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DE3579961D1 - Druckmessfuehler und verfahren zur anordnung eines druckmessfuehlers. - Google Patents

Druckmessfuehler und verfahren zur anordnung eines druckmessfuehlers.

Info

Publication number
DE3579961D1
DE3579961D1 DE8585108163T DE3579961T DE3579961D1 DE 3579961 D1 DE3579961 D1 DE 3579961D1 DE 8585108163 T DE8585108163 T DE 8585108163T DE 3579961 T DE3579961 T DE 3579961T DE 3579961 D1 DE3579961 D1 DE 3579961D1
Authority
DE
Germany
Prior art keywords
pressure sensor
arranging
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585108163T
Other languages
English (en)
Inventor
Seijiro Takeda
Norio Ichikawa
Kazuhiro Tsuruoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3579961D1 publication Critical patent/DE3579961D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE8585108163T 1984-07-05 1985-07-02 Druckmessfuehler und verfahren zur anordnung eines druckmessfuehlers. Expired - Lifetime DE3579961D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59139304A JPS6117925A (ja) 1984-07-05 1984-07-05 圧力センサ

Publications (1)

Publication Number Publication Date
DE3579961D1 true DE3579961D1 (de) 1990-11-08

Family

ID=15242168

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585108163T Expired - Lifetime DE3579961D1 (de) 1984-07-05 1985-07-02 Druckmessfuehler und verfahren zur anordnung eines druckmessfuehlers.

Country Status (5)

Country Link
US (1) US4670730A (de)
EP (1) EP0167144B1 (de)
JP (1) JPS6117925A (de)
KR (1) KR860001341A (de)
DE (1) DE3579961D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4930353A (en) * 1988-08-07 1990-06-05 Nippondenso Co., Ltd. Semiconductor pressure sensor
US5031462A (en) * 1989-05-08 1991-07-16 Honeywell Inc. Snap-fit construction low cost pressure sensing device
JPH05206354A (ja) * 1992-01-24 1993-08-13 Mitsubishi Electric Corp 半導体圧力センサおよびその製造方法
US5581226A (en) * 1994-11-02 1996-12-03 Motorola, Inc. High pressure sensor structure and method
EP0759547B1 (de) * 1995-08-19 2001-09-19 Endress + Hauser GmbH + Co. Drucksensor
FR2738340B1 (fr) * 1995-08-28 1997-11-21 Europ Propulsion Architecture d'integration d'un element sensible dans un capteur de pression
DE19626081A1 (de) * 1996-06-28 1998-01-02 Siemens Ag Halbleiter-Bauelement
US6177727B1 (en) * 1998-05-01 2001-01-23 Motorola, Inc. Saddle bracket for solid state pressure gauge
DE102008049143B4 (de) * 2008-09-26 2012-08-16 Intelligente Sensorsysteme Dresden Gmbh Drucksensor und Herstellungsverfahren
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US8261618B2 (en) * 2010-11-22 2012-09-11 General Electric Company Device for measuring properties of working fluids
CN102706548B (zh) * 2012-05-30 2014-08-20 冯平 螺栓或螺母松动监控装置
KR101907731B1 (ko) 2015-12-29 2018-10-12 주식회사 한화 표면 지연 뇌관 및 이를 이용한 발파 기폭 장치
JP6865223B2 (ja) * 2015-12-29 2021-04-28 タイコ エレクトロニクス アンプ コリア カンパニー リミテッドＴｙｃｏ Ｅｌｅｃｔｒｏｎｉｃｓ ＡＭＰ Ｋｏｒｅａ Ｃｏ．，Ｌｔｄ 圧力センサおよびその製造方法
US10065853B2 (en) * 2016-05-23 2018-09-04 Rosemount Aerospace Inc. Optimized epoxy die attach geometry for MEMS die

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD88862A (de) *
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
US3697919A (en) * 1971-08-03 1972-10-10 Gen Electric Semiconductor pressure transducer structure
NL7415668A (nl) * 1974-12-02 1976-06-04 Philips Nv Drukopnemer.
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal
DE3248739A1 (de) * 1982-12-31 1984-07-05 Hans Günter 5620 Velbert Wesser Verfahren zur zapfenverbindung von teilen

Also Published As

Publication number Publication date
JPS6117925A (ja) 1986-01-25
US4670730A (en) 1987-06-02
EP0167144B1 (de) 1990-10-03
KR860001341A (ko) 1986-02-26
EP0167144A3 (en) 1988-08-17
EP0167144A2 (de) 1986-01-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee