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DE3773957D1 - Halbleitervorrichtung. - Google Patents

Halbleitervorrichtung.

Info

Publication number
DE3773957D1
DE3773957D1 DE8787102929T DE3773957T DE3773957D1 DE 3773957 D1 DE3773957 D1 DE 3773957D1 DE 8787102929 T DE8787102929 T DE 8787102929T DE 3773957 T DE3773957 T DE 3773957T DE 3773957 D1 DE3773957 D1 DE 3773957D1
Authority
DE
Germany
Prior art keywords
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787102929T
Other languages
English (en)
Inventor
Kenji Kobayashi
Masataka Kondo
Kazunori Tsuge
Yoshihisa Tawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Application granted granted Critical
Publication of DE3773957D1 publication Critical patent/DE3773957D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/17Photovoltaic cells having only PIN junction potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/162Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
    • H10F77/166Amorphous semiconductors
    • H10F77/1662Amorphous semiconductors including only Group IV materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells
DE8787102929T 1986-03-03 1987-03-02 Halbleitervorrichtung. Expired - Fee Related DE3773957D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61047122A JPH0656883B2 (ja) 1986-03-03 1986-03-03 半導体装置

Publications (1)

Publication Number Publication Date
DE3773957D1 true DE3773957D1 (de) 1991-11-28

Family

ID=12766350

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787102929T Expired - Fee Related DE3773957D1 (de) 1986-03-03 1987-03-02 Halbleitervorrichtung.

Country Status (5)

Country Link
US (1) US4941032A (de)
EP (1) EP0235785B1 (de)
JP (1) JPH0656883B2 (de)
AU (1) AU600472B2 (de)
DE (1) DE3773957D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036867A (ja) * 1989-06-05 1991-01-14 Mitsubishi Electric Corp 光発電素子の電極構造、形成方法、及びその製造装置
DE4023495A1 (de) * 1990-07-24 1992-01-30 Nukem Gmbh Elektronisches bauelement
US5500301A (en) * 1991-03-07 1996-03-19 Kabushiki Kaisha Kobe Seiko Sho A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
JP3061654B2 (ja) * 1991-04-23 2000-07-10 株式会社神戸製鋼所 液晶ディスプレイ用半導体装置材料及び液晶ディスプレイ用半導体装置材料製造用溶製スパッタリングターゲット材料
AU662360B2 (en) * 1991-10-22 1995-08-31 Canon Kabushiki Kaisha Photovoltaic device
JP2837302B2 (ja) * 1991-12-04 1998-12-16 シャープ株式会社 太陽電池
JP2733006B2 (ja) * 1993-07-27 1998-03-30 株式会社神戸製鋼所 半導体用電極及びその製造方法並びに半導体用電極膜形成用スパッタリングターゲット
JP3792281B2 (ja) * 1995-01-09 2006-07-05 株式会社半導体エネルギー研究所 太陽電池
EP1553205B1 (de) 1995-10-12 2017-01-25 Kabushiki Kaisha Toshiba Sputtertarget zur Dünnschicht-Leitungherstellung und Dünnschicht-Leitung
USRE45481E1 (en) * 1995-10-12 2015-04-21 Kabushiki Kaisha Toshiba Interconnector line of thin film, sputter target for forming the wiring film and electronic component using the same
US5986204A (en) * 1996-03-21 1999-11-16 Canon Kabushiki Kaisha Photovoltaic cell
JP3106956B2 (ja) * 1996-05-23 2000-11-06 住友化学工業株式会社 化合物半導体用電極材料
US6124205A (en) 1998-09-03 2000-09-26 Micron Technology, Inc. Contact/via force fill process
US6949464B1 (en) * 1998-09-03 2005-09-27 Micron Technology, Inc. Contact/via force fill techniques
FR2805395B1 (fr) * 2000-02-23 2002-05-10 Centre Nat Rech Scient Transistor mos pour circuits a haute densite d'integration
JP4117001B2 (ja) 2005-02-17 2008-07-09 株式会社神戸製鋼所 薄膜トランジスタ基板、表示デバイス、および表示デバイス用のスパッタリングターゲット
JP4948778B2 (ja) * 2005-03-30 2012-06-06 Tdk株式会社 太陽電池およびその色調整方法
WO2007102988A2 (en) * 2006-03-06 2007-09-13 Tosoh Smd, Inc. Electronic device, method of manufacture of same and sputtering target
US20090008786A1 (en) * 2006-03-06 2009-01-08 Tosoh Smd, Inc. Sputtering Target
WO2008047580A1 (en) * 2006-09-28 2008-04-24 Kyocera Corporation Solar battery element and method for manufacturing the same
KR20080069448A (ko) * 2007-01-23 2008-07-28 엘지전자 주식회사 측면결정화 공정을 이용한 고효율 광기전력 변환소자 모듈및 그의 제조방법
CN115394864A (zh) * 2022-03-11 2022-11-25 浙江爱旭太阳能科技有限公司 太阳能电池的导电接触结构、组件及发电系统

