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DE3934968A1 - Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance - Google Patents

Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance

Info

Publication number
DE3934968A1
DE3934968A1 DE3934968A DE3934968A DE3934968A1 DE 3934968 A1 DE3934968 A1 DE 3934968A1 DE 3934968 A DE3934968 A DE 3934968A DE 3934968 A DE3934968 A DE 3934968A DE 3934968 A1 DE3934968 A1 DE 3934968A1
Authority
DE
Germany
Prior art keywords
layers
piezo
drive
piezo drive
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE3934968A
Other languages
German (de)
Inventor
Hartmut Dipl Ing Hoffmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Collins Deutschland GmbH
Original Assignee
Teldix GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teldix GmbH filed Critical Teldix GmbH
Priority to DE3934968A priority Critical patent/DE3934968A1/en
Publication of DE3934968A1 publication Critical patent/DE3934968A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Landscapes

  • Gyroscopes (AREA)

Abstract

A piezo-drive is made up of several layers (1,2) that are stuck together, where either all the layers (1,2) consist of a piezo-ceramic material or with one or several layers (1,2) being metallic. Between the individual layers (1,2) is fitted a separating piece (4) ensuring that the distance between the layers (1,2) remains constant and independent of the consistence and the thickness of the adhesive (3). USE/ADVANTAGE - Piezo-drive is specifically aimed at axial movements or angular positioning of mirror in laser-gyroscopes and exerts constant force over complete surface.

Description

Die Neuerung betrifft einen Piezoantrieb, der aus mehreren miteinander verkleb­ ten Schichten aufgebaut ist, die entweder alle aus piezokeramischem Material be­ stehen oder von denen eine oder mehrere Schichten metallisch sind.The innovation relates to a piezo drive that sticks together from several ten layers is built up, all of which are made of piezoceramic material stand or of which one or more layers are metallic.

Ein derartiger Piezoantrieb ist aus dem Gebrauchsmuster G 87 00 462 bekannt. Piezoantriebe werden beispielsweise zur gezielten axialen Bewegung oder Winkel­ verstellung der Spiegel in Laserkreiseln verwendet.Such a piezo drive is known from utility model G 87 00 462. Piezo drives are used, for example, for targeted axial movement or angles adjustment of the mirrors used in laser gyros.

Der Neuerung liegt die Aufgabe zugrunde, einen Piezoantrieb anzugeben, der eine definierte und über seine ganze Fläche gleichbleibende Kraft ausübt.The innovation is based on the task of specifying a piezo drive that has a defined and constant force over its entire area.

Diese Aufgabe wird durch die im Anspruch 1 angegebenen Merkmale gelöst. Vorteil­ hafte Ausgestaltungen der Neuerung gehen aus den Unteransprüchen hervor.This object is achieved by the features specified in claim 1. Advantage lofty developments of the innovation emerge from the subclaims.

Der gemäß der Neuerung verwendete Abstandhalter sorgt für einen unveränderbaren, über die gesamte Schichtenfläche gleichbleibenden Abstand. Somit ist die Kraft­ übertragung zwischen den einzelnen Schichten über die ganze Fläche des Piezoan­ triebs gleichbleibend konstant. Dem wirkt weder eine unterschiedliche Kleberkon­ sistenz noch eine unterschiedliche Auftragsdicke des Klebstoffes noch unter­ schiedliche Anpreßkräfte zwischen den Schichten entgegen.The spacer used according to the innovation ensures an unchangeable, constant distance over the entire layer area. So that's the power transmission between the individual layers over the entire area of the piezoan constantly constant. This is not affected by a different adhesive cone a different application thickness of the adhesive is still under different contact forces between the layers.

Anhand mehrerer in der Zeichnung dargestellter Ausführungsbeispiele wird nun die Neuerung näher erläutert.Based on several embodiments shown in the drawing, the Innovation explained in more detail.

Fig. 1 zeigt einen Querschnitt durch einen Piezoantrieb und Fig. 1 shows a cross section through a piezo drive and

Fig. 2, 3, 4 zeigen verschiedene Varianten von Abstandhaltern. Fig. 2, 3, 4 show different variants of spacers.

Der Fig. 1 sind zwei miteinander verklebte Schichten 1 und 2 eines Piezoan­ triebs zu entnehmen. Beide Schichten 1, 2 bestehen entweder aus einem piezokera­ mischen Material, oder eine der beiden Schichten 1, 2 ist metallisch, beispiels­ weise eine Elektrode des Piezoantriebs. Ein zwischen die beiden Schichten 1 und 2 eingefügter Abstandhalter 4 sorgt für eine gleichbleibende Distanz der beiden Schichten unabhängig von der Konsistenz und der Auftragsdicke des zwischen die beiden Schichten eingebrachten Klebstoffs 3.Of FIG. 1 are shown two bonded together layers 1 and 2 of a Piezoan drive. Both layers 1 , 2 either consist of a piezoceramic material, or one of the two layers 1 , 2 is metallic, for example an electrode of the piezo drive. A spacer 4 inserted between the two layers 1 and 2 ensures a constant distance between the two layers, irrespective of the consistency and the thickness of the adhesive 3 applied between the two layers.

In den Fig. 2, 3 und 4 sind verschiedene Ausführungsformen eines Abstandhal­ ters dargestellt. Die in den Fig. 2, 3 und 4 eingezeichnete strichlierte Um­ randung deutet jeweils die mit Klebstoff versehene Schichtenfläche an. Die Fig. 2 zeigt einen Abstandhalter, der ein aus einem Metall oder Kunststoffgewebe aus­ geschnittenes Formteil 6 ist. Der in Fig. 3 dargestellte Abstandhalter ist ein Draht 7, der in Bond-Technik auf den jeweiligen piezokeramischen bzw. metalli­ schen Schichten aufgebracht werden kann. Als Abstandhalter kann auch direkt auf die piezokeramischen bzw. metallischen Schichten eine Struktur 8 durch Bedamp­ fen, galvanischen Auftrag oder durch Siebdruck aufgebracht werden. Die Fig. 2, 3 und 4 machen deutlich, daß die Abstandhalter unterschiedlichste Formen ha­ ben können. Bei der Formgebung der Abstandhalter 6, 7, 8 ist darauf zu achten, daß ein konstanter Abstand über die gesamte Schichtenfläche gewährleistet ist.In Figs. 2, 3 and 4 different embodiments of an Abstandhal are shown ters. The dashed border shown in FIGS . 2, 3 and 4 indicates the layer surface provided with adhesive in each case. FIG. 2 shows a spacer, which is a molded part 6 cut from a metal or plastic fabric. The spacer shown in Fig. 3 is a wire 7 which can be applied to the respective piezoceramic or metallic layers using bonding technology. As a spacer, a structure 8 can also be applied directly to the piezoceramic or metallic layers by vapor deposition, galvanic application or by screen printing. Figs. 2, 3 and 4 make it clear that the spacers can ben ha different forms. When shaping the spacers 6 , 7 , 8 , care must be taken to ensure that a constant distance is ensured over the entire layer surface.

Claims (7)

1. Piezoantrieb, der aus mehreren miteinander verklebten Schichten aufgebaut ist, die entweder alle aus piezokeramischem Material bestehen oder von denen eine oder mehrere Schichten metallisch sind, dadurch gekennzeichnet, daß zwischen den einzelnen Schichten (1, 2) ein Abstandhalter (4, 6, 7, 8) eingefügt ist.1. Piezo drive, which is constructed from several layers bonded together, which either all consist of piezoceramic material or of which one or more layers are metallic, characterized in that between the individual layers ( 1 , 2 ) a spacer ( 4 , 6 , 7 , 8 ) is inserted. 2. Piezoantrieb nach Anspruch 1, dadurch gekennzeichnet, daß der Abstandhalter ein aus einem Metall- oder Kunststoffgewebe hergestelltes Formteil (6) ist.2. Piezo drive according to claim 1, characterized in that the spacer is a molded part made of a metal or plastic fabric ( 6 ). 3. Piezoantrieb nach Anspruch 1, dadurch gekennzeichnet, daß der Abstandhalter ein Draht (7) ist, der so zwischen zwei Schichten (1, 2) geführt ist, daß sich überall ein gleich großer Abstand zwischen ihnen ergibt.3. Piezo drive according to claim 1, characterized in that the spacer is a wire ( 7 ) which is guided between two layers ( 1 , 2 ) that there is an equal distance between them everywhere. 4. Piezoantrieb nach Anspruch 1, dadurch gekennzeichnet, daß direkt auf die piezokeramischen und/oder metallischen Schichten eine Metallstruktur (8) konstanter Dicke aufgebracht ist.4. Piezo drive according to claim 1, characterized in that a metal structure ( 8 ) of constant thickness is applied directly to the piezoceramic and / or metallic layers. 5. Piezoantrieb nach Anspruch 4, dadurch gekennzeichnet, daß die Metallstruktur durch Bedampfen aufgebracht ist.5. Piezo drive according to claim 4, characterized in that the metal structure is applied by vapor deposition. 6. Piezoantrieb nach Anspruch 4, dadurch gekennzeichnet, daß die Metallstruktur galvanisch aufgebracht ist.6. Piezo drive according to claim 4, characterized in that the metal structure is applied galvanically. 7. Piezoantrieb nach Anspruch 4, dadurch gekennzeichnet, daß die Metallstruktur durch Siebdruck aufgebracht ist.7. Piezo drive according to claim 4, characterized in that the metal structure is applied by screen printing.
DE3934968A 1988-12-23 1989-10-20 Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance Withdrawn DE3934968A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3934968A DE3934968A1 (en) 1988-12-23 1989-10-20 Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3843527 1988-12-23
DE3934968A DE3934968A1 (en) 1988-12-23 1989-10-20 Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance

Publications (1)

Publication Number Publication Date
DE3934968A1 true DE3934968A1 (en) 1990-07-05

Family

ID=25875559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3934968A Withdrawn DE3934968A1 (en) 1988-12-23 1989-10-20 Piezo-drive for axial movement or for mirrors in laser gyroscope - has layers of piezoelectric material or of metal which are glued together at constant distance

Country Status (1)

Country Link
DE (1) DE3934968A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4302457A1 (en) * 1993-01-29 1994-08-04 Schlattl Werner Bavaria Tech Spot-welding electrode holder and actuator unit

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2900609A1 (en) * 1978-01-09 1979-07-12 Singer Co PIEZOELECTRIC ACTUATOR
DE3032997A1 (en) * 1979-09-12 1981-04-02 Litton Systems, Inc., Beverly Hills, Calif. CONTROLLABLE MIRROR
DE3040563A1 (en) * 1980-10-28 1982-05-27 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY ACTUATED ACTUATOR
DE3227451A1 (en) * 1981-07-24 1983-02-24 Litton Systems, Inc., 90210 Beverly Hills, Calif. PIEZOELECTRIC CONVERTER WITH INTEGRATED DRIVER STAGE AND SENSOR
US4438364A (en) * 1981-07-13 1984-03-20 The Garrett Corporation Piezoelectric actuator
US4653918A (en) * 1983-04-18 1987-03-31 Sundstrand Corporation Low Q body-dithered laser gyro assembly
DE8700462U1 (en) * 1987-01-10 1987-04-23 Teldix Gmbh, 6900 Heidelberg Translatory piezo drive

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2900609A1 (en) * 1978-01-09 1979-07-12 Singer Co PIEZOELECTRIC ACTUATOR
DE3032997A1 (en) * 1979-09-12 1981-04-02 Litton Systems, Inc., Beverly Hills, Calif. CONTROLLABLE MIRROR
DE3040563A1 (en) * 1980-10-28 1982-05-27 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY ACTUATED ACTUATOR
US4438364A (en) * 1981-07-13 1984-03-20 The Garrett Corporation Piezoelectric actuator
DE3227451A1 (en) * 1981-07-24 1983-02-24 Litton Systems, Inc., 90210 Beverly Hills, Calif. PIEZOELECTRIC CONVERTER WITH INTEGRATED DRIVER STAGE AND SENSOR
US4653918A (en) * 1983-04-18 1987-03-31 Sundstrand Corporation Low Q body-dithered laser gyro assembly
DE8700462U1 (en) * 1987-01-10 1987-04-23 Teldix Gmbh, 6900 Heidelberg Translatory piezo drive

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4302457A1 (en) * 1993-01-29 1994-08-04 Schlattl Werner Bavaria Tech Spot-welding electrode holder and actuator unit

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8139 Disposal/non-payment of the annual fee