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DE60216508D1 - Verfahren zur konzentrationsregelung einer lösung, vorrichtung zum kontrollieren dieser regelung, und system mit einer solchen vorrichtung - Google Patents

Verfahren zur konzentrationsregelung einer lösung, vorrichtung zum kontrollieren dieser regelung, und system mit einer solchen vorrichtung

Info

Publication number
DE60216508D1
DE60216508D1 DE60216508T DE60216508T DE60216508D1 DE 60216508 D1 DE60216508 D1 DE 60216508D1 DE 60216508 T DE60216508 T DE 60216508T DE 60216508 T DE60216508 T DE 60216508T DE 60216508 D1 DE60216508 D1 DE 60216508D1
Authority
DE
Germany
Prior art keywords
solution
concentrating
controlling
control
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60216508T
Other languages
English (en)
Other versions
DE60216508T2 (de
Inventor
Herve Dulphy
Christophe Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Publication of DE60216508D1 publication Critical patent/DE60216508D1/de
Application granted granted Critical
Publication of DE60216508T2 publication Critical patent/DE60216508T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value

Landscapes

  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Detergent Compositions (AREA)
  • Accessories For Mixers (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE60216508T 2001-12-10 2002-12-10 Verfahren zur konzentrationsregelung einer lösung, vorrichtung zum kontrollieren dieser regelung, und system mit einer solchen vorrichtung Expired - Lifetime DE60216508T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0115932A FR2833365B1 (fr) 2001-12-10 2001-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif
FR0115932 2001-12-10
PCT/FR2002/004250 WO2003050634A2 (fr) 2001-12-10 2002-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif

Publications (2)

Publication Number Publication Date
DE60216508D1 true DE60216508D1 (de) 2007-01-11
DE60216508T2 DE60216508T2 (de) 2007-09-13

Family

ID=8870292

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60216508T Expired - Lifetime DE60216508T2 (de) 2001-12-10 2002-12-10 Verfahren zur konzentrationsregelung einer lösung, vorrichtung zum kontrollieren dieser regelung, und system mit einer solchen vorrichtung

Country Status (8)

Country Link
US (2) US20050084979A1 (de)
EP (1) EP1459147B1 (de)
AT (1) ATE347128T1 (de)
AU (1) AU2002364442A1 (de)
DE (1) DE60216508T2 (de)
FR (1) FR2833365B1 (de)
TW (1) TWI264626B (de)
WO (1) WO2003050634A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
US7344297B2 (en) 1998-04-16 2008-03-18 Air Liquide Electronics U.S. Lp Method and apparatus for asynchronous blending and supply of chemical solutions
US7871249B2 (en) 1998-04-16 2011-01-18 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids using a liquid ring pump
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US20070109912A1 (en) * 2005-04-15 2007-05-17 Urquhart Karl J Liquid ring pumping and reclamation systems in a processing environment
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
CN104503496B (zh) * 2014-12-12 2017-04-05 平顶山华兴浮选工程技术服务有限公司 一种矿浆浓度自调节系统及调节方法
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3074366B2 (ja) * 1993-02-22 2000-08-07 東京エレクトロン株式会社 処理装置
FR2761902B1 (fr) * 1997-04-11 1999-05-14 Labeille Sa Systeme de dilution de produits chimiques ultra-purs destine a l'industrie micro-electronique
FR2764089B1 (fr) * 1997-05-29 1999-07-02 Air Liquide Procede de regulation de la teneur d'oxygene de l'eau en sortie d'un appareil de dissolution d'oxygene dans l'eau et appareil pour la mise en ouvre du procede
WO1999053121A1 (en) * 1998-04-09 1999-10-21 Dj Parker Company, Inc. Doing Business As Parker Systems Automated chemical process control system
TW409312B (en) * 1999-02-02 2000-10-21 Mosel Vitelic Inc Systemic concentration adjustment method of the APM solution used in the semiconductor process
FR2811240B1 (fr) * 2000-07-05 2003-01-03 Air Liquide Procede pour la determination de la teneur en peroxyde d'hydrogene de melanges en particulier de melanges abrasifs utilises en electronique et application a la regulation de la concentration desdits melanges

Also Published As

Publication number Publication date
WO2003050634A2 (fr) 2003-06-19
AU2002364442A1 (en) 2003-06-23
AU2002364442A8 (en) 2003-06-23
WO2003050634A3 (fr) 2004-02-19
EP1459147A2 (de) 2004-09-22
FR2833365B1 (fr) 2004-05-14
ATE347128T1 (de) 2006-12-15
TW200307198A (en) 2003-12-01
FR2833365A1 (fr) 2003-06-13
DE60216508T2 (de) 2007-09-13
EP1459147B1 (de) 2006-11-29
US20100062610A1 (en) 2010-03-11
TWI264626B (en) 2006-10-21
US20050084979A1 (en) 2005-04-21

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