DE50208630D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number: DE50208630D1
Authority: DE; Germany
Prior art keywords: vacuum pump; vacuum; pump
Prior art date: 2001-03-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE50208630T

Other languages

English (en)

Inventor

Wolfgang Eberl

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-03-24

Filing date

2002-03-08

Publication date

2006-12-21

2002-03-08 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2002-03-08 Priority to DE50208630T priority Critical patent/DE50208630D1/de

2006-12-21 Application granted granted Critical

2006-12-21 Publication of DE50208630D1 publication Critical patent/DE50208630D1/de

2022-03-09 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Applications Or Details Of Rotary Compressors (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

DE50208630T 2001-03-24 2002-03-08 Vakuumpumpe Expired - Lifetime DE50208630D1 (de)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
DE50208630T DE50208630D1 (de)	2001-03-24	2002-03-08	Vakuumpumpe

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE10114585A DE10114585A1 (de)	2001-03-24	2001-03-24	Vakuumpumpe
DE50208630T DE50208630D1 (de)	2001-03-24	2002-03-08	Vakuumpumpe

Publications (1)

Publication Number	Publication Date
DE50208630D1 true DE50208630D1 (de)	2006-12-21

Family

ID=7678927

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DE10114585A Withdrawn DE10114585A1 (de)	2001-03-24	2001-03-24	Vakuumpumpe
DE50208630T Expired - Lifetime DE50208630D1 (de)	2001-03-24	2002-03-08	Vakuumpumpe

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
DE10114585A Withdrawn DE10114585A1 (de)	2001-03-24	2001-03-24	Vakuumpumpe

Country Status (4)

Country	Link
US (1)	US6676384B2 (de)
EP (1)	EP1243796B1 (de)
JP (1)	JP2002310092A (de)
DE (2)	DE10114585A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10150015A1 (de) *	2001-10-11	2003-04-17	Leybold Vakuum Gmbh	Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0229352D0 (en) *	2002-12-17	2003-01-22	Boc Group Plc	Vacuum pumping arrangement and method of operating same
GB0229353D0 (en) *	2002-12-17	2003-01-22	Boc Group Plc	Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0322889D0 (en) *	2003-09-30	2003-10-29	Boc Group Plc	Vacuum pump
US7140847B2 (en) *	2004-08-11	2006-11-28	The Boc Group, Inc.	Integrated high vacuum pumping system
WO2009142905A1 (en) *	2008-05-20	2009-11-26	Sundew Technologies, Llc	Deposition method and apparatus
GB2474507B (en)	2009-10-19	2016-01-27	Edwards Ltd	Vacuum pump
DE102009056218A1 (de) *	2009-11-28	2011-06-01	Robert Bosch Gmbh	Schraubenspindelpumpe mit integriertem Druckbegrenzungsventil
EP2956674B1 (de) *	2013-02-15	2019-05-01	Edwards Limited	Vakuumpumpe
DE102013114290A1 (de) *	2013-12-18	2015-06-18	Pfeiffer Vacuum Gmbh	Vakuumpumpe
GB2592030B (en) *	2020-02-12	2022-03-09	Edwards Ltd	Multiple stage vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3536418A (en) *	1969-02-13	1970-10-27	Onezime P Breaux	Cryogenic turbo-molecular vacuum pump
JPS5267810A (en) *	1975-12-03	1977-06-04	Aisin Seiki Co Ltd	High vacuum pump
DE2621201C3 (de) *	1976-05-13	1979-09-27	Maschinenfabrik Augsburg-Nuernberg Ag, 8900 Augsburg	Laufrad für eine Strömungsmaschine
JPS60116895A (ja) *	1983-11-30	1985-06-24	Hitachi Ltd	真空ポンプ
FR2647853A1 (fr) *	1989-06-05	1990-12-07	Cit Alcatel	Pompe primaire seche a deux etages
DE19632375A1 (de) *	1996-08-10	1998-02-19	Pfeiffer Vacuum Gmbh	Gasreibungspumpe
US6220824B1 (en) *	1999-06-21	2001-04-24	Varian, Inc.	Self-propelled vacuum pump
DE19930952A1 (de) *	1999-07-05	2001-01-11	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE19942410A1 (de) *	1999-09-06	2001-03-08	Pfeiffer Vacuum Gmbh	Vakuumpumpe

2001
- 2001-03-24 DE DE10114585A patent/DE10114585A1/de not_active Withdrawn
2002
- 2002-02-07 JP JP2002030826A patent/JP2002310092A/ja active Pending
- 2002-03-07 US US10/093,204 patent/US6676384B2/en not_active Expired - Fee Related
- 2002-03-08 DE DE50208630T patent/DE50208630D1/de not_active Expired - Lifetime
- 2002-03-08 EP EP02005166A patent/EP1243796B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE10114585A1 (de)	2002-09-26
EP1243796A3 (de)	2003-08-27
US6676384B2 (en)	2004-01-13
US20020136643A1 (en)	2002-09-26
JP2002310092A (ja)	2002-10-23
EP1243796B1 (de)	2006-11-08
EP1243796A2 (de)	2002-09-25

Publication	Publication Date	Title
DE60226377D1 (de)	2008-06-19	Vakuumpumpe
DE60237942D1 (de)	2010-11-25	Vakuumpumpe
DE60234987D1 (de)	2010-02-25	Vakuumpumpe
DE60222343D1 (de)	2007-10-25	Miniaturpumpe
DE60030833D1 (de)	2006-11-02	Vakuumpumpe
DE10393279D2 (de)	2005-06-02	Vakuumpumpe
DE50209511D1 (de)	2007-04-05	Kreiselpumpe
DE50101315D1 (de)	2004-02-19	Förderpumpe
DE60314930D1 (de)	2007-08-30	Vakuumpumpe
DE50103731D1 (de)	2004-10-28	Förderpumpe
DE60129590D1 (de)	2007-09-06	Magnetpumpe
DE60210287D1 (de)	2006-05-18	Pumpenanordnung
ATE491886T1 (de)	2011-01-15	Spaltrohrpumpe
DE50205754D1 (de)	2006-04-13	Vakuumleitung
DE60233458D1 (de)	2009-10-08	Vakuumpumpe
DE60209406D1 (de)	2006-04-27	Rohrpumpe
DE602004029470D1 (de)	2010-11-18	Vakuumpumpe
DE60227906D1 (de)	2008-09-11	Membranpumpe
DE60214270D1 (de)	2006-10-12	Pumpeinheit
DE50208630D1 (de)	2006-12-21	Vakuumpumpe
DE50308541D1 (de)	2007-12-20	Vakuumpumpe
DE60101368D1 (de)	2004-01-15	Vakuumpumpe
DE602004011583D1 (de)	2008-03-20	Kompakte Vakuumpumpe
DE50112030D1 (de)	2007-03-29	Förderpumpe
DE50213599D1 (de)	2009-07-23	Sauggerät

Legal Events

Date	Code	Title	Description
2007-11-29	8364	No opposition during term of opposition