DE59207962D1 - Kryopumpe mit einem im wesentlichen topfförmigen gehäuse - Google Patents

Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Info

Publication number: DE59207962D1
Authority: DE; Germany
Prior art keywords: cryopump; shaped housing; essentially pot; pot; essentially
Prior art date: 1992-01-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE59207962T

Other languages

English (en)

Inventor

Monika Mattern-Klosson

Hans-Juergen Mundinger

Hans-Ulrich Haefner

Uwe Timm

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Balzers und Leybold Deutschland Holding AG

Original Assignee

Leybold AG

Balzers und Leybold Deutschland Holding AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-01-23

Filing date

1992-04-18

Publication date

1997-03-06

1992-04-18 Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG

1992-04-18 Priority to DE59207962T priority Critical patent/DE59207962D1/de

1997-03-06 Application granted granted Critical

1997-03-06 Publication of DE59207962D1 publication Critical patent/DE59207962D1/de

2012-04-19 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Compressor (AREA)

DE59207962T 1992-01-23 1992-04-18 Kryopumpe mit einem im wesentlichen topfförmigen gehäuse Expired - Fee Related DE59207962D1 (de)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
DE59207962T DE59207962D1 (de)	1992-01-23	1992-04-18	Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE4201755A DE4201755A1 (de)	1992-01-23	1992-01-23	Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse
PCT/EP1992/000869 WO1993015318A1 (de)	1992-01-23	1992-04-18	Kryopumpe mit einem im wesentlichen topfförmigen gehäuse
DE59207962T DE59207962D1 (de)	1992-01-23	1992-04-18	Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Publications (1)

Publication Number	Publication Date
DE59207962D1 true DE59207962D1 (de)	1997-03-06

Family

ID=6450093

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DE4201755A Withdrawn DE4201755A1 (de)	1992-01-23	1992-01-23	Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse
DE59207962T Expired - Fee Related DE59207962D1 (de)	1992-01-23	1992-04-18	Kryopumpe mit einem im wesentlichen topfförmigen gehäuse

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
DE4201755A Withdrawn DE4201755A1 (de)	1992-01-23	1992-01-23	Kryopumpe mit einem im wesentlichen topffoermigen gehaeuse

Country Status (5)

Country	Link
US (1)	US5542257A (de)
EP (1)	EP0608232B1 (de)
JP (1)	JPH07502793A (de)
DE (2)	DE4201755A1 (de)
WO (1)	WO1993015318A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5261244A (en) *	1992-05-21	1993-11-16	Helix Technology Corporation	Cryogenic waterpump
DE19632123A1 (de) *	1996-08-09	1998-02-12	Leybold Vakuum Gmbh	Kryopumpe
US5782096A (en) *	1997-02-05	1998-07-21	Helix Technology Corporation	Cryopump with improved shielding
US6155059A (en) *	1999-01-13	2000-12-05	Helix Technology Corporation	High capacity cryopump
US6532749B2 (en)	1999-09-22	2003-03-18	The Coca-Cola Company	Stirling-based heating and cooling device
US6272867B1 (en)	1999-09-22	2001-08-14	The Coca-Cola Company	Apparatus using stirling cooler system and methods of use
US6266963B1 (en) *	1999-10-05	2001-07-31	The Coca-Cola Company	Apparatus using stirling cooler system and methods of use
US6263679B1 (en)	2000-04-05	2001-07-24	Helix Technology Corporation	Particulate dam for cryopump flange
US6550255B2 (en)	2001-03-21	2003-04-22	The Coca-Cola Company	Stirling refrigeration system with a thermosiphon heat exchanger
US6581389B2 (en)	2001-03-21	2003-06-24	The Coca-Cola Company	Merchandiser using slide-out stirling refrigeration deck
US7037083B2 (en)	2003-01-08	2006-05-02	Brooks Automation, Inc.	Radiation shielding coating
US20050274128A1 (en) *	2004-06-10	2005-12-15	Genesis	Cryopump with enhanced hydrogen pumping
US7313922B2 (en) *	2004-09-24	2008-01-01	Brooks Automation, Inc.	High conductance cryopump for type III gas pumping
CN100579619C (zh) *	2005-02-08	2010-01-13	住友重机械工业株式会社	改进的低温泵
KR100914383B1 (ko) *	2006-06-20	2009-08-28	주식회사 엘지화학	폴리헤테로고리 화합물, 이를 이용한 유기 전자 소자 및 이유기 전자 소자를 포함하는 전자 장치
WO2008088794A2 (en) *	2007-01-17	2008-07-24	Brooks Automation, Inc.	Pressure burst free high capacity cryopump
JP4436863B2 (ja) *	2007-10-29	2010-03-24	キヤノンアネルバテクニクス株式会社	再生構造を備えた冷却トラップユニット
WO2010002884A2 (en) *	2008-07-01	2010-01-07	Brooks Automation, Inc.	Method and apparatus for providing temperature control to a cryopump
US9186601B2 (en) *	2012-04-20	2015-11-17	Sumitomo (Shi) Cryogenics Of America Inc.	Cryopump drain and vent
US9174144B2 (en)	2012-04-20	2015-11-03	Sumitomo (Shi) Cryogenics Of America Inc	Low profile cryopump
JP5570550B2 (ja) *	2012-05-21	2014-08-13	住友重機械工業株式会社	クライオポンプ
KR101805075B1 (ko) *	2013-04-24	2017-12-05	지멘스 헬스케어 리미티드	2단 극저온 냉동기 및 관련 장착 설비를 포함하는 조립체
EP3120021B1 (de) *	2014-03-21	2023-05-10	Edwards Vacuum, LLC	Hybride frontanordnung einer kryopumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3140820A (en) *	1962-05-31	1964-07-14	Robert E Clausing	Method for maintaining very high vacuum in a system
FR2146100B2 (de) *	1971-07-16	1974-03-29	Air Liquide
DE2512235A1 (de) *	1975-03-20	1976-09-23	Bosch Gmbh Robert	Kuehlfalle fuer vakuumanlagen
US4719938A (en) *	1985-01-22	1988-01-19	Helix Technology Corporation	Self-cleaning valve and cryopump utilizing the same
DE8804218U1 (de) *	1988-03-29	1988-05-11	Leybold AG, 6450 Hanau	Einrichtung zur Evakuierung einer Vakuumkammer

1992
- 1992-01-23 DE DE4201755A patent/DE4201755A1/de not_active Withdrawn
- 1992-04-18 US US08/256,796 patent/US5542257A/en not_active Expired - Lifetime
- 1992-04-18 EP EP92909000A patent/EP0608232B1/de not_active Expired - Lifetime
- 1992-04-18 WO PCT/EP1992/000869 patent/WO1993015318A1/de active IP Right Grant
- 1992-04-18 JP JP4508482A patent/JPH07502793A/ja active Pending
- 1992-04-18 DE DE59207962T patent/DE59207962D1/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JPH07502793A (ja)	1995-03-23
DE4201755A1 (de)	1993-07-29
EP0608232A1 (de)	1994-08-03
US5542257A (en)	1996-08-06
EP0608232B1 (de)	1997-01-22
WO1993015318A1 (de)	1993-08-05

Publication	Publication Date	Title
DE59207962D1 (de)	1997-03-06	Kryopumpe mit einem im wesentlichen topfförmigen gehäuse
DE69321634D1 (de)	1998-11-26	Eich-Anordnung mit Gehäuse
DE59405733D1 (de)	1998-05-20	Wärmegeschütztes motorgehäuse mit metallmantel und kunststoffschild
FI87946C (fi)	1993-03-10	Skruv-hatt-montering
DE69306524D1 (de)	1997-01-23	Verdichtereinheit mit verquetschtem gehaeuse
DE59400303D1 (de)	1996-07-04	Radialverdichter mit einem strömungsstabilisierenden Gehäuse
DE69508911D1 (de)	1999-05-12	Gehäuse mit elektromagnetischer Abschirmung
FI942362L (fi)	1994-05-20	Sinkkiboraatti
DE69311017D1 (de)	1997-07-03	Nicht magnetische Teilchen
BR9302450A (pt)	1994-01-25	Valvula de cursor de embolo e carcaca de valvula
DE69328626D1 (de)	2000-06-15	Fotokopierer mit kodierungsfunktion
AU1880188A (en)	1989-09-28	Submersible pump with plastic housing
DE69303178D1 (de)	1996-07-18	Bremsmotor mit geringen abmessungen
DE59402797D1 (de)	1997-06-26	Topfgehäusepumpe
DE69213116D1 (de)	1996-10-02	Hermetisches Motorverdichtergehäuse
DE69300225D1 (de)	1995-08-10	Gehäuse mit flexiblem Befestigungsring.
DE59304213D1 (de)	1996-11-21	Elektromotor mit einem tiefgezogenen, topfförmigen motorgehäuse
DE69401747D1 (de)	1997-03-27	Lüftergehäuse
DE69610942D1 (de)	2000-12-21	Gehäuse mit integrierten Zuschriften
FI914978L (fi)	1993-04-23	EMC-kotelo
DE4244994B8 (de)	2006-08-10	Gehäuse mit vergossenen Bauteilen
DE59302066D1 (de)	1996-05-02	Pumpengehäuse
GB8819210D0 (en)	1988-09-14	I c engine having light metal housing parts
DE59105302D1 (de)	1995-06-01	Schutzgehäuse mit einem darin enthaltenen Elektronikbaustein.
DK405689A (da)	1990-02-20	Magnetaggregat

Legal Events

Date	Code	Title	Description
1998-02-19	8364	No opposition during term of opposition
2000-06-08	8339	Ceased/non-payment of the annual fee