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DE3887149D1 - Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb. - Google Patents

Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb.

Info

Publication number
DE3887149D1
DE3887149D1 DE88117650T DE3887149T DE3887149D1 DE 3887149 D1 DE3887149 D1 DE 3887149D1 DE 88117650 T DE88117650 T DE 88117650T DE 3887149 T DE3887149 T DE 3887149T DE 3887149 D1 DE3887149 D1 DE 3887149D1
Authority
DE
Germany
Prior art keywords
twin
vacuum pump
shaft vacuum
shaft
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88117650T
Other languages
English (en)
Inventor
Hanns-Peter Dr Berges
Wolfgang Leier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3887149D1 publication Critical patent/DE3887149D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE88117650T 1988-10-24 1988-10-24 Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb. Expired - Fee Related DE3887149D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88117650A EP0370117B1 (de) 1988-10-24 1988-10-24 Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb

Publications (1)

Publication Number Publication Date
DE3887149D1 true DE3887149D1 (de) 1994-02-24

Family

ID=8199480

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88117650T Expired - Fee Related DE3887149D1 (de) 1988-10-24 1988-10-24 Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb.

Country Status (4)

Country Link
US (1) US5049050A (de)
EP (1) EP0370117B1 (de)
JP (1) JP2755733B2 (de)
DE (1) DE3887149D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4038704C2 (de) * 1990-12-05 1996-10-10 K Busch Gmbh Druck & Vakuum Dr Drehkolbenpumpe
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
DE19819538C2 (de) 1998-04-30 2000-02-17 Rietschle Werner Gmbh & Co Kg Druck-Saug-Pumpe
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
DE202014007117U1 (de) 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
CN109654018A (zh) * 2019-01-04 2019-04-19 上海伊莱茨真空技术有限公司 一种超大型罗茨真空泵端盖水隔套

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1915269A1 (de) * 1969-03-26 1970-10-08 Siemens Ag Roots-Geblaese
SE351012B (de) * 1970-10-01 1972-11-13 Atlas Copco Ab
GB2111126A (en) * 1981-12-09 1983-06-29 British Oxygen Co Ltd Rotary positive-displacement fluid-machines
JPS60256584A (ja) * 1984-05-30 1985-12-18 Honjiyou Chem Kk 高真空装置
JPS62157289A (ja) * 1985-12-29 1987-07-13 Anretsuto:Kk 高真空用ル−ツブロワ−
GB8625337D0 (en) * 1986-10-22 1986-11-26 Utile Eng Co Ltd Pumps
EP0409287B1 (de) * 1987-05-15 1994-04-06 Leybold Aktiengesellschaft Vakuumpumpe mit Schöpfraum

Also Published As

Publication number Publication date
JPH02153291A (ja) 1990-06-12
EP0370117A1 (de) 1990-05-30
EP0370117B1 (de) 1994-01-12
US5049050A (en) 1991-09-17
JP2755733B2 (ja) 1998-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee