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DE60307887D1 - Vorrichtung für fluidsteuerung - Google Patents

Vorrichtung für fluidsteuerung

Info

Publication number
DE60307887D1
DE60307887D1 DE60307887T DE60307887T DE60307887D1 DE 60307887 D1 DE60307887 D1 DE 60307887D1 DE 60307887 T DE60307887 T DE 60307887T DE 60307887 T DE60307887 T DE 60307887T DE 60307887 D1 DE60307887 D1 DE 60307887D1
Authority
DE
Germany
Prior art keywords
fluid control
fluid
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60307887T
Other languages
English (en)
Other versions
DE60307887T2 (de
Inventor
Yasunori Mochizuki
Megumu Makino
Mutsunori Koyomogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE60307887D1 publication Critical patent/DE60307887D1/de
Application granted granted Critical
Publication of DE60307887T2 publication Critical patent/DE60307887T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
DE60307887T 2002-12-02 2003-10-31 Vorrichtung für fluidsteuerung Expired - Fee Related DE60307887T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002349850 2002-12-02
JP2002349850A JP4314425B2 (ja) 2002-12-02 2002-12-02 流体制御装置
PCT/JP2003/013978 WO2004051125A1 (ja) 2002-12-02 2003-10-31 流体制御装置

Publications (2)

Publication Number Publication Date
DE60307887D1 true DE60307887D1 (de) 2006-10-05
DE60307887T2 DE60307887T2 (de) 2007-08-30

Family

ID=32463051

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307887T Expired - Fee Related DE60307887T2 (de) 2002-12-02 2003-10-31 Vorrichtung für fluidsteuerung

Country Status (8)

Country Link
US (1) US20060096533A1 (de)
EP (1) EP1568927B1 (de)
JP (1) JP4314425B2 (de)
KR (1) KR20050083707A (de)
CN (1) CN1692244A (de)
DE (1) DE60307887T2 (de)
TW (1) TW200419094A (de)
WO (1) WO2004051125A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5096696B2 (ja) 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
JP5506655B2 (ja) * 2010-12-28 2014-05-28 株式会社堀場エステック 材料ガス制御装置、材料ガス制御方法、材料ガス制御プログラム及び材料ガス制御システム
JP5785813B2 (ja) 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
CN103827560B (zh) * 2011-09-30 2016-06-22 株式会社富士金 气体供给装置
US9188990B2 (en) 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
JP5833403B2 (ja) * 2011-10-06 2015-12-16 株式会社堀場エステック 流体機構及び該流体機構を構成する支持部材
US9335768B2 (en) * 2013-09-12 2016-05-10 Lam Research Corporation Cluster mass flow devices and multi-line mass flow devices incorporating the same
JP6186275B2 (ja) 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
JP1539278S (de) * 2015-03-31 2015-11-30
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置
CN115210852A (zh) 2021-02-08 2022-10-18 株式会社日立高新技术 气体供给装置、真空处理装置以及气体供给方法
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US6394138B1 (en) * 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
JP2002517697A (ja) * 1998-06-12 2002-06-18 ジェイ． グレゴリー ホーリングスヘッド， 一体化モジュラー化学送達ブロック
JP4110304B2 (ja) * 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP4244254B2 (ja) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー 集積化ガス制御装置
JP2001153289A (ja) * 1999-11-29 2001-06-08 Air Water Inc 集積型ガス供給ユニット用モジュールブロック固定方法
US6640835B1 (en) * 2000-03-03 2003-11-04 Creative Pathways, Inc. Micromount™ system
JP3455800B2 (ja) * 2000-03-10 2003-10-14 株式会社東芝 遮断開放器
JP4554853B2 (ja) * 2001-09-17 2010-09-29 シーケーディ株式会社 ガス供給集積弁
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system

Also Published As

Publication number Publication date
EP1568927B1 (de) 2006-08-23
TW200419094A (en) 2004-10-01
US20060096533A1 (en) 2006-05-11
JP4314425B2 (ja) 2009-08-19
KR20050083707A (ko) 2005-08-26
EP1568927A1 (de) 2005-08-31
CN1692244A (zh) 2005-11-02
WO2004051125A1 (ja) 2004-06-17
EP1568927A4 (de) 2006-01-11
DE60307887T2 (de) 2007-08-30
JP2004183743A (ja) 2004-07-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee