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DE4040328A1 - Gas measurement with semiconductor sensor - Google Patents

Gas measurement with semiconductor sensor

Info

Publication number
DE4040328A1
DE4040328A1 DE19904040328 DE4040328A DE4040328A1 DE 4040328 A1 DE4040328 A1 DE 4040328A1 DE 19904040328 DE19904040328 DE 19904040328 DE 4040328 A DE4040328 A DE 4040328A DE 4040328 A1 DE4040328 A1 DE 4040328A1
Authority
DE
Germany
Prior art keywords
sensor
gas
gas measurement
coil
semiconductor sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19904040328
Other languages
German (de)
Inventor
Hanns Rump
Claus-Dieter Prof Kohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rump Elektronik Tech
Original Assignee
Rump Elektronik Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rump Elektronik Tech filed Critical Rump Elektronik Tech
Priority to DE19904040328 priority Critical patent/DE4040328A1/en
Priority to DE19904040329 priority patent/DE4040329C2/en
Priority to EP19910120045 priority patent/EP0488102A3/en
Publication of DE4040328A1 publication Critical patent/DE4040328A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Gas measurement involves measuring the temp. of a semiconductor sensor element, the conductivity of resistance of which is influenced by the gas to be measured. The novelty is that the process involves influencing the temp. and/or conductivity or resistance and/or covering of the sensor with gas by chemical action and/or detecting these as measured dimension. A phthalocyanine sensor is used for analysis of NOx in air. Other suitable sensors consist of Cu or Pb phthalocyanine or another semiconductor, e.g. Sn02, on a substrate of Si or A1203.

Description

Es ist bekannt, daß beheizte Phthalocyaninschichten ihren Leitwert bei Anwesenheit von NOx verändern.It is known that heated phthalocyanine layers are their Change the conductivity in the presence of NOx.

In einigen Fällen ist es gewünscht, absolute Abwesenheit von NOx zu erzeugen. Dieses Ziel kann erreicht werden, indem dem Sensor ein Platin-Wendel vorgeschaltet wird. Am Übergangs­ metall wird NOx zerlegt und kann den Sensor nicht mehr beeinflussen.In some cases it is desirable to be absent from absolute To generate NOx. This goal can be achieved by Sensor is connected upstream of a platinum coil. At the transition metal is broken down into NOx and can no longer use the sensor influence.

Es ist bekannt, Phthalocyaninsensoren (PC-Sensoren) zum Nachweis von Halogenen (z. B. Cl2) oder von HKW (z. B. dem Narkosegas Halothan) zu verwenden.It is known to use phthalocyanine sensors (PC sensors) for the detection of halogens (e.g. Cl 2 ) or HKW (e.g. the anesthetic gas halothane).

Zur Aufspaltung von HKWs sind sehr hohe Temperaturen erfor­ derlich, z. B. 900°C.Very high temperatures are required to split HKWs derlich, z. B. 900 ° C.

Dabei nimmt der Leitwert eines 0,1 mm Pt-Drahtes in 100 Stunden um 40% ab und brennt schließlich durch.The conductance of a 0.1 mm Pt wire in 100 Hours by 40% and finally burns out.

Erfindungsgemäß wird daher vorgeschlagen, den Pt-Draht mit Oxiden nicht-edler Metalle zu beschichten.According to the invention, it is therefore proposed to use the Pt wire Coating oxides of non-noble metals.

TiO2 oder SnO2 verhindert wirkungsvoll die Adsorbtion von Halogenen auf der Pt-Oberfläche.TiO 2 or SnO 2 effectively prevents the adsorption of halogens on the Pt surface.

Die Beschichtung wird herausgestellt, indem man den Pt-Draht in eine Aufschlämmung von TiO2 taucht und dann tempert. Der Leitwert eines so beschichteten Wendels nimmt innerhalb von 100 Stunden um weniger als 3% ab. Eine Lebensdauer von < 1000 Stunden ist anzunehmen.The coating is highlighted by immersing the Pt wire in a slurry of TiO 2 and then annealing. The conductance of a coil coated in this way decreases by less than 3% within 100 hours. A lifespan of <1000 hours can be assumed.

Ebenfalls wird vorgeschlagen, Pt durch Bedampfen oder Sputtern mit Ti oder Sn zu beschichten. Beim Heizen in Luft entstehen TiO2 oder SnO2 durch Oxidation dann von allein.It is also proposed to coat Pt with Ti or Sn by vapor deposition or sputtering. When heated in air, TiO 2 or SnO 2 are then created by oxidation.

Werden solche als "Cracker" bezeichneten Wendel vor einem PC-Sensor angeordnet, werden bei bestimmten Temperaturen komplexe Verbindungen zerlegt, wobei die Reaktionsprodukte sich vom PC-Sensor nachweisen lassen. Are such a "cracker" spiral in front of one PC sensor are arranged at certain temperatures complex compounds disassembled, the reaction products can be verified by the PC sensor.  

Erfindungsgemäß wird vorgeschlagen, TiO2 oder SnO2 beschich­ tete Pt-Wendel PC-Sensoren vorzuschalten, um Halogene, halogenisierte Kohlenwasserstoffe, Perchlorethylen als auch verschiedene Herbizide, Insektizide als auch chemische Kampfstoffe nachweisen zu können.According to the invention it is proposed to connect TiO 2 or SnO 2 coated Pt coil PC sensors in order to be able to detect halogens, halogenated hydrocarbons, perchlorethylene and various herbicides, insecticides and chemical warfare agents.

Dem jeweiligen Zielgas ist eine spezifische Wendel-Tempera­ tur zuzuordnen.The respective target gas has a specific Wendel tempera assign.

Fig. 1 gibt den erfindungsgemäßen Gedanken im Prinzip wieder:
In einer Reaktionskammer (1) befindet sich eine Zuström­ öffnung (4) und eine Abströmöffnung (5). Die zugeführte Luft führt über einen beschichteten Pt-Wendel (2) zu dem PC- Sensor (3). FIG. 1 shows the inventive idea in principle again:
In a reaction chamber ( 1 ) there is an inflow opening ( 4 ) and an outflow opening ( 5 ). The supplied air leads to the PC sensor ( 3 ) via a coated Pt coil ( 2 ).

Claims (3)

1. Detektion komplexer gasförmiger Verbindung, wobei diese an einem beheizten Platinwendel aufgespalten werden, dadurch gekennzeichnet, daß der Platinwendel mit einer Oxidschicht nicht-edler Metalle bedeckt ist.1. Detection of complex gaseous compounds, which are split on a heated platinum coil, characterized in that the platinum coil is covered with an oxide layer of non-noble metals. 2. Detektion komplexer gasförmiger Verbindungen, wobei diese an einem beheizten Platinwendel ausgespalten werden, dadurch gekennzeichnet, daß als Oxidschicht TiO2 oder SnO2 eingesetzt wird.2. Detection of complex gaseous compounds, these being split off on a heated platinum coil, characterized in that TiO 2 or SnO 2 is used as the oxide layer. 3. Detektion komplexer gasförmiger Verbindungen, wobei diese an einem beheizten Platinwendel aufgespalten werden, dadurch gekennzeichnet, daß die Temperatur des so beschichteten Pt-Wendels spezi­ fisch auf das zu findende Zielgas eingestellt wird.3. Detection of complex gaseous compounds, these split on a heated platinum coil, characterized, that the temperature of the Pt coil coated in this way speci fish is set to the target gas to be found.
DE19904040328 1990-11-24 1990-12-17 Gas measurement with semiconductor sensor Withdrawn DE4040328A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19904040328 DE4040328A1 (en) 1990-12-17 1990-12-17 Gas measurement with semiconductor sensor
DE19904040329 DE4040329C2 (en) 1990-12-17 1990-12-17 Method and sensor for the detection of NOx in complex gas mixtures
EP19910120045 EP0488102A3 (en) 1990-11-24 1991-11-25 Method and apparatus for measuring gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19904040328 DE4040328A1 (en) 1990-12-17 1990-12-17 Gas measurement with semiconductor sensor

Publications (1)

Publication Number Publication Date
DE4040328A1 true DE4040328A1 (en) 1992-06-25

Family

ID=6420567

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19904040328 Withdrawn DE4040328A1 (en) 1990-11-24 1990-12-17 Gas measurement with semiconductor sensor

Country Status (1)

Country Link
DE (1) DE4040328A1 (en)

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