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DE60032438D1 - Verbessertes Verfahren zum Einbetten von passiven Bauteilen - Google Patents

Verbessertes Verfahren zum Einbetten von passiven Bauteilen

Info

Publication number
DE60032438D1
DE60032438D1 DE60032438T DE60032438T DE60032438D1 DE 60032438 D1 DE60032438 D1 DE 60032438D1 DE 60032438 T DE60032438 T DE 60032438T DE 60032438 T DE60032438 T DE 60032438T DE 60032438 D1 DE60032438 D1 DE 60032438D1
Authority
DE
Germany
Prior art keywords
improved process
passive components
embedding passive
embedding
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032438T
Other languages
English (en)
Other versions
DE60032438T2 (de
Inventor
John James Felten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of DE60032438D1 publication Critical patent/DE60032438D1/de
Application granted granted Critical
Publication of DE60032438T2 publication Critical patent/DE60032438T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/207Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a prefabricated paste pattern, ink pattern or powder pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders
    • H05K2203/0152Temporary metallic carrier, e.g. for transferring material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0338Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49099Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE60032438T 1999-10-15 2000-07-10 Verbessertes Verfahren zum Einbetten von passiven Bauteilen Expired - Lifetime DE60032438T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/419,681 US6317023B1 (en) 1999-10-15 1999-10-15 Method to embed passive components
US419681 1999-10-15

Publications (2)

Publication Number Publication Date
DE60032438D1 true DE60032438D1 (de) 2007-02-01
DE60032438T2 DE60032438T2 (de) 2007-10-04

Family

ID=23663295

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60032438T Expired - Lifetime DE60032438T2 (de) 1999-10-15 2000-07-10 Verbessertes Verfahren zum Einbetten von passiven Bauteilen

Country Status (6)

Country Link
US (2) US6317023B1 (de)
EP (1) EP1093327B1 (de)
JP (1) JP3556164B2 (de)
KR (1) KR100377309B1 (de)
DE (1) DE60032438T2 (de)
TW (1) TWI240602B (de)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001513697A (ja) 1997-02-24 2001-09-04 スーペリア マイクロパウダーズ リミテッド ライアビリティ カンパニー エアロゾル法及び装置、粒子製品、並びに該粒子製品から製造される電子装置
US6338809B1 (en) 1997-02-24 2002-01-15 Superior Micropowders Llc Aerosol method and apparatus, particulate products, and electronic devices made therefrom
US6621012B2 (en) * 2001-02-01 2003-09-16 International Business Machines Corporation Insertion of electrical component within a via of a printed circuit board
US6576489B2 (en) * 2001-05-07 2003-06-10 Applied Materials, Inc. Methods of forming microstructure devices
EP1261241A1 (de) * 2001-05-17 2002-11-27 Shipley Co. L.L.C. Widerstand und Leiterplatte, die den Widerstand in ihre Struktur einbettet
US6696906B1 (en) * 2001-05-30 2004-02-24 Hewlett-Packard Development Company, L.P. Low dielectric loss signal line having a conductive trace supported by filaments
TW518616B (en) * 2001-06-01 2003-01-21 Phoenix Prec Technology Corp Method of manufacturing multi-layer circuit board with embedded passive device
EP2315510A3 (de) * 2001-06-05 2012-05-02 Dai Nippon Printing Co., Ltd. Leiterplatte mit passiven Elementen
JP4515477B2 (ja) * 2001-06-05 2010-07-28 大日本印刷株式会社 受動素子を備えた配線板の製造方法
US6951666B2 (en) * 2001-10-05 2005-10-04 Cabot Corporation Precursor compositions for the deposition of electrically conductive features
US20030108664A1 (en) * 2001-10-05 2003-06-12 Kodas Toivo T. Methods and compositions for the formation of recessed electrical features on a substrate
US7524528B2 (en) 2001-10-05 2009-04-28 Cabot Corporation Precursor compositions and methods for the deposition of passive electrical components on a substrate
US7629017B2 (en) 2001-10-05 2009-12-08 Cabot Corporation Methods for the deposition of conductive electronic features
US7083850B2 (en) * 2001-10-18 2006-08-01 Honeywell International Inc. Electrically conductive thermal interface
US7732002B2 (en) 2001-10-19 2010-06-08 Cabot Corporation Method for the fabrication of conductive electronic features
US7553512B2 (en) 2001-11-02 2009-06-30 Cabot Corporation Method for fabricating an inorganic resistor
US6860000B2 (en) * 2002-02-15 2005-03-01 E.I. Du Pont De Nemours And Company Method to embed thick film components
US20050063135A1 (en) * 2003-09-18 2005-03-24 Borland William J. High tolerance embedded capacitors
US20040108134A1 (en) * 2002-10-11 2004-06-10 Borland William J. Printed wiring boards having low inductance embedded capacitors and methods of making same
US20040099999A1 (en) * 2002-10-11 2004-05-27 Borland William J. Co-fired capacitor and method for forming ceramic capacitors for use in printed wiring boards
US6897761B2 (en) * 2002-12-04 2005-05-24 Cts Corporation Ball grid array resistor network
WO2004056160A1 (en) * 2002-12-13 2004-07-01 E.I. Du Pont De Nemours And Company Printed wiring boards having low inductance embedded capacitors and methods of making same
US20040231885A1 (en) * 2003-03-07 2004-11-25 Borland William J. Printed wiring boards having capacitors and methods of making thereof
US7274100B2 (en) * 2003-06-23 2007-09-25 International Rectifier Corporation Battery protection circuit with integrated passive components
JP4047243B2 (ja) * 2003-08-07 2008-02-13 株式会社日立製作所 有機・無機酸化物混合体薄膜、それを用いた受動素子内蔵電子基板及び有機・無機酸化物混合体薄膜の製造方法
US7042331B2 (en) * 2003-08-12 2006-05-09 Delphi Technologies, Inc. Fabrication of thick film electrical components
US7178229B2 (en) 2003-11-20 2007-02-20 E. I. Du Pont De Nemours And Company Method of making interlayer panels
TWI265534B (en) * 2003-12-31 2006-11-01 Polytronics Technology Corp Over-current protection apparatus
EP1578179A3 (de) 2004-03-16 2006-05-03 E.I. du Pont de Nemours and Company Dickfilmdielektrikum und leitfähige Zusammensetzungen
US7688569B2 (en) * 2004-03-16 2010-03-30 E. I. Du Pont De Nemours And Company Thick-film dielectric and conductive compositions
US20050204864A1 (en) * 2004-03-16 2005-09-22 Borland William J Thick-film dielectric and conductive compositions
US20050208706A1 (en) * 2004-03-17 2005-09-22 Blazek Roy J Method of creating multi-layered monolithic circuit structure containing integral buried and trimmed components
US20070019789A1 (en) * 2004-03-29 2007-01-25 Jmar Research, Inc. Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays
US7100277B2 (en) * 2004-07-01 2006-09-05 E. I. Du Pont De Nemours And Company Methods of forming printed circuit boards having embedded thick film capacitors
TWI251455B (en) * 2004-07-06 2006-03-11 Advanced Semiconductor Eng A manufacturing method of a multi-layer circuit board with embedded passive components
US7342804B2 (en) * 2004-08-09 2008-03-11 Cts Corporation Ball grid array resistor capacitor network
US20060120015A1 (en) * 2004-12-02 2006-06-08 Borland William J Thick-film capacitors, embedding thick-film capacitors inside printed circuit boards, and methods of forming such capacitors and printed circuit boards
US20060141225A1 (en) * 2004-12-28 2006-06-29 Borland William J Oxygen doped firing of barium titanate on copper foil
EP1833286A1 (de) * 2004-12-28 2007-09-12 Ngk Spark Plug Co., Ltd Leiterplatte und leiterplattenherstellungsverfahren
US20060189113A1 (en) 2005-01-14 2006-08-24 Cabot Corporation Metal nanoparticle compositions
US8167393B2 (en) 2005-01-14 2012-05-01 Cabot Corporation Printable electronic features on non-uniform substrate and processes for making same
US7824466B2 (en) 2005-01-14 2010-11-02 Cabot Corporation Production of metal nanoparticles
US8334464B2 (en) 2005-01-14 2012-12-18 Cabot Corporation Optimized multi-layer printing of electronics and displays
US8383014B2 (en) 2010-06-15 2013-02-26 Cabot Corporation Metal nanoparticle compositions
US7533361B2 (en) 2005-01-14 2009-05-12 Cabot Corporation System and process for manufacturing custom electronics by combining traditional electronics with printable electronics
US7741189B2 (en) * 2005-06-20 2010-06-22 E.I. Du Pont De Nemours And Company Electrodes, inner layers, capacitors, electronic devices and methods of making thereof
US20060282999A1 (en) * 2005-06-20 2006-12-21 Diptarka Majumdar Electrodes, inner layers, capacitors and printed wiring boards and methods of making thereof - part II
US7456459B2 (en) * 2005-10-21 2008-11-25 Georgia Tech Research Corporation Design of low inductance embedded capacitor layer connections
US7504706B2 (en) * 2005-10-21 2009-03-17 E. I. Du Pont De Nemours Packaging having an array of embedded capacitors for power delivery and decoupling in the mid-frequency range and methods of forming thereof
US7705423B2 (en) 2005-10-21 2010-04-27 Georgia Tech Research Corporation Device having an array of embedded capacitors for power delivery and decoupling of high speed input/output circuitry of an integrated circuit
US7531416B2 (en) * 2005-12-21 2009-05-12 E. I. Du Pont De Nemours And Company Thick film capacitors on ceramic interconnect substrates
US20070210426A1 (en) * 2006-03-07 2007-09-13 Gerber Mark A Gold-bumped interposer for vertically integrated semiconductor system
US20070244267A1 (en) * 2006-04-10 2007-10-18 Dueber Thomas E Hydrophobic crosslinkable compositions for electronic applications
US20070236859A1 (en) * 2006-04-10 2007-10-11 Borland William J Organic encapsulant compositions for protection of electronic components
US20070291440A1 (en) * 2006-06-15 2007-12-20 Dueber Thomas E Organic encapsulant compositions based on heterocyclic polymers for protection of electronic components
JP2010512663A (ja) * 2006-12-12 2010-04-22 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 複合有機封入剤
EP2102268A2 (de) * 2006-12-12 2009-09-23 E.I. Du Pont De Nemours And Company Kristalline verkapselungsmittel
US20080160173A1 (en) * 2006-12-27 2008-07-03 Nokia Corporation Component Moulding Process
CN101467501B (zh) * 2007-02-06 2011-07-20 揖斐电株式会社 印制电路板及该印制电路板的制造方法
US8357753B2 (en) 2007-07-18 2013-01-22 Cda Processing Limited Liability Company Screen-printable encapsulants based on polyhydroxyamides that thermally convert to polybenzoxazoles
US8270145B2 (en) 2007-12-04 2012-09-18 Cda Processing Limited Liability Company Screen-printable encapsulants based on soluble polybenzoxazoles
EP3167458B1 (de) * 2014-07-11 2020-04-29 E. I. du Pont de Nemours and Company Fliessfähige zusammensetzungen mit niedrigtemperaturhärtung zur herstellung thermisch leitender bahnen in elektronischen anwendungen und verfahren im zusammenhang damit
TWI600354B (zh) * 2014-09-03 2017-09-21 光頡科技股份有限公司 具高彎折力之微電阻結構及其製造方法
WO2017188446A1 (ja) * 2016-04-28 2017-11-02 シャープ株式会社 導電性ペースト、電極接続構造、及び、電極接続構造の製造方法
TWI713424B (zh) * 2018-10-15 2020-12-11 鼎展電子股份有限公司 銅箔電阻與具有該銅箔電阻的電路板結構
WO2021158756A1 (en) * 2020-02-05 2021-08-12 Ferro Corporation M7 ltcc-silver system and related dielectric compositions for high frequency applications

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1130057A (fr) * 1954-05-04 1957-01-30 Norton And Gregory Ltd Perfectionnements apportés aux circuits et éléments électriques obtenus par impression
GB1258660A (de) * 1969-12-19 1971-12-30
US4180608A (en) * 1977-01-07 1979-12-25 Del Joseph A Process for making multi-layer printed circuit boards, and the article resulting therefrom
JPS5469768A (en) * 1977-11-14 1979-06-05 Nitto Electric Ind Co Printing circuit substrate with resistance
DE3322382A1 (de) * 1983-06-22 1985-01-10 Preh, Elektrofeinmechanische Werke Jakob Preh Nachf. Gmbh & Co, 8740 Bad Neustadt Verfahren zur herstellung von gedruckten schaltungen
US4724040A (en) * 1986-01-14 1988-02-09 Asahi Chemical Research Laboratory Co., Ltd. Method for producing electric circuits on a base boad
JPH0265194A (ja) * 1988-08-30 1990-03-05 Ibiden Co Ltd 厚膜素子を有するプリント配線板の製造方法
JPH02153589A (ja) 1988-12-05 1990-06-13 Ibiden Co Ltd 厚膜素子付プリント配線板
JP2707903B2 (ja) 1992-01-28 1998-02-04 日本電気株式会社 多層プリント配線板の製造方法
JPH0722741A (ja) * 1993-07-01 1995-01-24 Japan Gore Tex Inc カバーレイフィルム及びカバーレイフィルム被覆回路基板
US5362534A (en) * 1993-08-23 1994-11-08 Parlex Corporation Multiple layer printed circuit boards and method of manufacture
JP3372636B2 (ja) * 1994-03-16 2003-02-04 アルプス電気株式会社 抵抗基板の製造方法
US5652055A (en) * 1994-07-20 1997-07-29 W. L. Gore & Associates, Inc. Matched low dielectric constant, dimensionally stable adhesive sheet
IT235724Y1 (it) 1995-11-06 2000-07-12 Siv Soc Italiana Vetro Guarnizione perfezionata particolarmente adatta ad essere applicatasu vetro per veicoli
KR100516043B1 (ko) 1997-03-06 2005-09-26 라미나 세라믹스, 인크. 수동 소자들이 내재된 세라믹 다층 인쇄 회로 기판

Also Published As

Publication number Publication date
JP3556164B2 (ja) 2004-08-18
KR100377309B1 (ko) 2003-03-26
EP1093327A3 (de) 2003-12-10
TWI240602B (en) 2005-09-21
EP1093327A2 (de) 2001-04-18
EP1093327B1 (de) 2006-12-20
US20020028284A1 (en) 2002-03-07
US6317023B1 (en) 2001-11-13
DE60032438T2 (de) 2007-10-04
KR20010070138A (ko) 2001-07-25
JP2001160672A (ja) 2001-06-12

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