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DE60044039D1 - Linearmotor - Google Patents

Linearmotor

Info

Publication number
DE60044039D1
DE60044039D1 DE60044039T DE60044039T DE60044039D1 DE 60044039 D1 DE60044039 D1 DE 60044039D1 DE 60044039 T DE60044039 T DE 60044039T DE 60044039 T DE60044039 T DE 60044039T DE 60044039 D1 DE60044039 D1 DE 60044039D1
Authority
DE
Germany
Prior art keywords
linear motor
linear
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044039T
Other languages
English (en)
Inventor
Toru Shikayama
Nobuyuki Irie
Yasuhiro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Application granted granted Critical
Publication of DE60044039D1 publication Critical patent/DE60044039D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/46—Fastening of windings on the stator or rotor structure
    • H02K3/47—Air-gap windings, i.e. iron-free windings

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
DE60044039T 2000-06-19 2000-06-19 Linearmotor Expired - Lifetime DE60044039D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2000/004001 WO2001099261A1 (fr) 1999-05-18 2000-06-19 Moteur lineaire

Publications (1)

Publication Number Publication Date
DE60044039D1 true DE60044039D1 (de) 2010-04-29

Family

ID=11736160

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044039T Expired - Lifetime DE60044039D1 (de) 2000-06-19 2000-06-19 Linearmotor

Country Status (4)

Country Link
US (1) US6800968B1 (de)
EP (1) EP1311056B1 (de)
DE (1) DE60044039D1 (de)
WO (1) WO2001099261A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3870413B2 (ja) * 2002-08-20 2007-01-17 株式会社安川電機 コアレスリニアモータ
EP1507329A1 (de) * 2003-08-14 2005-02-16 Inventio Ag Elektromotor, Aufzug mit einer mit einem Elektromotor bewegbaren Kabine und Aufzug mit einer Kabine und mit einem Elektromotor zur Bewegung eines Führungselements relativ zu der Kabine
JP2008518578A (ja) * 2004-10-28 2008-05-29 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ リニアモータコイル組立体及びリニアモータ
DE102006023493B4 (de) * 2006-05-18 2008-07-10 Intrasys Gmbh Innovative Transport-Systeme Mehrphasiges Wicklungsteil für einen Linearmotor oder Lineargenerator
CN102185460A (zh) * 2011-05-05 2011-09-14 雅科贝思精密机电(上海)有限公司 具有补偿齿槽力和吸引力的双线圈直线电机
DE102011111352B4 (de) * 2011-08-29 2015-11-26 Otto-Von-Guericke-Universität Magdeburg Elektromotor mit eisenloser Wicklung
CN103840588B (zh) * 2012-11-26 2016-08-17 直得科技股份有限公司 无铁心式线性马达线圈组合件结构及其单元线圈
DE102012025324A1 (de) * 2012-12-22 2014-06-26 Festo Ag & Co. Kg Stator für einen Lineardirektantrieb und elektrodynamisches Antriebssystem
DE202013012261U1 (de) * 2013-10-28 2015-11-23 Chieftech Precision Co., Ltd. Spulengruppe eines kernlosen Linearmotors und deren Spule
CN104702012B (zh) * 2013-12-10 2017-05-31 上海微电子装备有限公司 线圈结构及直线电机
WO2017137181A1 (en) * 2016-02-12 2017-08-17 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
US11303175B2 (en) 2016-02-12 2022-04-12 Asml Netherlands B.V. Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942050A (en) * 1973-07-05 1976-03-02 Bbc Brown Boveri & Company Limited Linear motor winding
JPS5863074A (ja) * 1981-10-09 1983-04-14 Takahashi Yoshiteru 直流型半導体リニアモ−タ
JPH087826Y2 (ja) * 1984-08-29 1996-03-04 旭化成工業株式会社 リニアアクチュエ−タ用部品
JPS62195375A (ja) 1986-02-24 1987-08-28 Sumikin Coke Co Ltd 無水ナフタル酸の製造方法
JPS62195375U (de) * 1986-05-29 1987-12-11
JPH0746895B2 (ja) 1989-04-28 1995-05-17 トヨタ車体株式会社 ブラシレス直流リニアモータ
JPH04183264A (ja) * 1990-11-16 1992-06-30 Ntn Corp ブラシレスリニアモータの電機子
JPH1198811A (ja) 1997-09-24 1999-04-09 Canon Inc リニアモータ、これを用いたステージ装置や露光装置、ならびにデバイス製造方法
JPH11122903A (ja) * 1997-10-20 1999-04-30 Fuji Elelctrochem Co Ltd リニアモータ

Also Published As

Publication number Publication date
EP1311056A4 (de) 2007-02-28
EP1311056A1 (de) 2003-05-14
US6800968B1 (en) 2004-10-05
EP1311056B1 (de) 2010-03-17
WO2001099261A1 (fr) 2001-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition