[go: up one dir, main page]

DE60044383D1 - Thermopile-type infrared sensor and apparatus for its manufacture - Google Patents

Thermopile-type infrared sensor and apparatus for its manufacture

Info

Publication number
DE60044383D1
DE60044383D1 DE60044383T DE60044383T DE60044383D1 DE 60044383 D1 DE60044383 D1 DE 60044383D1 DE 60044383 T DE60044383 T DE 60044383T DE 60044383 T DE60044383 T DE 60044383T DE 60044383 D1 DE60044383 D1 DE 60044383D1
Authority
DE
Germany
Prior art keywords
thermopile
manufacture
infrared sensor
type infrared
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044383T
Other languages
German (de)
Inventor
Haruyuki Endo
Takeshi Fuse
Tadashi Matsudate
Yasutaka Tanaka
Toshikazu Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishizuka Electronics Corp
Original Assignee
Ishizuka Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishizuka Electronics Corp filed Critical Ishizuka Electronics Corp
Application granted granted Critical
Publication of DE60044383D1 publication Critical patent/DE60044383D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE60044383T 1999-03-24 2000-03-24 Thermopile-type infrared sensor and apparatus for its manufacture Expired - Lifetime DE60044383D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7905299 1999-03-24

Publications (1)

Publication Number Publication Date
DE60044383D1 true DE60044383D1 (en) 2010-06-24

Family

ID=13679136

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044383T Expired - Lifetime DE60044383D1 (en) 1999-03-24 2000-03-24 Thermopile-type infrared sensor and apparatus for its manufacture

Country Status (5)

Country Link
US (1) US6348650B1 (en)
EP (1) EP1039280B1 (en)
CN (1) CN1203295C (en)
DE (1) DE60044383D1 (en)
TW (1) TW479123B (en)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001349787A (en) * 2000-06-06 2001-12-21 Seiko Epson Corp Infrared detector and thermometer
DE10033589A1 (en) * 2000-07-11 2002-01-31 Bosch Gmbh Robert Microstructured thermal sensor
US6467275B1 (en) * 2000-12-07 2002-10-22 International Business Machines Corporation Cold point design for efficient thermoelectric coolers
US6670538B2 (en) * 2001-01-05 2003-12-30 Endevco Corporation Thermal radiation sensor
JP3929705B2 (en) * 2001-02-05 2007-06-13 ユーディナデバイス株式会社 Semiconductor device and chip carrier
JP4009046B2 (en) * 2001-04-10 2007-11-14 浜松ホトニクス株式会社 Infrared sensor
CN1513213A (en) * 2001-06-08 2004-07-14 IR΢ϵͳ�ɷ����޹�˾ Infrared sensor and method for making same
DE10225377B4 (en) * 2001-06-11 2014-10-09 Denso Corporation Method of manufacturing a thermopile infrared radiation sensor
DE10144343A1 (en) * 2001-09-10 2003-03-27 Perkinelmer Optoelectronics Sensor for contactless measurement of a temperature
JP2003207391A (en) 2002-01-17 2003-07-25 Nissan Motor Co Ltd Infrared detecting element and method and device for manufacturing the same
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
JP3743394B2 (en) * 2002-05-31 2006-02-08 株式会社村田製作所 Infrared sensor and electronic device using the same
WO2004023087A1 (en) * 2002-09-09 2004-03-18 Rosemount Aerospace, Inc. Method for making an infrared detector and infrared detector
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US20050034749A1 (en) * 2003-08-12 2005-02-17 Chung-Nan Chen Structure of thermopile sensor
WO2005023299A2 (en) * 2003-09-09 2005-03-17 Gpc Biotech Ag Therapeutic human anti-mhc class ii antibodies and their uses
DE10341433A1 (en) * 2003-09-09 2005-03-31 Braun Gmbh Heatable infrared sensor and infrared thermometer with such an infrared sensor
JP4337530B2 (en) * 2003-12-09 2009-09-30 株式会社デンソー Infrared absorbing film manufacturing method
DE102004028022B4 (en) 2004-06-09 2006-11-16 Perkinelmer Optoelectronics Gmbh & Co.Kg sensor
DE102004028032B4 (en) * 2004-06-09 2008-04-17 Perkinelmer Optoelectronics Gmbh & Co.Kg sensor element
US20060000500A1 (en) * 2004-06-30 2006-01-05 Ioan Sauciuc Thermoelectric module
JP2006071601A (en) * 2004-09-06 2006-03-16 Denso Corp Infrared sensor, infrared type gas detector, and infrared ray source
JP2006105651A (en) * 2004-10-01 2006-04-20 Ishizuka Electronics Corp Thermopile element and infrared sensor using it
JP2006214758A (en) * 2005-02-01 2006-08-17 Denso Corp Infrared detector
US7338640B2 (en) 2005-03-31 2008-03-04 General Electric Company Thermopile-based gas sensor
DE102005040236B3 (en) * 2005-08-24 2007-01-11 Therm-O-Tech Gmbh Thermoelectric generator electrical energy source has thermoelectric elements integrated around silicon base body with central hole for thermal input
US20070095380A1 (en) * 2005-10-31 2007-05-03 Dewes Brian E Infrared detecting device with a circular membrane
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
US7785002B2 (en) * 2006-12-05 2010-08-31 Delphi Technologies, Inc. P-N junction based thermal detector
WO2008113015A1 (en) 2007-03-14 2008-09-18 Entegris, Inc. System and method for non-intrusive thermal monitor
DE102008002157B4 (en) * 2008-06-02 2020-08-13 Robert Bosch Gmbh Sensor element for measuring infrared radiation and process for its manufacture
EP2333499A4 (en) * 2008-09-25 2012-07-25 Panasonic Corp Infrared sensor
CN101814867B (en) * 2009-02-20 2013-03-20 清华大学 Thermoelectric generator
KR101815717B1 (en) 2009-05-29 2018-01-05 엔테그리스, 아이엔씨. Tpir apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
US20110094556A1 (en) * 2009-10-25 2011-04-28 Digital Angel Corporation Planar thermoelectric generator
US9494471B2 (en) * 2010-11-29 2016-11-15 Ophir Optronics Solutions Ltd. Fast response thermopile power sensor
US8441093B2 (en) * 2011-04-15 2013-05-14 Excelitas Technologies Singapore Pte. Ltd. Shared membrane thermopile sensor array
TWI452272B (en) * 2011-05-24 2014-09-11 Univ Nat Kaohsiung Applied Sci Thermopile sensing element
JP5975380B2 (en) * 2012-03-30 2016-08-23 パナソニックＩｐマネジメント株式会社 Infrared radiation element and method of manufacturing the same
US8552380B1 (en) 2012-05-08 2013-10-08 Cambridge Cmos Sensors Limited IR detector
JP6291760B2 (en) * 2012-09-18 2018-03-14 株式会社リコー Thermocouple, thermopile, infrared sensor, and method for manufacturing infrared sensor
US9250126B2 (en) 2012-10-26 2016-02-02 Excelitas Technologies Singapore Pte. Ltd Optical sensing element arrangement with integral package
FR2999805B1 (en) * 2012-12-17 2017-12-22 Commissariat Energie Atomique METHOD FOR PRODUCING AN INFRARED DETECTION DEVICE
WO2015146054A1 (en) * 2014-03-27 2015-10-01 パナソニックＩｐマネジメント株式会社 Infrared ray detection element and infrared ray detection device equipped therewith
WO2017010022A1 (en) * 2015-07-15 2017-01-19 英弘精機株式会社 Pyranometer
KR20170024456A (en) * 2015-08-25 2017-03-07 삼성전기주식회사 Infrared detector and infrared thermal sensor having thereof
GB2551397B (en) * 2016-06-17 2020-03-25 X Fab Semiconductor Foundries Gmbh Thermopile Test Structure And Methods Employing Same
TWI608639B (en) * 2016-12-06 2017-12-11 財團法人工業技術研究院 Flexible thermoelectric structure and method for manufacturing the same
CN106698331B (en) * 2017-01-17 2018-11-02 中国科学院上海微系统与信息技术研究所 A kind of infrared thermal reactor structure of the monocrystalline silicon comprising beam diaphragm structure and preparation method thereof
CN106981166A (en) * 2017-05-25 2017-07-25 欧阳培光 A kind of network intelligence photoelectric smoke detecting alarm control system and its control method
US12181351B2 (en) 2018-02-28 2024-12-31 Arthur Beckman Thermopile assembly providing a massive electrical series of wire thermocouple elements
CN109141686B (en) * 2018-09-27 2021-04-13 北京遥测技术研究所 Thermal current sensor based on thermopile principle
JP7327470B2 (en) 2019-04-16 2023-08-16 住友電気工業株式会社 light sensor
WO2021006034A1 (en) * 2019-07-05 2021-01-14 住友電気工業株式会社 Optical sensor
TWI689710B (en) * 2019-07-12 2020-04-01 久尹股份有限公司 Package structure of thermopile sensor device
CN111969098A (en) * 2020-08-26 2020-11-20 中国科学院微电子研究所 High-absorption thermopile and manufacturing method thereof
RU2761119C1 (en) * 2021-05-07 2021-12-06 Федеральное государственное казенное учреждение "12 Центральный научно-исследовательский институт" Министерства обороны Российской Федерации Device for studying the energy and time parameters of light radiation
CN115574950A (en) * 2022-12-08 2023-01-06 西北工业大学 Infrared sensor module and preparation method thereof