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4392010A (en) * 1979-01-16 1983-07-05 Solarex Corporation Photovoltaic cells having contacts and method of applying same
US4433004A (en) * 1979-07-11 1984-02-21 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor device and a method for manufacturing the same
US4375007A (en) * 1980-11-26 1983-02-22 E. I. Du Pont De Nemours & Co. Silicon solar cells with aluminum-magnesium alloy low resistance contacts
JPS57104184A (en) * 1980-12-19 1982-06-29 Nippon Electric Co Position display system
US4471376A (en) * 1981-01-14 1984-09-11 Harris Corporation Amorphous devices and interconnect system and method of fabrication
JPS5839072A (ja) * 1981-08-31 1983-03-07 Sanyo Electric Co Ltd 非晶質光半導体装置
JPS5898985A (ja) * 1981-12-09 1983-06-13 Seiko Epson Corp 薄膜太陽電池
IL67926A (en) * 1982-03-18 1986-04-29 Energy Conversion Devices Inc Photo-voltaic device with radiation reflector means
JPS58178573A (ja) * 1982-04-12 1983-10-19 Sanyo Electric Co Ltd 非晶質半導体装置
DE3242835A1 (de) * 1982-11-19 1984-05-24 Siemens AG, 1000 Berlin und 8000 München Solarzelle aus amorphem silizium
DE3244461A1 (de) * 1982-12-01 1984-06-07 Siemens AG, 1000 Berlin und 8000 München Integrierte halbleiterschaltung mit einer aus einer aluminium/silizium-legierung bestehenden kontaktleiterbahnebene
JPS59232456A (ja) * 1983-06-16 1984-12-27 Hitachi Ltd 薄膜回路素子
JPS6030183A (ja) * 1983-07-28 1985-02-15 Fuji Electric Corp Res & Dev Ltd 薄膜太陽電池
JPS6083382A (ja) * 1983-10-14 1985-05-11 Hitachi Ltd 半導体装置及びその製造方法
US4510344A (en) * 1983-12-19 1985-04-09 Atlantic Richfield Company Thin film solar cell substrate
JPS60140881A (ja) * 1983-12-28 1985-07-25 Hitachi Ltd 太陽電池の製造方法
JPS60147171A (ja) * 1984-01-12 1985-08-03 Hitachi Maxell Ltd 光起電力装置
JPS60239069A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 非晶質太陽電池
US4694317A (en) * 1984-10-22 1987-09-15 Fuji Photo Film Co., Ltd. Solid state imaging device and process for fabricating the same

Also Published As

Publication number Publication date
JPH0656883B2 (ja) 1994-07-27
JPS62203369A (ja) 1987-09-08
EP0235785B1 (de) 1991-10-23
EP0235785A3 (en) 1989-03-22
AU600472B2 (en) 1990-08-16
EP0235785A2 (de) 1987-09-09
US4941032A (en) 1990-07-10
AU6929887A (en) 1987-09-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee