[go: up one dir, main page]

DE59100757D1 - Zweistufige Kryopumpe. - Google Patents

Zweistufige Kryopumpe.

Info

Publication number
DE59100757D1
DE59100757D1 DE91100181T DE59100757T DE59100757D1 DE 59100757 D1 DE59100757 D1 DE 59100757D1 DE 91100181 T DE91100181 T DE 91100181T DE 59100757 T DE59100757 T DE 59100757T DE 59100757 D1 DE59100757 D1 DE 59100757D1
Authority
DE
Germany
Prior art keywords
stage cryopump
cryopump
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE91100181T
Other languages
English (en)
Inventor
Hans-Ulrich Dr Haefner
Hans-Hermann Prof Dr Klein
Uwe Prof Dr Timm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59100757D1 publication Critical patent/DE59100757D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE91100181T 1990-03-03 1991-01-08 Zweistufige Kryopumpe. Expired - Fee Related DE59100757D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4006755A DE4006755A1 (de) 1990-03-03 1990-03-03 Zweistufige kryopumpe

Publications (1)

Publication Number Publication Date
DE59100757D1 true DE59100757D1 (de) 1994-02-10

Family

ID=6401381

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4006755A Withdrawn DE4006755A1 (de) 1990-03-03 1990-03-03 Zweistufige kryopumpe
DE91100181T Expired - Fee Related DE59100757D1 (de) 1990-03-03 1991-01-08 Zweistufige Kryopumpe.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4006755A Withdrawn DE4006755A1 (de) 1990-03-03 1990-03-03 Zweistufige kryopumpe

Country Status (4)

Country Link
US (1) US5111667A (de)
EP (1) EP0445503B1 (de)
JP (1) JP2871873B2 (de)
DE (2) DE4006755A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231840A (en) * 1991-03-28 1993-08-03 Daikin Industries, Ltd. Cryopump
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
US5590538A (en) * 1995-11-16 1997-01-07 Lockheed Missiles And Space Company, Inc. Stacked multistage Joule-Thomson cryostat
DE19547030A1 (de) * 1995-12-15 1997-06-19 Leybold Ag Tieftemperatur-Refrigerator mit einem Kaltkopf sowie Verfahren zur Optimierung des Kaltkopfes für einen gewünschten Temperaturbereich
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6122921A (en) * 1999-01-19 2000-09-26 Applied Materials, Inc. Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
WO2008143067A1 (ja) * 2007-05-17 2008-11-27 Canon Anelva Technix Corporation クライオトラップ及びクライオトラップを有する真空処理装置
JP5028142B2 (ja) * 2007-05-17 2012-09-19 キヤノンアネルバ株式会社 クライオトラップ
US20090038319A1 (en) * 2007-08-08 2009-02-12 Sumitomo Heavy Industries, Ltd. Cryopanel and Cryopump Using the Cryopanel
WO2010002884A2 (en) * 2008-07-01 2010-01-07 Brooks Automation, Inc. Method and apparatus for providing temperature control to a cryopump
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
CN103348137B (zh) * 2010-11-24 2016-01-20 布鲁克机械公司 具备控制氢气释出的低温泵
WO2012109304A2 (en) * 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
WO2014173809A1 (en) * 2013-04-24 2014-10-30 Siemens Plc An assembly comprising a two-stage cryogenic refrigerator and associated mounting arrangement
US10352617B2 (en) * 2014-09-25 2019-07-16 University Of Zaragoza Apparatus and method for purifying gases and method of regenerating the same
BR112018011208A2 (pt) 2015-12-04 2018-11-21 Koninklijke Philips Nv sistema de resfriamento criogênico
JP6857046B2 (ja) * 2016-03-29 2021-04-14 住友重機械工業株式会社 クライオポンプ
JP6913049B2 (ja) * 2018-03-02 2021-08-04 住友重機械工業株式会社 クライオポンプ
US20240292568A1 (en) * 2023-02-27 2024-08-29 The United States Of America As Represented By The Secretary Of The Navy Cryogenic Platform

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3024009A (en) * 1944-05-08 1962-03-06 Jr Eugene T Booth Condensation can
US2465229A (en) * 1944-09-07 1949-03-22 Westinghouse Electric Corp Vacuum trap
US2985356A (en) * 1958-12-04 1961-05-23 Nat Res Corp Pumping device
DE1253404B (de) * 1962-03-26 1967-11-02 Varian Associates Hochvakuum-Pumpvorrichtung
US3338063A (en) * 1966-01-17 1967-08-29 500 Inc Cryopanels for cryopumps and cryopumps incorporating them
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
DE2536005A1 (de) * 1975-08-13 1977-02-24 Eckhard Kellner Hochvakuum-pumpensystem
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
US4454722A (en) * 1981-05-22 1984-06-19 Helix Technology Corporation Cryopump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4514204A (en) * 1983-03-21 1985-04-30 Air Products And Chemicals, Inc. Bakeable cryopump
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
FR2599789B1 (fr) * 1986-06-04 1990-03-23 Air Liquide Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre
EP0250613B1 (de) * 1986-06-23 1991-07-17 Leybold Aktiengesellschaft Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
JPS63124880A (ja) * 1986-11-12 1988-05-28 Hitachi Ltd クライオポンプ再生方法
EP0336992A1 (de) * 1988-04-13 1989-10-18 Leybold Aktiengesellschaft Verfahren und Vorrichtung zur Überprüfung der Funktion einer refrigeratorbetriebenen Kryopumpe
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump

Also Published As

Publication number Publication date
JPH04219478A (ja) 1992-08-10
US5111667A (en) 1992-05-12
JP2871873B2 (ja) 1999-03-17
EP0445503B1 (de) 1993-12-29
EP0445503A1 (de) 1991-09-11
DE4006755A1 (de) 1991-09-05

Similar Documents

Publication Publication Date Title
DE59100757D1 (de) Zweistufige Kryopumpe.
DE69104585D1 (de) Mikropumpe.
EP0626434A3 (de) Kühlmittel.
DE69107363D1 (de) Verdichter.
DE69112037D1 (de) Waferträger.
FI910791A0 (fi) Oeverfoeringssystem foer digiterade televisionsbilder.
FI912997L (fi) Rakdon.
DE69107997D1 (de) Balgpumpe.
DE59208526D1 (de) Kryopumpe
DE69109590D1 (de) Kompressorgehäuse-Konstruktion.
DE69205874D1 (de) Freikolbenverdichter.
DE69113266D1 (de) Adsorbentmittel.
DE69111876D1 (de) Ophthalmometer.
FI86244B (fi) Bakugn-spisugnkombination.
FI911120A7 (fi) Behaollare.
DE59104521D1 (de) Polkern.
DE69018278D1 (de) Kryopumpe.
DE69021370D1 (de) Zweistufiges Pumpsystem.
FI912344L (fi) Kompressionsskarv foer glasoegon.
DE69106179D1 (de) Diagonal-Verdichter.
DE69100071D1 (de) Kaefigmutter.
FI911598A7 (fi) Efterbehandlingsanordning foer tryckplattor.
DE69220994D1 (de) Kryopumpe
FI923416L (fi) Azeotropiskt underlaettad trans- vinyleringsteknologi.
ATE124392T1 (de) 8-sulfamylmethylen-2-aminotetraline.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8339 Ceased/non-payment of the annual fee