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DE60007830D1 - SCHOTTKY EMISSION CATHODE WITH EXTENDED LIFE - Google Patents

SCHOTTKY EMISSION CATHODE WITH EXTENDED LIFE

Info

Publication number
DE60007830D1
DE60007830D1 DE60007830T DE60007830T DE60007830D1 DE 60007830 D1 DE60007830 D1 DE 60007830D1 DE 60007830 T DE60007830 T DE 60007830T DE 60007830 T DE60007830 T DE 60007830T DE 60007830 D1 DE60007830 D1 DE 60007830D1
Authority
DE
Germany
Prior art keywords
emission cathode
extended life
schottky emission
schottky
extended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60007830T
Other languages
German (de)
Other versions
DE60007830T2 (en
Inventor
B Mcginn
Hartog G Den
S Jun
G Magera
A Schwind
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Application granted granted Critical
Publication of DE60007830D1 publication Critical patent/DE60007830D1/en
Publication of DE60007830T2 publication Critical patent/DE60007830T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/28—Dispenser-type cathodes, e.g. L-cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
DE60007830T 1999-08-20 2000-08-02 SCHOTTKY EMISSION CATHODE WITH EXTENDED LIFE Expired - Lifetime DE60007830T2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15004799P 1999-08-20 1999-08-20
PCT/EP2000/007518 WO2001015192A1 (en) 1999-08-20 2000-08-02 Schottky emitter having extended life
US150047P 2009-02-05

Publications (2)

Publication Number Publication Date
DE60007830D1 true DE60007830D1 (en) 2004-02-26
DE60007830T2 DE60007830T2 (en) 2004-12-02

Family

ID=22532883

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60007830T Expired - Lifetime DE60007830T2 (en) 1999-08-20 2000-08-02 SCHOTTKY EMISSION CATHODE WITH EXTENDED LIFE

Country Status (4)

Country Link
EP (1) EP1123558B1 (en)
JP (1) JP4656790B2 (en)
DE (1) DE60007830T2 (en)
WO (1) WO2001015192A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3998556B2 (en) 2002-10-17 2007-10-31 株式会社東研 High resolution X-ray microscope
US7218703B2 (en) 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus
EP1557865A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. Microfocus x-ray tube for microscopic inspection apparatus
US7176610B2 (en) * 2004-02-10 2007-02-13 Toshiba Machine America, Inc. High brightness thermionic cathode
EP1705684A1 (en) * 2005-03-22 2006-09-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Stabilized emitter and method for stabilizing same
US8159118B2 (en) 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
WO2008029731A1 (en) * 2006-09-05 2008-03-13 Denki Kagaku Kogyo Kabushiki Kaisha Electron source
JP4782736B2 (en) 2007-07-12 2011-09-28 電気化学工業株式会社 Electron source
EP2263248B1 (en) * 2008-03-03 2016-05-04 Carl Zeiss Microscopy, LLC Gas field ion source with coated tip
JP5919049B2 (en) * 2011-09-26 2016-05-18 株式会社日立ハイテクノロジーズ Field emission electron source
RU2675791C2 (en) * 2014-02-10 2018-12-25 Люксбрайт Аб X-ray device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814975A (en) * 1969-08-06 1974-06-04 Gen Electric Electron emission system
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
JPH0778552A (en) * 1993-09-09 1995-03-20 Hitachi Ltd Field emission cathode and method for manufacturing the same
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP3556331B2 (en) * 1995-07-17 2004-08-18 株式会社日立製作所 Manufacturing method of electron source
JPH1031955A (en) * 1996-07-17 1998-02-03 Hitachi Ltd Manufacturing method of thermal diffusion supplementary electron source and electron beam application device using the electron source
JP3440448B2 (en) * 1996-11-12 2003-08-25 日本電子株式会社 Thermal field emission electron gun
JP3766763B2 (en) * 1999-04-05 2006-04-19 日本電子株式会社 Field emission electron gun
FR2795861B1 (en) * 1999-06-29 2002-11-08 Schlumberger Technologies Inc SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD

Also Published As

Publication number Publication date
DE60007830T2 (en) 2004-12-02
JP2003507872A (en) 2003-02-25
EP1123558A1 (en) 2001-08-16
WO2001015192A1 (en) 2001-03-01
EP1123558B1 (en) 2004-01-21
JP4656790B2 (en) 2011-03-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition