DE4243421A1 - Opto-electronic component for measuring limited region of ultraviolet radiation - contains fluorescent medium stimulated by ultraviolet, optical and filtering arrangement ensuring narrow spectral stimulation region - Google Patents
Opto-electronic component for measuring limited region of ultraviolet radiation - contains fluorescent medium stimulated by ultraviolet, optical and filtering arrangement ensuring narrow spectral stimulation regionInfo
- Publication number
- DE4243421A1 DE4243421A1 DE4243421A DE4243421A DE4243421A1 DE 4243421 A1 DE4243421 A1 DE 4243421A1 DE 4243421 A DE4243421 A DE 4243421A DE 4243421 A DE4243421 A DE 4243421A DE 4243421 A1 DE4243421 A1 DE 4243421A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- component according
- optoelectronic component
- medium
- fluorescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 12
- 230000005693 optoelectronics Effects 0.000 title claims description 17
- 230000005855 radiation Effects 0.000 title claims description 4
- 230000003595 spectral effect Effects 0.000 title claims description 3
- 230000000638 stimulation Effects 0.000 title abstract 3
- 238000001914 filtration Methods 0.000 title 1
- 230000035945 sensitivity Effects 0.000 claims abstract description 7
- 238000010521 absorption reaction Methods 0.000 claims abstract description 6
- 238000005259 measurement Methods 0.000 claims abstract description 3
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000000695 excitation spectrum Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 239000003814 drug Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 claims 1
- 230000036211 photosensitivity Effects 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000001228 spectrum Methods 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 5
- 238000004020 luminiscence type Methods 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002211 ultraviolet spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/58—Photometry, e.g. photographic exposure meter using luminescence generated by light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
Zur Detektion von bestimmten Wellenlängenbereichen des Lichtes ist bekannt, daß Halbleiterphotoempfänger Licht über große Wellenlängenbereiche, meist bis in den Infrarotbereich, detektieren können. Oft wird eine bestimmte Wellenlänge hervorgehoben, bei der das Bauelement eine besondere Empfindlichkeit aufweist. In allen anderen Wellenlängenbereichen hat es jedoch ebenfalls eine beachtliche Empfindlichkeit. Beispielsweise blau- oder ultraviolettempfindliche Bauelemente, deren Empfindlichkeitsmaxima in der Nähe des infraroten Bereiches liegen.For the detection of certain Wavelength ranges of the Light is known to Semiconductor photo receiver light about great Wavelength ranges, mostly up to in the infrared range, can detect. Often a certain wavelength highlighted where the Component a special one Has sensitivity. In all other It has wavelength ranges however also one remarkable sensitivity. For example, blue or ultraviolet sensitive Components whose Sensitivity maxima in the Proximity of the infrared range lie.
Für die meisten, und die der Erfindung gemäßen Anwendung, stellt sich jedoch die große Bandbreite als Mangel heraus.For most, and those of Application according to the invention, however the great turns Bandwidth as a lack.
Ziel ist es, diese Bandbreite zu verringern.The goal is to cover this range to reduce.
Innerhalb des Wandlerbauelementes läßt diese sich jedoch nicht beliebig einengen.Within the Converter component leaves this however not arbitrarily constrict.
Hinsichtlich der Farbselektivität werden unterschiedliche Möglichkeiten angeboten. Dabei befinden sich die PN-Übergänge an der Oberfläche von V-Gräben, in vergrabenen Schichten und sehr dicht unter der Oberfläche (GB 20 34 971). Durch Verkleinerung der Epitaxieschichtdicke wird die Infrarotempfindlichkeit begrenzt (DE-OS 25 29 978; DE-AS 25 12 327).With regard to the Color selectivity different possibilities offered. Here are the PN transitions on the Surface of V-trenches, in buried layers and very just below the surface (GB 20 34 971). By downsizing the epitaxial layer thickness the infrared sensitivity limited (DE-OS 25 29 978; DE-AS 25 12 327).
Um noch geringere Bandbreiten zu erreichen, greift man auf optische Filter, Filterglaskombinationen und Überlagerung einer oder mehrerer Antireflexschichten zurück (bis zu 9 Schichten) (DE-OS 30 12 523; GB 15 90 865).To even lower bandwidths to reach, you take up optical filters, Filter glass combinations and Overlay one or several anti-reflective layers back (up to 9 layers) (DE-OS 30 12 523; GB 15 90 865).
Die genannten Möglichkeiten der Bandbreiten-Verringerung sind aber mit sehr hohem Kosten- und Produktionsaufwand verbunden.The possibilities of Bandwidth reduction are but with very high cost and production effort connected.
Eine Möglichkeit kostengünstig nur die UV-Bereiche detektieren zu können, der auch die Erfindung zugrunde liegt, besteht darin, einfache fotoempfindliche Halbleiterbauelemente mit Fluoreszensmaterialien so zu koppeln, daß beispielsweise kurzwellige elektromagnetische Strahlung in längerwellige elektromagnetische Strahlung umgewandelt wird, für die der Halbleiterdetektor empfindlich ist.An inexpensive way only detect the UV areas to be able to do that too Invention is based, is simple photosensitive Semiconductor components with Fluorescent materials so too couple that for example short-wave electromagnetic Radiation in longer-wave electromagnetic radiation for which the Semiconductor detector sensitive is.
Bekannt ist dies bei der Detektierung von Gamma-, Röntgen- und Ultraviolettstrahlung (EP 03 33 424; EP 03 24 944; EP 02 90 167).This is known at Detection of gamma, X-ray and Ultraviolet radiation (EP 03 33 424; EP 03 24 944; EP 02 90 167).
Der im Patentanspruch 1 angegebenen Erfindung liegt das Problem zugrunde, den Bereich des Lumineszens-Anregungs-Spektrums weiter einzuengen um noch schmalere Wellenlängenbereiche des UV-Spektrums detektieren zu können.The in claim 1 specified invention is the Problem underlying the area of the luminescence excitation spectrum further narrow around even narrower Wavelength ranges of the UV spectrum detect to can.
Dieses Problem wird gemäß Patentanspruch 1 dadurch gelöst, daß ein durch UV-Anregung fluoreszierendes Medium Eigenschaften eines Kantenfilters besitzt, die Absorptionskante die Anregung zur Fluoreszens im Spektrum begrenzt und dadurch der rechte Anstieg der Sensorempfindlichkeit dimensioniert wird.This problem is said to Claim 1 thereby solved that one by UV excitation fluorescent Medium properties of a Has edge filter that Absorption edge the excitation to fluorescence in the spectrum limited and thereby the right one Increase in Sensor sensitivity is dimensioned.
Die mit der Erfindung erzielten Vorteile bestehen insbesondere darin, daß durch eine einfache Filterglasanordnung mit einem Fluoreszensmedium und einem Halbleiterphotoelement, günstig in einem lichtdichten Gehäuse untergebracht, ein kostengünstiges photoelektrisches Bauelement zur Messung von Intensitäten schmaler ultravioletter Wellenlängenbereiche, verfügbar ist.The achieved with the invention There are particular advantages in that by a simple Filter glass arrangement with a Fluorescent medium and one Semiconductor photocell, cheap in a light-tight housing housed, a inexpensive photoelectric device for measuring intensities narrower ultraviolet Wavelength ranges, available is.
Eine vorteilhafte Ausgestaltung der Erfindung ist im Patentanspruch 5 angegeben.An advantageous embodiment the invention is in Claim 5 specified.
Die Weiterbildung nach Patentanspruch 5-11 ermöglicht den Einbau in einfache Meßgeräte zur Bestimmung von Intensitäten und Dosisleistungen eines dimensionierten Wellenlängenbereiches in Umwelt, Biologie, Medizin, Meßtechnik und in anderen Bereichen.Continuing education after Claim 5-11 allows installation in simple Measuring devices for the determination of Intensities and Dose rates one dimensioned Wavelength range in Environment, biology, medicine, Measurement technology and others Areas.
Ein Ausführungsbeispiel ist
unterstützend durch die
Abb. 1 so dargestellt, daß
ein hoch lichtdichtes Gehäuse
mit niedrigem
Temperaturkoeffizienten nach
Patentanspruch 5 als Halterung
für ein optisches Filterglas
1 (Abb. 1) (UV-durchlässig),
ein optisches Kantenfilter 2
(Abb. 1) als Medium mit
Lumineszenzeigenschaft, ein
sekundäres Filtermedium 3
(Abb. 1)
(fluoreszenslichtdurchlässig)
und einen Halter 4 (Abb. 1)
für ein optoelektronisches
Halbleiterbauelement mit
entsprechendem Element, dient.
Das optische Filterglas 1
(Abb. 1) ist dabei so unter
einem Lichteintrittsfenster des
Gehäuses angeordnet, daß nur
das den Filter vollständig
durchwandernde Licht das Innere
des Gehäuses erreicht.
Die Seitenkanten sind
lichtdicht abgedeckt, so daß
schräg einfallendes Licht nicht
einen dünneren Filter
durchwandern kann und auf diese
Weise das Innere des Gehäuses
erreicht.
Unter dem optischen Filterglas
1 (Abb. 1) ist das optische
Medium 2 (Abb. 1) so
angeordnet, daß alles das
Innere des Gehäuses erreichende
Licht dieses durchwandert, d. h.
teilweise absorbiert bzw. durch
Lumineszens umgewandelt und das
hindurchtretende Licht von
einer schwarzen Schicht
vollständig absorbiert wird.
Das fluoreszierende Medium hat
die Eigenschaft eines
Kantenfilters nach
Patentanspruch 1 in der Weise,
daß sein Fluoreszens-Anregungs-Spektrum
durch eine spektrale
Absorptionskante begrenzt wird.
Dabei ist es günstig, daß die
Absorption nicht durch
Umwandlung in Wärme, sondern
weitestgehend durch
lumineszierende
Lichtumwandlung entsteht.An exemplary embodiment is supported by Fig. 1 so that a highly light-tight housing with a low temperature coefficient according to claim 5 as a holder for an optical filter glass 1 ( Fig. 1) (UV-transparent), an optical edge filter 2 ( Fig. 1) serves as a medium with a luminescent property, a secondary filter medium 3 ( Fig. 1) (fluorescent light permeable) and a holder 4 ( Fig. 1) for an optoelectronic semiconductor component with a corresponding element.
The optical filter glass 1 ( Fig. 1) is arranged under a light entry window of the housing so that only the light that completely traverses the filter reaches the inside of the housing.
The side edges are covered in a light-tight manner so that obliquely incident light cannot pass through a thinner filter and in this way reaches the inside of the housing.
Under the optical filter glass 1 ( Fig. 1), the optical medium 2 ( Fig. 1) is arranged so that all the light reaching the interior of the housing passes through it, ie partially absorbed or converted by luminescence, and the light passing through from a black layer is completely absorbed.
The fluorescent medium has the property of an edge filter according to claim 1 in such a way that its fluorescence excitation spectrum is limited by a spectral absorption edge. It is favorable that the absorption is not caused by conversion to heat, but largely by luminescent light conversion.
In dem fluoreszierenden Medium
wird Lumineszens durch
elektromagnetische Strahlung in
der Weise angeregt, daß
Photonen auf lumineszierende
Partikel stoßen, diese zur
Lumineszens anregen und das
entstehende Licht nach allen
Richtungen gleichverteilt
abgestrahlt wird.
Das nach allen Richtungen
gleichverteilt abgestrahlte
Licht trifft in seiner Folge-Wanderung
auf starke
Brechungsindexübergänge, an
denen es zur Lichtbrechung
bzw. -reflexion und
-totalreflexion kommt.
In the fluorescent medium, luminescence is excited by electromagnetic radiation in such a way that photons collide with luminescent particles, excite them to luminescence, and the resulting light is emitted evenly distributed in all directions.
In its subsequent migration, the light emitted evenly distributed in all directions encounters strong refractive index transitions at which light refraction or reflection and total reflection occur.
Das Medium ist an allen seinen
Kanten so bearbeitet, daß die
günstigste Totalreflexion nach
innen ermöglicht wird.
Infolge vieler Fluoreszens-
Emissions-Strahlung kommt es 90
Grad zur Lichteinfallsrichtung
entlang der Dicke des Mediums
zu einer Lichtsammelwirkung.
Mit einem Lichtkopplungsmittel
ist das Medium mit einem
weiteren optischen Medium 3
(Abb. 1) verbunden, welches den
Teil des Lichtes herausfiltert,
der nicht durch Fluoreszens
umgewandelt sondern durch
kleinste
Oberflächenunebenheiten,
Fremdpartikel oder Bläschen im
Medium 2 (Abb. 1) zur Seite
hinausgestreut wird.
In der Folge leitet das Medium
3 (Abb. 1) nur
Fluoreszensemissionslicht auf
einen, in einem Gehäuseteil
untergebrachten
Halbleiterphotoempfänger zur
Umwandlung in ein elektrisches
Signal.The medium is machined on all its edges so that the cheapest total internal reflection is possible.
As a result of many fluorescent emission radiation, there is a light collection effect 90 degrees to the direction of light incidence along the thickness of the medium.
With a light coupling medium, the medium is connected to another optical medium 3 ( Fig. 1), which filters out the part of the light that is not converted by fluorescence but scattered to the side by the smallest surface irregularities, foreign particles or bubbles in the medium 2 ( Fig. 1) becomes.
As a result, the medium 3 ( Fig. 1) only conducts fluorescence emission light onto a semiconductor photo receiver housed in a housing part for conversion into an electrical signal.
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4243421A DE4243421A1 (en) | 1992-12-16 | 1992-12-16 | Opto-electronic component for measuring limited region of ultraviolet radiation - contains fluorescent medium stimulated by ultraviolet, optical and filtering arrangement ensuring narrow spectral stimulation region |
DE9218786U DE9218786U1 (en) | 1992-12-16 | 1992-12-16 | Optoelectronic component for measuring narrowly limited areas of ultraviolet radiation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4243421A DE4243421A1 (en) | 1992-12-16 | 1992-12-16 | Opto-electronic component for measuring limited region of ultraviolet radiation - contains fluorescent medium stimulated by ultraviolet, optical and filtering arrangement ensuring narrow spectral stimulation region |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4243421A1 true DE4243421A1 (en) | 1993-07-29 |
Family
ID=6476068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4243421A Ceased DE4243421A1 (en) | 1992-12-16 | 1992-12-16 | Opto-electronic component for measuring limited region of ultraviolet radiation - contains fluorescent medium stimulated by ultraviolet, optical and filtering arrangement ensuring narrow spectral stimulation region |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE4243421A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997016707A1 (en) * | 1995-10-31 | 1997-05-09 | Advanced Systems Ltd. | Ultraviolet sensing apparatus |
JP3463135B2 (en) | 1998-08-20 | 2003-11-05 | オムロン株式会社 | UV detector |
DE10253874A1 (en) * | 2002-11-12 | 2004-05-27 | Carl Zeiss Smt Ag | Method for forming optical functional component for adjusting micro lithographic projection illumination installations, using charge coupled device (CCD) camera |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3838282A (en) * | 1972-04-25 | 1974-09-24 | Nat Res Dev | Sensors |
DE2529978A1 (en) * | 1974-07-05 | 1976-02-05 | Hitachi Ltd | SEMICONDUCTOR PHOTODETECTOR |
DE2512327B2 (en) * | 1974-03-22 | 1979-04-19 | Nippon Kogaku K.K., Tokio | Photoelectric semiconductor device |
GB2034971A (en) * | 1978-10-06 | 1980-06-11 | Recognition Equipment Inc | Multi-spectrum photosensitive devices |
DE3012523A1 (en) * | 1979-07-03 | 1981-01-08 | Pentacon Dresden Veb | Radiation-sensitive semiconductor element - embedded under filter glass disc in transparent plastic |
GB1590865A (en) * | 1976-10-14 | 1981-06-10 | Siemens Ag | Photo-detector devices |
WO1988004414A1 (en) * | 1986-12-08 | 1988-06-16 | The General Electric Company, P.L.C. | Radiation meters |
EP0290167A2 (en) * | 1987-05-02 | 1988-11-09 | Thomas Swan And Co., Ltd. | Improvements in or relating to the detection of ultraviolet radiation |
EP0324944A1 (en) * | 1987-12-28 | 1989-07-26 | Kernforschungszentrum Karlsruhe Gmbh | Fluorescent glass dosimeter |
EP0333424A2 (en) * | 1988-03-14 | 1989-09-20 | J.D.S. Enterprises, Inc. | Suntanning gauge |
WO1990010201A1 (en) * | 1989-02-24 | 1990-09-07 | Saitek Limited | Sun exposure monitoring device |
DE4041299A1 (en) * | 1990-07-04 | 1992-01-16 | Pioneer Electronic Corp | UV RAY DETECTING DEVICE |
-
1992
- 1992-12-16 DE DE4243421A patent/DE4243421A1/en not_active Ceased
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3838282A (en) * | 1972-04-25 | 1974-09-24 | Nat Res Dev | Sensors |
DE2512327B2 (en) * | 1974-03-22 | 1979-04-19 | Nippon Kogaku K.K., Tokio | Photoelectric semiconductor device |
DE2529978A1 (en) * | 1974-07-05 | 1976-02-05 | Hitachi Ltd | SEMICONDUCTOR PHOTODETECTOR |
GB1590865A (en) * | 1976-10-14 | 1981-06-10 | Siemens Ag | Photo-detector devices |
GB2034971A (en) * | 1978-10-06 | 1980-06-11 | Recognition Equipment Inc | Multi-spectrum photosensitive devices |
DE3012523A1 (en) * | 1979-07-03 | 1981-01-08 | Pentacon Dresden Veb | Radiation-sensitive semiconductor element - embedded under filter glass disc in transparent plastic |
WO1988004414A1 (en) * | 1986-12-08 | 1988-06-16 | The General Electric Company, P.L.C. | Radiation meters |
EP0290167A2 (en) * | 1987-05-02 | 1988-11-09 | Thomas Swan And Co., Ltd. | Improvements in or relating to the detection of ultraviolet radiation |
EP0324944A1 (en) * | 1987-12-28 | 1989-07-26 | Kernforschungszentrum Karlsruhe Gmbh | Fluorescent glass dosimeter |
EP0333424A2 (en) * | 1988-03-14 | 1989-09-20 | J.D.S. Enterprises, Inc. | Suntanning gauge |
WO1990010201A1 (en) * | 1989-02-24 | 1990-09-07 | Saitek Limited | Sun exposure monitoring device |
DE4041299A1 (en) * | 1990-07-04 | 1992-01-16 | Pioneer Electronic Corp | UV RAY DETECTING DEVICE |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997016707A1 (en) * | 1995-10-31 | 1997-05-09 | Advanced Systems Ltd. | Ultraviolet sensing apparatus |
JP3463135B2 (en) | 1998-08-20 | 2003-11-05 | オムロン株式会社 | UV detector |
DE10253874A1 (en) * | 2002-11-12 | 2004-05-27 | Carl Zeiss Smt Ag | Method for forming optical functional component for adjusting micro lithographic projection illumination installations, using charge coupled device (CCD) camera |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OAV | Applicant agreed to the publication of the unexamined application as to paragraph 31 lit. 2 z1 | ||
OP8 | Request for examination as to paragraph 44 patent law | ||
8122 | Nonbinding interest in granting licences declared | ||
8181 | Inventor (new situation) |
Free format text: DELEKER, HENRY, DIPL.-ING., O-1272 NEUENHAGEN, DE ADLER, FRANK, DIPL.-PHYS., O-1092 BERLIN, DE TUERK, GERHARD, DIPL.-PHYS., O-1017 BERLIN, DE |
|
8131 | Rejection |