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DE3852355D1 - Verfahren und Vorrichtung zur Oberflächenbehandlung. - Google Patents

Verfahren und Vorrichtung zur Oberflächenbehandlung.

Info

Publication number
DE3852355D1
DE3852355D1 DE3852355T DE3852355T DE3852355D1 DE 3852355 D1 DE3852355 D1 DE 3852355D1 DE 3852355 T DE3852355 T DE 3852355T DE 3852355 T DE3852355 T DE 3852355T DE 3852355 D1 DE3852355 D1 DE 3852355D1
Authority
DE
Germany
Prior art keywords
surface treatment
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852355T
Other languages
English (en)
Other versions
DE3852355T2 (de
Inventor
Tohru Arai
Hiromasa Narumi-Shataku Takeda
Hiroyuki Nagakute-Ryo Kawaura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Publication of DE3852355D1 publication Critical patent/DE3852355D1/de
Application granted granted Critical
Publication of DE3852355T2 publication Critical patent/DE3852355T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/442—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
DE3852355T 1987-08-12 1988-08-04 Verfahren und Vorrichtung zur Oberflächenbehandlung. Expired - Fee Related DE3852355T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201330A JPS6447844A (en) 1987-08-12 1987-08-12 Method and apparatus for treating surface

Publications (2)

Publication Number Publication Date
DE3852355D1 true DE3852355D1 (de) 1995-01-19
DE3852355T2 DE3852355T2 (de) 1995-04-27

Family

ID=16439225

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852355T Expired - Fee Related DE3852355T2 (de) 1987-08-12 1988-08-04 Verfahren und Vorrichtung zur Oberflächenbehandlung.

Country Status (10)

Country Link
US (1) US4892759A (de)
EP (1) EP0303191B1 (de)
JP (1) JPS6447844A (de)
KR (1) KR920004849B1 (de)
CN (1) CN1013208B (de)
AU (1) AU610922B2 (de)
CA (1) CA1336150C (de)
DE (1) DE3852355T2 (de)
ES (1) ES2069538T3 (de)
IN (1) IN171675B (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227195A (en) * 1989-04-04 1993-07-13 Sri International Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates
EP0471276B1 (de) * 1990-08-10 1996-02-28 Kabushiki Kaisha Toyota Chuo Kenkyusho Verfahren zur Herstellung eines Überzugs aus Nitrid oder Karbonitrid
US5171734A (en) * 1991-04-22 1992-12-15 Sri International Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition
JP3189507B2 (ja) * 1992-06-30 2001-07-16 株式会社豊田中央研究所 表面処理装置
US6093303A (en) 1998-08-12 2000-07-25 Swagelok Company Low temperature case hardening processes
US6165597A (en) * 1998-08-12 2000-12-26 Swagelok Company Selective case hardening processes at low temperature
EP1165852A4 (de) * 1999-02-08 2003-05-02 Quality Heat Technologies Pty Oberflächenbehandlungsverfahren und -vorrichtung
US6547888B1 (en) 2000-01-28 2003-04-15 Swagelok Company Modified low temperature case hardening processes
DE60138383D1 (de) 2000-06-29 2009-05-28 Borgwarner Inc Verfahren zur herstellung eines mit karbid beschichteten stahlkörpers
AU2010236044B2 (en) * 2005-07-21 2012-09-27 Hard Technologies Pty Ltd Duplex Surface Treatment of Metal Objects
JP4977700B2 (ja) 2005-07-21 2012-07-18 ハード テクノロジーズ プロプライエタリー リミテッド 金属物の複合表面処理
CN102165087B (zh) * 2008-10-16 2013-11-27 博格华纳公司 第5族金属源碳化物涂覆的钢质物品及其制造方法
ES2342708B2 (es) * 2010-02-09 2011-01-27 Asociacion De La Industria Navarra Ain Procedimiento para la fabricacion de recubrimientos ceramicos para baldosas y baldosa asi obtenida.
US20140312030A1 (en) * 2013-04-23 2014-10-23 Paul D. Steneck Microwave heat treatment apparatus and method
US20150125333A1 (en) * 2013-11-05 2015-05-07 Gerald J. Bruck Below surface laser processing of a fluidized bed
EP3085808B1 (de) * 2013-12-19 2019-03-20 Posco Erwärmungsvorrichtung und beschichtungsmaschine damit
KR20180137489A (ko) * 2016-03-08 2018-12-27 아캐넘 앨로이즈 인크. 금속 코팅을 위한 방법
CN111283215B (zh) * 2020-02-24 2021-06-11 北京科技大学 一种气-固流化制备无氧钝化钛及钛合金粉末制品的方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4461656A (en) * 1983-03-15 1984-07-24 Ross John A Low temperature hardening of the surface of a ferrous metal workpiece in a fluidized bed furnace
AU570799B2 (en) * 1984-05-17 1988-03-24 Toyota Chuo Kenkyusho K.K. Vapour phase coating of carbide in fluidised bed
JPS60251274A (ja) * 1984-05-28 1985-12-11 Toyota Central Res & Dev Lab Inc 窒化物被覆方法
JPS6156272A (ja) * 1984-08-27 1986-03-20 Toyota Motor Corp 流動層ガス浸炭方法とその装置
JPS61157672A (ja) * 1984-12-28 1986-07-17 Nissan Motor Co Ltd 熱処理方法
US4623400A (en) * 1985-02-22 1986-11-18 Procedyne Corp. Hard surface coatings for metals in fluidized beds
JPS6280258A (ja) * 1985-10-03 1987-04-13 Toyota Central Res & Dev Lab Inc 表面処理方法及びその装置
JPH0819514B2 (ja) * 1986-07-07 1996-02-28 株式会社豊田中央研究所 表面処理方法およびその装置
JP2584217B2 (ja) * 1986-11-18 1997-02-26 株式会社豊田中央研究所 表面処理方法

Also Published As

Publication number Publication date
EP0303191A2 (de) 1989-02-15
AU610922B2 (en) 1991-05-30
JPH0514787B2 (de) 1993-02-25
CN1031570A (zh) 1989-03-08
JPS6447844A (en) 1989-02-22
KR920004849B1 (ko) 1992-06-19
KR890003984A (ko) 1989-04-19
CA1336150C (en) 1995-07-04
EP0303191A3 (en) 1990-10-31
US4892759A (en) 1990-01-09
DE3852355T2 (de) 1995-04-27
AU2098788A (en) 1989-02-16
IN171675B (de) 1992-12-05
ES2069538T3 (es) 1995-05-16
CN1013208B (zh) 1991-07-17
EP0303191B1 (de) 1994-12-07

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee