DE3770760D1 - Probentraeger fuer ein spektralellipsometer mit hoher seitlicher aufloesung. - Google Patents

Probentraeger fuer ein spektralellipsometer mit hoher seitlicher aufloesung.

Info

Publication number: DE3770760D1
Authority: DE; Germany
Prior art keywords: spectralellipsometer; sample carrier; lateral resolution; high lateral; resolution
Prior art date: 1986-10-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE8787201919T

Other languages

English (en)

Inventor

Bris Jean Societe Civile S Le

Marko Societe Civile S P Erman

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Koninklijke Philips NV

Original Assignee

Philips Gloeilampenfabrieken NV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-10-10

Filing date

1987-10-07

Publication date

1991-07-18

1987-10-07 Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV

1991-07-18 Application granted granted Critical

1991-07-18 Publication of DE3770760D1 publication Critical patent/DE3770760D1/de

2007-10-08 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0339—Holders for solids, powders
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/178—Methods for obtaining spatial resolution of the property being measured
- G01N2021/1785—Three dimensional

Landscapes

Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)

DE8787201919T 1986-10-10 1987-10-07 Probentraeger fuer ein spektralellipsometer mit hoher seitlicher aufloesung. Expired - Lifetime DE3770760D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR8614124A FR2605106B1 (fr)	1986-10-10	1986-10-10	Porte-echantillon pour un ellipsometre spectroscopique a haute resolution laterale

Publications (1)

Publication Number	Publication Date
DE3770760D1 true DE3770760D1 (de)	1991-07-18

Family

ID=9339749

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8787201919T Expired - Lifetime DE3770760D1 (de)	1986-10-10	1987-10-07	Probentraeger fuer ein spektralellipsometer mit hoher seitlicher aufloesung.

Country Status (5)

Country	Link
US (1)	US4834539A (de)
EP (1)	EP0266814B1 (de)
JP (1)	JPH0692917B2 (de)
DE (1)	DE3770760D1 (de)
FR (1)	FR2605106B1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0374348U (de) *	1989-11-20	1991-07-25
US5166752A (en) *	1990-01-11	1992-11-24	Rudolph Research Corporation	Simultaneous multiple angle/multiple wavelength ellipsometer and method
JP2574720Y2 (ja) *	1990-10-15	1998-06-18	富士ゼロックス株式会社	傷検査用光学装置の位置調整装置
US5129724A (en) *	1991-01-29	1992-07-14	Wyko Corporation	Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
JPH06281567A (ja) *	1992-02-29	1994-10-07	New Oji Paper Co Ltd	複屈折測定装置
US6734967B1 (en) *	1995-01-19	2004-05-11	Kla-Tencor Technologies Corporation	Focused beam spectroscopic ellipsometry method and system
US5608526A (en) *	1995-01-19	1997-03-04	Tencor Instruments	Focused beam spectroscopic ellipsometry method and system
US5581350A (en) *	1995-06-06	1996-12-03	Tencor Instruments	Method and system for calibrating an ellipsometer
US5866900A (en) *	1996-01-05	1999-02-02	Raytheon Ti Systems, Inc.	Method and apparatus for calibrating a focal plane array of an image detector
JP4168543B2 (ja) *	1998-10-08	2008-10-22	株式会社ニコン	光学特性測定ユニット
US7230699B1 (en) *	2002-10-15	2007-06-12	J.A. Woollam Co., Inc.	Sample orientation system and method
US6642066B1 (en)	2002-05-15	2003-11-04	Advanced Micro Devices, Inc.	Integrated process for depositing layer of high-K dielectric with in-situ control of K value and thickness of high-K dielectric layer
US7978252B2 (en) *	2005-03-30	2011-07-12	Kyocera Corporation	Imaging apparatus, imaging system, and imaging method
EP3249351B1 (de) *	2015-01-23	2020-07-15	KYOCERA Corporation	Messvorrichtung und messverfahren
US10444140B1 (en) *	2019-03-18	2019-10-15	J.A. Woollam Co., Inc.	Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system
CN110044613B (zh) *	2019-04-18	2020-04-28	大连理工大学	基于轴盘的转子六自由度运动测试及其运动参数解耦方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2947214A (en) *	1958-06-02	1960-08-02	Sylvania Electric Prod	Crystal orientation device
FR1575196A (de) *	1967-08-05	1969-07-18
US3564240A (en) *	1969-07-22	1971-02-16	Charles Supper Co Inc	Goniometer head for x-ray diffraction apparatus with improved z-motion mechanism
US4210401A (en) *	1978-07-28	1980-07-01	The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	Visible and infrared polarization ratio spectroreflectometer

1986
- 1986-10-10 FR FR8614124A patent/FR2605106B1/fr not_active Expired
1987
- 1987-10-07 DE DE8787201919T patent/DE3770760D1/de not_active Expired - Lifetime
- 1987-10-07 EP EP87201919A patent/EP0266814B1/de not_active Expired - Lifetime
- 1987-10-12 JP JP62254829A patent/JPH0692917B2/ja not_active Expired - Lifetime
- 1987-10-14 US US07/108,404 patent/US4834539A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
FR2605106A1 (fr)	1988-04-15
JPH0692917B2 (ja)	1994-11-16
EP0266814A1 (de)	1988-05-11
FR2605106B1 (fr)	1988-12-09
EP0266814B1 (de)	1991-06-12
JPS63108236A (ja)	1988-05-13
US4834539A (en)	1989-05-30

Publication	Publication Date	Title
DE3581643D1 (de)	1991-03-07	Behaelter fuer diagnostische testtraeger.
DE3770760D1 (de)	1991-07-18	Probentraeger fuer ein spektralellipsometer mit hoher seitlicher aufloesung.
DE3785059D1 (de)	1993-05-06	Geschwindigkeitssteuerung fuer ein scheibenwischersystem.
DE3783468D1 (de)	1993-02-18	Messprobe fuer werkstuecke.
DE3768023D1 (de)	1991-03-21	Navigationseinrichtung fuer ein fahrzeug.
DE3577686D1 (de)	1990-06-21	Traeger fuer gegenstaende.
DE3778350D1 (de)	1992-05-21	Abschluss fuer ein sende-empfangsgeraet.
DE3774055D1 (de)	1991-11-28	Flache ausziehbare trageplattform.
DE3764476D1 (de)	1990-09-27	Gehaeusetraeger fuer stroemungsmaschinen.
DE3781264D1 (de)	1992-09-24	Hebeachse fuer ein fahrzeug.
DE3583617D1 (de)	1991-08-29	Elektroakustische pulsquelle fuer seismische untersuchungen mit hoher aufloesung.
DE3888292D1 (de)	1994-04-14	Zusatzkanal für Fernsehen mit hoher Auflösung.
DE3883056D1 (de)	1993-09-16	Optisches system fuer ein lichtpunktabtastsystem.
DE3772398D1 (de)	1991-10-02	Traeger fuer ein resonanzstiftwerkzeug.
DE3784043D1 (de)	1993-03-18	Mehrniveau-musterdetektor fuer ein einzelnes signal.
DE3686222D1 (de)	1992-09-03	Verarbeitungsanordnung hoher geschwindigkeit fuer ein radar mit synthetischer apertur.
DE58903634D1 (de)	1993-04-08	Windschutz fuer praezisionswaagen.
DE3778009D1 (de)	1992-05-07	Seiteneckenstruktur fuer fahrzeuge.
DE3674007D1 (de)	1990-10-11	Verriegelungseinrichtung fuer schaltstangen.
ATE81413T1 (de)	1992-10-15	Systemverwaltungsgeraet fuer ein mehrprozessorsystem.
DE3575115D1 (de)	1990-02-08	Orginalitaetsgesicherter verschluss fuer behaelter.
DE3861028D1 (de)	1990-12-20	Traegeranordnung fuer ein sichtgeraet.
DE3870712D1 (de)	1992-06-11	Empfaenger fuer ein phasenverschiebungsmodulierter traegersignal.
IT8464337V0 (it)	1984-06-15	Supporto lineare per tergicristallo.
DE3678192D1 (de)	1991-04-25	Etikettenwaehler fuer frankiermaschinen.

Legal Events

Date	Code	Title	Description
1992-07-09	8364	No opposition during term of opposition
1995-06-22	8327	Change in the person/name/address of the patent owner	Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL
1995-10-05	8339	Ceased/non-payment of the annual fee