime
- 2003-08-12 DE DE2003615483 patent/DE60315483T2/de not_active Expired - Fee Related
- 2003-08-12 CN CN038194279A patent/CN100407445C/zh not_active Expired - Lifetime
- 2003-08-12 JP JP2004528536A patent/JP4279253B2/ja not_active Expired - Lifetime
- 2003-08-12 AT AT03787828T patent/ATE369629T1/de not_active IP Right Cessation
- 2003-08-12 AU AU2003254522A patent/AU2003254522A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
GB2392308A (en) | 2004-02-25 |
ATE369629T1 (de) | 2007-08-15 |
CN100407445C (zh) | 2008-07-30 |
WO2004017429A1 (en) | 2004-02-26 |
GB0219044D0 (en) | 2002-09-25 |
AU2003254522A1 (en) | 2004-03-03 |
GB2392308B (en) | 2006-10-25 |
US7375340B2 (en) | 2008-05-20 |
US20060065841A1 (en) | 2006-03-30 |
JP4279253B2 (ja) | 2009-06-17 |
GB2392308A8 (en) | 2006-09-05 |
JP2005539373A (ja) | 2005-12-22 |
EP1547161A1 (de) | 2005-06-29 |
EP1547161B1 (de) | 2007-08-08 |
DE60315483T2 (de) | 2008-04-30 |
CN1675780A (zh) | 2005-09-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |