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DE60034523D1 - Piezoelektrisches/elektrostriktives Bauelement - Google Patents

Piezoelektrisches/elektrostriktives Bauelement

Info

Publication number
DE60034523D1
DE60034523D1 DE60034523T DE60034523T DE60034523D1 DE 60034523 D1 DE60034523 D1 DE 60034523D1 DE 60034523 T DE60034523 T DE 60034523T DE 60034523 T DE60034523 T DE 60034523T DE 60034523 D1 DE60034523 D1 DE 60034523D1
Authority
DE
Germany
Prior art keywords
piezoelectric
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034523T
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Masato Komazawa
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60034523D1 publication Critical patent/DE60034523D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE60034523T 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement Expired - Lifetime DE60034523D1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP30784499 1999-10-28
JP32619599 1999-11-16
JP37196799 1999-12-27
JP2000204758A JP3466550B2 (ja) 1999-10-01 2000-07-06 圧電／電歪デバイス

Publications (1)

Publication Number Publication Date
DE60034523D1 true DE60034523D1 (de) 2007-06-06

Family

ID=27530690

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034523T Expired - Lifetime DE60034523D1 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement

Country Status (3)

Country Link
EP (1) EP1089351B1 (de)
JP (1) JP3466550B2 (de)
DE (1) DE60034523D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6525448B1 (en) 1999-10-01 2003-02-25 Ngk Insulators Ltd Piezoelectric/electrostrictive device
JP3845544B2 (ja) 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6404109B1 (en) 1999-10-01 2002-06-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having increased strength
JP3436727B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US7164221B1 (en) 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JP4058223B2 (ja) 1999-10-01 2008-03-05 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6915547B2 (en) 1999-10-01 2005-07-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
JP3845543B2 (ja) 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
EP1089357B1 (de) 1999-10-01 2007-08-15 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
WO2001026168A1 (fr) 1999-10-01 2001-04-12 Ngk Insulators, Ltd. Dispositif piezo-electrique / electrostrictif
JP3436735B2 (ja) 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP4015820B2 (ja) 2001-04-11 2007-11-28 日本碍子株式会社 配線基板及びその製造方法
DE10146704A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotoren mit Piezoelementen, hergestellt nach dem Keramikkondensatorverfahren
JPWO2012128275A1 (ja) * 2011-03-23 2014-07-24 日本碍子株式会社 液体輸送アクチュエータ及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126834A (ja) * 1997-07-04 1999-01-29 Toshio Fukuda Ｐｚｔ薄膜バイモルフ形の平行平板構造体、及びその製造方法

Also Published As

Publication number Publication date
EP1089351A3 (de) 2004-01-07
JP3466550B2 (ja) 2003-11-10
EP1089351A2 (de) 2001-04-04
JP2001250996A (ja) 2001-09-14
EP1089351B1 (de) 2007-04-25

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Legal Events

Date Code Title Description
8332 No legal effect for de