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2247962C3 (en) 1972-09-29 1979-03-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Semiconductor-based thermocouple array
JPS53132282A (en) 1977-04-23 1978-11-17 Japan Radio Co Ltd Radiation wave detector
US4111717A (en) 1977-06-29 1978-09-05 Leeds & Northrup Company Small-size high-performance radiation thermopile
JPS5994023A (en) 1982-11-20 1984-05-30 Horiba Ltd Thermopile
DD221604A1 (en) 1983-12-06 1985-04-24 Adw Ddr THERMOELECTRIC DETECTOR
JPS648644A (en) 1987-06-30 1989-01-12 Sharp Kk Manufacture of semiconductor device
JPH03191834A (en) 1989-03-24 1991-08-21 Nippon Steel Corp Thermopile using silicon and its manufacturing method
JP2929204B2 (en) * 1989-10-12 1999-08-03 株式会社トーキン Thermopile
JPH0443783A (en) 1990-06-08 1992-02-13 Sharp Corp Video signal dropout correction circuit for magnetic recording and reproducing device
US5100479A (en) * 1990-09-21 1992-03-31 The Board Of Regents Acting For And On Behalf Of The University Of Michigan Thermopile infrared detector with semiconductor supporting rim
JP3191834B2 (en) 1992-04-20 2001-07-23 富士ゼロックス株式会社 Paper alignment device
DE4221037C2 (en) 1992-06-26 1998-07-02 Heimann Optoelectronics Gmbh Thermal radiation sensor
JP3189653B2 (en) * 1995-12-12 2001-07-16 株式会社村田製作所 Manufacturing method of infrared sensor
DE29818875U1 (en) * 1998-10-22 1998-12-24 Bartec Componenten und Systeme GmbH, 97980 Bad Mergentheim Radiation sensor

Also Published As

Publication number Publication date
US6348650B1 (en) 2002-02-19
TW479123B (en) 2002-03-11
EP1039280B1 (en) 2010-05-12
EP1039280A3 (en) 2002-09-25
EP1039280A2 (en) 2000-09-27
CN1274078A (en) 2000-11-22
CN1203295C (en) 2005-05-25

Similar Documents

Publication Publication Date Title
DE60044383D1 (en) Thermopile-type infrared sensor and apparatus for its manufacture
DE60023023D1 (en) ZIRCONIUM DIOXIDEOL AND METHOD FOR THE PRODUCTION THEREOF
DE60027952D1 (en) Infrared detector and method for its production
DE60027698D1 (en) LOAD-LOADING OSTEOIMPLANTATE AND METHOD FOR THE PRODUCTION THEREOF
DE69614172D1 (en) Sensor, process for its manufacture and measuring process for the use thereof
ATE311741T1 (en) HARVESTING METHOD AND HARVESTING APPARATUS
DE69942382D1 (en) SENSOR AND METHOD FOR THE PRODUCTION THEREOF
DE60022939D1 (en) Applicable sensor device and application method
DE59914732D1 (en) FESTELECTROLYTIC GAS SENSOR AND METHOD FOR THE PRODUCTION THEREOF
DE69803438D1 (en) RADIATION DETECTOR AND METHOD FOR THE PRODUCTION THEREOF
DE60114318D1 (en) Capacitive moisture sensor and method for its manufacture
AU2909001A (en) Sensor validation method and apparatus
DE60009819D1 (en) Network device configuration method and device
ZA200108428B (en) Physiological sensor device and method of manufacture thereof.
DE69720391D1 (en) Cholesterol sensor and process for its manufacture
DE69938533D1 (en) Inertia sensor and method for its production
ATE329493T1 (en) CHOCOLATE COVERING METHOD AND APPARATUS THEREOF
DE60026034D1 (en) COMPRESSIVE MICRIPOROUS MATERIAL AND METHOD FOR THE PRODUCTION THEREOF
DE69823639D1 (en) Sensor ring and method for its production
DE60129818D1 (en) RADIATION DETECTOR AND METHOD FOR THE PRODUCTION THEREOF
EP1408562A4 (en) MAGNETIC SENSOR AND METHOD FOR THE PRODUCTION THEREOF
DE60016012D1 (en) TOOL AND METHOD AND DEVICE FOR ITS PRODUCTION
DE60116486D1 (en) GALLENGANGSTENT AND METHOD FOR THE PRODUCTION THEREOF
DE60018389D1 (en) VERTICAL DETECTING FLUXGATE MICROMAGNETOMETER AND METHOD FOR THE PRODUCTION THEREOF
ATA155098A (en) OPTO-CHEMICAL SENSOR AND METHOD FOR THE PRODUCTION THEREOF

Legal Events

Date Code Title Description
8364 No opposition during term of opposition