DE60230989D1 - Dehnungsmessvorrichtung mit temperaturabgleich - Google Patents
Dehnungsmessvorrichtung mit temperaturabgleichInfo
- Publication number
- DE60230989D1 DE60230989D1 DE60230989T DE60230989T DE60230989D1 DE 60230989 D1 DE60230989 D1 DE 60230989D1 DE 60230989 T DE60230989 T DE 60230989T DE 60230989 T DE60230989 T DE 60230989T DE 60230989 D1 DE60230989 D1 DE 60230989D1
- Authority
- DE
- Germany
- Prior art keywords
- strain
- gauge
- temperature
- strain gauge
- temperature compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
- G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
- G01L1/2256—Measuring circuits therefor involving digital counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Technology Law (AREA)
- Measurement Of Force In General (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Fire-Detection Mechanisms (AREA)
- Details Of Flowmeters (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0117085A GB2369889B (en) | 2001-07-13 | 2001-07-13 | Strain sensing installation |
PCT/GB2002/002378 WO2003006943A1 (en) | 2001-07-13 | 2002-05-21 | Temperature compensated strain sensing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60230989D1 true DE60230989D1 (de) | 2009-03-12 |
Family
ID=9918417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60230989T Expired - Lifetime DE60230989D1 (de) | 2001-07-13 | 2002-05-21 | Dehnungsmessvorrichtung mit temperaturabgleich |
Country Status (6)
Country | Link |
---|---|
US (1) | US6973837B2 (de) |
EP (1) | EP1407239B1 (de) |
AT (1) | ATE421682T1 (de) |
DE (1) | DE60230989D1 (de) |
GB (1) | GB2369889B (de) |
WO (1) | WO2003006943A1 (de) |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6962088B2 (en) * | 2002-09-17 | 2005-11-08 | Harmonic Drive Systems Inc. | Torque detection device for wave gearing |
DE10341482B4 (de) * | 2003-09-05 | 2005-07-21 | Sartorius Hamburg Gmbh | Gehäuselose Wägezelle |
US6939036B2 (en) * | 2003-11-04 | 2005-09-06 | Certainteed Corporation | Temperature-expansion indicator for siding panels |
US7495542B2 (en) * | 2004-08-12 | 2009-02-24 | Kelk Ltd. | Film temperature sensor and temperature sensing substrate |
DE102004054644A1 (de) * | 2004-11-11 | 2006-05-18 | Endress + Hauser Gmbh + Co. Kg | Vorrichtung und Verfahren zum Kompensieren von Messwertaufnehmern |
DE102005017853A1 (de) * | 2005-04-18 | 2006-10-19 | Siemens Ag | Drucksensorvorrichtung |
US20060288795A1 (en) * | 2005-06-27 | 2006-12-28 | Vishay Measurements Group, Inc. | Strain gage with off axis creep compensation feature |
DE102005051848B4 (de) * | 2005-10-28 | 2008-08-21 | Infineon Technologies Ag | Schaltungsanordnung zur temperaturdriftkompensierten Strommessung |
US7647837B2 (en) * | 2007-08-29 | 2010-01-19 | Honeywell International Inc. | Active temperature differential compensation for strain gage based sensors |
WO2009108230A1 (en) * | 2007-12-13 | 2009-09-03 | The Timken Company | Sensor module with stress isolated temperature compensation and method of manufacture |
US8563336B2 (en) * | 2008-12-23 | 2013-10-22 | International Business Machines Corporation | Method for forming thin film resistor and terminal bond pad simultaneously |
JP5507323B2 (ja) * | 2010-04-23 | 2014-05-28 | 本田技研工業株式会社 | 力覚センサの温度補償方法および力覚センサ |
DE102010023033A1 (de) * | 2010-06-08 | 2011-12-08 | Siemens Aktiengesellschaft | Medizinischer Tisch mit einem Liegenbrett |
CN103582807B (zh) * | 2011-06-07 | 2016-02-17 | 贾瓦哈拉尔尼赫鲁高级科学研究中心 | 从金属和碳基体制造应变敏感传感器和/或耐应变导管 |
EP2554962A1 (de) * | 2011-08-01 | 2013-02-06 | Honeywell Romania S.R.L. | Drahtlose SAW-Differentialdehnungsmesser |
CN102661752B (zh) * | 2012-04-25 | 2015-06-10 | 中航电测仪器股份有限公司 | 一种箔式应变计的制造方法 |
US10088937B2 (en) | 2012-05-03 | 2018-10-02 | Apple Inc. | Touch input device including a moment compensated bending sensor for load measurement on platform supported by bending beams |
BE1020791A3 (fr) * | 2012-07-13 | 2014-05-06 | Ct Rech Metallurgiques Asbl | Procede et dispositif de mesure des niveaux de fonte et de laitier dans un haut-fourneau. |
WO2014149023A1 (en) | 2013-03-15 | 2014-09-25 | Rinand Solutions Llc | Force sensing of inputs through strain analysis |
CN110134283B (zh) | 2013-10-28 | 2022-10-11 | 苹果公司 | 基于压电的力感测 |
US10459011B2 (en) | 2013-12-31 | 2019-10-29 | Halliburton Energy Services, Inc. | Method for multiplexing wheatstone bridge measurements |
AU2015100011B4 (en) | 2014-01-13 | 2015-07-16 | Apple Inc. | Temperature compensating transparent force sensor |
DE102014206759A1 (de) * | 2014-04-08 | 2015-10-08 | Schaeffler Technologies AG & Co. KG | Messelement und ein Messelement aufweisendes Bauteil |
US20150296622A1 (en) * | 2014-04-11 | 2015-10-15 | Apple Inc. | Flexible Printed Circuit With Semiconductor Strain Gauge |
US20150296607A1 (en) * | 2014-04-11 | 2015-10-15 | Apple Inc. | Electronic Device With Flexible Printed Circuit Strain Gauge Sensor |
CN104165712B (zh) * | 2014-08-09 | 2016-11-02 | 大连理工大学 | 一种用于铁路钢轨应力测量的补偿块安装装置 |
US20160349122A1 (en) * | 2015-05-26 | 2016-12-01 | Sikorsky Aircraft Corporation | Applications of multi-grid strain gages |
US9612170B2 (en) | 2015-07-21 | 2017-04-04 | Apple Inc. | Transparent strain sensors in an electronic device |
US10101145B2 (en) * | 2016-01-19 | 2018-10-16 | Rosemount Aerospace Inc. | Passive temperature error compensation for strain gauge pressure sensors |
US10209830B2 (en) * | 2016-03-31 | 2019-02-19 | Apple Inc. | Electronic device having direction-dependent strain elements |
US10133418B2 (en) | 2016-09-07 | 2018-11-20 | Apple Inc. | Force sensing in an electronic device using a single layer of strain-sensitive structures |
GB2558896B (en) * | 2017-01-17 | 2019-10-09 | Cambridge Entpr Ltd | A single membane flow-pressure sensing device |
US10444091B2 (en) | 2017-04-11 | 2019-10-15 | Apple Inc. | Row column architecture for strain sensing |
PL3392633T3 (pl) * | 2017-04-19 | 2020-06-01 | Huba Control Ag | Przetwornik ciśnienia |
US10309846B2 (en) | 2017-07-24 | 2019-06-04 | Apple Inc. | Magnetic field cancellation for strain sensors |
US10557770B2 (en) * | 2017-09-14 | 2020-02-11 | Sensata Technologies, Inc. | Pressure sensor with improved strain gauge |
JP6950427B2 (ja) * | 2017-10-03 | 2021-10-13 | 株式会社デンソー | 位置検出装置 |
IT201800005294A1 (it) | 2018-05-11 | 2019-11-11 | Componente di bicicletta in materiale composito e relativo processo di fabbricazione | |
IT201800005302A1 (it) | 2018-05-11 | 2019-11-11 | Pedivella di bicicletta dal lato trasmissione, dotata di rilevatore di sforzi/deformazioni per un misuratore di coppia o di potenza, nonche' metodi correlati | |
IT201800005299A1 (it) | 2018-05-11 | 2019-11-11 | Componente di bicicletta dotato di sensore di sforzi/deformazioni compensato in temperatura | |
IT201800005297A1 (it) | 2018-05-11 | 2019-11-11 | Pedivella di bicicletta e relativa guarnitura | |
CA3042547A1 (en) | 2018-05-11 | 2019-11-11 | Campagnolo S.R.L. | Bicycle crankarm provided with electric/electronic system |
DE102018117594A1 (de) * | 2018-07-20 | 2020-01-23 | Ifm Electronic Gmbh | Druckmesszelle mit Temperatursensor und Druckmessgerät mit einer solchen Druckmesszelle |
US10782818B2 (en) | 2018-08-29 | 2020-09-22 | Apple Inc. | Load cell array for detection of force input to an electronic device enclosure |
US11638353B2 (en) * | 2018-09-17 | 2023-04-25 | Hutchinson Technology Incorporated | Apparatus and method for forming sensors with integrated electrical circuits on a substrate |
JP2020085627A (ja) * | 2018-11-22 | 2020-06-04 | アズビル株式会社 | 圧力センサ |
EP3754329B1 (de) * | 2019-06-21 | 2023-07-26 | Materion GmbH | Wasserstoffsensor und verfahren zu dessen herstellung, messvorrichtung und verfahren zum messen einer wasserstoffkonzentration |
WO2021087348A1 (en) * | 2019-10-31 | 2021-05-06 | DJ Instruments | Temperature compensation of strain gauge output |
US20210247218A1 (en) * | 2020-02-10 | 2021-08-12 | Hutchinson Technology Incorporated | Systems And Methods To Increase Sensor Robustness |
JP7164837B2 (ja) * | 2020-02-21 | 2022-11-02 | Tdk株式会社 | 圧力センサ |
US11585204B2 (en) | 2020-05-26 | 2023-02-21 | Heath Poulson | Crowding avoidance apparatus and method |
CN114062135B (zh) * | 2021-11-16 | 2024-03-26 | 武汉工程大学 | 高温三轴试验机岩石应变数据修正方法 |
CN114414123B (zh) * | 2022-01-24 | 2023-08-25 | 上海交通大学 | 一种异形金属基底上的应变传感器芯片及其原位制备方法 |
KR20230137635A (ko) * | 2022-03-22 | 2023-10-05 | 동우 화인켐 주식회사 | 온도 및 압력 측정용 복합 센서 |
US11714015B1 (en) * | 2022-03-29 | 2023-08-01 | Rosemount Aerospace Inc. | Method for thermoelectric effect error correction |
CN119343585A (zh) * | 2022-06-23 | 2025-01-21 | 斯凯姆 | 应变仪表传感器 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2344642A (en) * | 1939-09-16 | 1944-03-21 | Arthur C Ruge | Temperature compensated strain gauge |
GB1097761A (en) | 1963-11-14 | 1968-01-03 | British Aircraft Corp Ltd | Improvements relating to strain gauges |
US3665756A (en) | 1965-10-18 | 1972-05-30 | Microdot Inc | Strain gauge temperature compensation system |
US3621436A (en) * | 1969-04-14 | 1971-11-16 | Blh Electronics | Strain gage with built-in dummy gage |
US4287772A (en) * | 1978-05-18 | 1981-09-08 | Gulton Industries, Inc. | Strain gage transducer and process for fabricating same |
US4299130A (en) * | 1979-10-22 | 1981-11-10 | Gould Inc. | Thin film strain gage apparatus with unstrained temperature compensation resistances |
DE3176209D1 (en) * | 1980-11-29 | 1987-06-25 | Tokyo Electric Co Ltd | Load cell and method of manufacturing the same |
US4430895A (en) * | 1982-02-02 | 1984-02-14 | Rockwell International Corporation | Piezoresistive accelerometer |
US4462018A (en) * | 1982-11-05 | 1984-07-24 | Gulton Industries, Inc. | Semiconductor strain gauge with integral compensation resistors |
US4448078A (en) * | 1982-11-23 | 1984-05-15 | The United States Of America As Represented By The Secretary Of The Air Force | Three-wire static strain gage apparatus |
JPS62213280A (ja) * | 1986-03-14 | 1987-09-19 | Nissan Motor Co Ltd | 半導体加速度センサ |
JPS6381867A (ja) | 1986-09-25 | 1988-04-12 | Yokogawa Electric Corp | 半導体拡散ストレンゲ−ジ |
JPH07113647B2 (ja) * | 1988-09-02 | 1995-12-06 | 日産自動車株式会社 | 半導体加速度センサ |
EP0359132B1 (de) | 1988-09-12 | 1993-12-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Dünnschichtwiderstand für Dehnungsmesser |
US5294910A (en) | 1991-07-01 | 1994-03-15 | Murata Manufacturing Co., Ltd. | Platinum temperature sensor |
US5375474A (en) * | 1992-08-12 | 1994-12-27 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Compensated high temperature strain gage |
US6301775B1 (en) | 1998-12-17 | 2001-10-16 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Alumina encapsulated strain gage, not mechanically attached to the substrate, used to temperature compensate an active high temperature gage in a half-bridge configuration |
CA2395898C (en) * | 2001-08-10 | 2006-11-21 | Leslie Dale Hiebert | Non-intrusive locating of a blockage in a pipeline |
-
2001
- 2001-07-13 GB GB0117085A patent/GB2369889B/en not_active Expired - Fee Related
-
2002
- 2002-05-21 EP EP02726316A patent/EP1407239B1/de not_active Expired - Lifetime
- 2002-05-21 WO PCT/GB2002/002378 patent/WO2003006943A1/en not_active Application Discontinuation
- 2002-05-21 AT AT02726316T patent/ATE421682T1/de not_active IP Right Cessation
- 2002-05-21 US US10/483,916 patent/US6973837B2/en not_active Expired - Fee Related
- 2002-05-21 DE DE60230989T patent/DE60230989D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1407239B1 (de) | 2009-01-21 |
GB0117085D0 (en) | 2001-09-05 |
GB2369889A (en) | 2002-06-12 |
WO2003006943A1 (en) | 2003-01-23 |
ATE421682T1 (de) | 2009-02-15 |
EP1407239A1 (de) | 2004-04-14 |
US6973837B2 (en) | 2005-12-13 |
GB2369889B (en) | 2004-06-09 |
US20040159161A1 (en) | 2004-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |