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DE3890693T1 - METHOD FOR REGULATING THE OUTPUT OF AN EXCIMER LASER DEVICE - Google Patents

METHOD FOR REGULATING THE OUTPUT OF AN EXCIMER LASER DEVICE

Info

Publication number
DE3890693T1
DE3890693T1 DE19883890693 DE3890693T DE3890693T1 DE 3890693 T1 DE3890693 T1 DE 3890693T1 DE 19883890693 DE19883890693 DE 19883890693 DE 3890693 T DE3890693 T DE 3890693T DE 3890693 T1 DE3890693 T1 DE 3890693T1
Authority
DE
Germany
Prior art keywords
regulating
output
laser device
excimer laser
excimer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19883890693
Other languages
German (de)
Inventor
Osamu Wakabayashi
Noritoshi Ito
Masahiko Kowaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62210821A external-priority patent/JP2649357B2/en
Priority claimed from JP62214398A external-priority patent/JPS6457774A/en
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority claimed from PCT/JP1988/000841 external-priority patent/WO1989002175A1/en
Publication of DE3890693T1 publication Critical patent/DE3890693T1/en
Withdrawn legal-status Critical Current

Links

DE19883890693 1987-08-25 1988-08-25 METHOD FOR REGULATING THE OUTPUT OF AN EXCIMER LASER DEVICE Withdrawn DE3890693T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62210821A JP2649357B2 (en) 1987-08-25 1987-08-25 Excimer laser wavelength controller
JP62214398A JPS6457774A (en) 1987-08-28 1987-08-28 Controlling method for output of excimer laser
PCT/JP1988/000841 WO1989002175A1 (en) 1987-08-25 1988-08-25 Device for controlling the output of excimer laser

Publications (1)

Publication Number Publication Date
DE3890693T1 true DE3890693T1 (en) 1990-07-19

Family

ID=27305689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883890693 Withdrawn DE3890693T1 (en) 1987-08-25 1988-08-25 METHOD FOR REGULATING THE OUTPUT OF AN EXCIMER LASER DEVICE

Country Status (1)

Country Link
DE (1) DE3890693T1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3935081A1 (en) * 1988-10-20 1990-04-26 Mitsubishi Electric Corp LASER DEVICE AND METHOD FOR CONTROL

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3935081A1 (en) * 1988-10-20 1990-04-26 Mitsubishi Electric Corp LASER DEVICE AND METHOD FOR CONTROL

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Legal Events

Date Code Title Description
8170 Reinstatement of the former position
8139 Disposal/non-payment of the annual fee