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DE3679142D1 - Verfahren und vorrichtung zur verschiebungsmessung. - Google Patents

Verfahren und vorrichtung zur verschiebungsmessung.

Info

Publication number
DE3679142D1
DE3679142D1 DE8686114348T DE3679142T DE3679142D1 DE 3679142 D1 DE3679142 D1 DE 3679142D1 DE 8686114348 T DE8686114348 T DE 8686114348T DE 3679142 T DE3679142 T DE 3679142T DE 3679142 D1 DE3679142 D1 DE 3679142D1
Authority
DE
Germany
Prior art keywords
measuring displacement
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686114348T
Other languages
English (en)
Inventor
Sadao Mori
Toshio Akatsu
Chuuichi Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3679142D1 publication Critical patent/DE3679142D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE8686114348T 1985-10-16 1986-10-16 Verfahren und vorrichtung zur verschiebungsmessung. Expired - Lifetime DE3679142D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60228616A JPS6288902A (ja) 1985-10-16 1985-10-16 変位の光学的測定方法および測定装置

Publications (1)

Publication Number Publication Date
DE3679142D1 true DE3679142D1 (de) 1991-06-13

Family

ID=16879138

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686114348T Expired - Lifetime DE3679142D1 (de) 1985-10-16 1986-10-16 Verfahren und vorrichtung zur verschiebungsmessung.

Country Status (5)

Country Link
US (1) US4728194A (de)
EP (1) EP0219127B1 (de)
JP (1) JPS6288902A (de)
KR (1) KR900005640B1 (de)
DE (1) DE3679142D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304924A (en) * 1989-03-29 1994-04-19 Canon Kabushiki Kaisha Edge detector
EP0390166B1 (de) * 1989-03-29 1993-08-04 Canon Kabushiki Kaisha Kantendetektor
JPH0340252A (ja) * 1989-04-19 1991-02-21 Olympus Optical Co Ltd 光磁気記録媒体の位相差測定装置
JP3531375B2 (ja) * 1996-09-03 2004-05-31 ソニー・プレシジョン・テクノロジー株式会社 変位量検出装置
US6973147B2 (en) * 2002-09-04 2005-12-06 Intel Corporation Techniques to adjust a signal sampling point
JP4055536B2 (ja) * 2002-09-30 2008-03-05 ソニー株式会社 表示装置およびその制御方法、並びに投写型表示装置
KR101112144B1 (ko) * 2009-12-30 2012-02-14 부산대학교 산학협력단 부분 반사를 이용한 간섭 시스템 및 측정 시스템
KR101112143B1 (ko) * 2011-12-21 2012-02-14 부산대학교 산학협력단 부분 반사를 이용한 측정 시스템

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7001770A (de) * 1970-02-07 1971-08-10
US3847485A (en) * 1972-05-25 1974-11-12 Zygo Corp Optical noncontacting surface sensor for measuring distance and angle of a test surface
GB1472894A (en) * 1974-03-15 1977-05-11 Nat Res Dev Interferometric methods and apparatus for measuring distance to a surface
US4225240A (en) * 1978-06-05 1980-09-30 Balasubramanian N Method and system for determining interferometric optical path length difference
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
JPS567006A (en) * 1979-06-22 1981-01-24 Ibm Method of extending measurement range of interference
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable

Also Published As

Publication number Publication date
KR870004292A (ko) 1987-05-08
EP0219127A3 (en) 1989-10-25
US4728194A (en) 1988-03-01
EP0219127B1 (de) 1991-05-08
JPH0352881B2 (de) 1991-08-13
KR900005640B1 (ko) 1990-08-01
EP0219127A2 (de) 1987-04-22
JPS6288902A (ja) 1987-04-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee