DE29707657U1 - Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage - Google Patents
Device for the transport of disk-shaped substrates in a vacuum coating system or for their storageInfo
- Publication number
- DE29707657U1 DE29707657U1 DE29707657U DE29707657U DE29707657U1 DE 29707657 U1 DE29707657 U1 DE 29707657U1 DE 29707657 U DE29707657 U DE 29707657U DE 29707657 U DE29707657 U DE 29707657U DE 29707657 U1 DE29707657 U1 DE 29707657U1
- Authority
- DE
- Germany
- Prior art keywords
- toothed
- belts
- teeth
- another
- strands
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 28
- 238000001771 vacuum deposition Methods 0.000 title claims description 4
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 2
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
Description
LEYBOLD SYSTEMS GmbH Wilhelm-Rohn-Straße 25LEYBOLD SYSTEMS GmbH Wilhelm-Rohn-Strasse 25
63450 Hanau63450 Hanau
für deren Magazinierungfor their storage
Die Neuerung betrifft eine Vorrichtung für den Transport von scheibenförmigen Substraten in einer Vakuumbeschichtungsanlage oder für deren Magazinierung mit einer motorischen Antriebseinheit mit drei von dieser angetriebenen, ebenen, formschlüssigen Zugmittelgetrieben mit jeweils mindestens zwei Zahnscheiben und jeweils einem über jedes Zahnscheibenpaar geführten endlosen Zahnriemen.The innovation concerns a device for the transport of disc-shaped substrates in a vacuum coating system or for their storage with a motor drive unit with three flat, positive-locking traction drives driven by this, each with at least two toothed pulleys and an endless toothed belt guided over each pair of toothed pulleys.
Es sind Vorrichtungen der infrage stehenden Art bekannt, mit denen ein besonders rascher Transport von Substraten entlang eines geraden Transportweges bewirkt werden kann (DE-OS 43 3 6 792 Al) .Devices of the type in question are known with which a particularly rapid transport of substrates along a straight transport path can be achieved (DE-OS 43 3 6 792 A1).
Bekannt ist auch eine Vorrichtung zum Transport von scheibenförmigen Substraten mit Hilfe von zweiA device for transporting disc-shaped substrates by means of two
• ··
offenen Flachriemengetrieben, bei denen die Rotationsachsen der Leitrollen der Flachriemen winklig zueinander angeordnet und die beiden Lasttrums in parallelen Ebenen laufen (GB 2 170 164 A).open flat belt drives in which the rotation axes of the guide rollers of the flat belts are arranged at an angle to each other and the two load strands run in parallel planes (GB 2 170 164 A).
Weiterhin ist ein Substrat-Förderapparat bekannt mit einer endlosen Kette, die mindestens zwischen einem Paar von Kettenrädern umläuft, einer quer verlaufenden Basisplatte, die quer zur Förderrichtung der endlosen Kette verläuft und an der endlosen Kette befestigt ist, einer Druckleiste oder -stange, die von der Querbasisplatte oder der endlosen Kette gehalten ist und mit Bezug auf die Querbasisplatte geöffnet werden kann, mindestens einer ortsfest angeordneten Kurvenbahn oder -schiene für Kurvenfolgerollen, die an der Querbasisplatte befestigt bzw. mit der Druckleiste oder -stange verbunden sind und beim Eintreffen der Querbasisplatte in eine Substrat-Aufnahmeposition die Druckleiste oder -stange öffnen sowie die Druckleiste oder -stange schließen, bis die Querbasisplatte eine vorbestimmte Position erreicht und einem Anschlag, der entweder an der Querbasisplatte oder an der Druckleiste oder -stange befestigt ist und an dem das jeweilige zwischen die Querbasisplatte und die Druckleiste oder -stange eintretende Substrat zur Anlage gelangt (DE-OS 35 16 853 Al).Furthermore, a substrate conveyor device is known with an endless chain that rotates between at least one pair of sprockets, a transverse base plate that runs transversely to the conveying direction of the endless chain and is attached to the endless chain, a pressure bar or rod that is held by the transverse base plate or the endless chain and can be opened with respect to the transverse base plate, at least one fixedly arranged curved track or rail for curve follower rollers that are attached to the transverse base plate or are connected to the pressure bar or rod and that open the pressure bar or rod when the transverse base plate arrives in a substrate receiving position and close the pressure bar or rod until the transverse base plate reaches a predetermined position and a stop that is attached either to the transverse base plate or to the pressure bar or rod and against which the respective substrate entering between the transverse base plate and the pressure bar or rod comes to rest (DE-OS 35 16 853 A1).
Bekannt ist schließlich eine Vorrichtung für den Transport von scheibenförmigen Substraten durch eine Behandlungsstation oder von einer ersten zu einer zweiten Bearbeitungsstation einer Vakuumbe-Finally, a device is known for transporting disc-shaped substrates through a treatment station or from a first to a second processing station of a vacuum processing system.
Schichtungsanlage, bei der eine motorische Antriebseinheit mit drei von dieser angetriebenen, ebenen, formschlüssigen Zugmittelgetrieben mit jeweils mindesten zwei Zahnscheiben und jeweils einem über jedes Zahnscheibenpaar geführten Zahnriemen vorgesehen sind, wobei zwei dieser Zugmittelgetriebe so zueinander angeordnet sind, daß ihre Zahnscheiben sich in einer gemeinsamen Ebene und ihre Zahnriemen sich zumindest mit jeweils einem Trum parallel und im Abstand zueinander erstrekken, und wobei die Zahnscheiben eines dritten Zugmittelgetriebes sich in einer Ebene erstrecken, die rechtwinklig zur Ebene der Zahnriemen der beiden anderen Zugmittelgetriebe verläuft, wobei zumindest ein Trum des dritten Zugmittelgetriebes parallel des Trums der beiden anderen Zugmittelgetriebe verläuft, und wobei alle drei einander zugeneigten Trums der drei Zugmittelgetriebe den Außenrand von kreisscheibenförmigen Substraten tangieren, deren Durchmesser dem Abstand entsprechen, den die beiden einander parallelen Trums der beiden ersten Zugmittelgetriebe voneinander aufweisen und die sich in Ebenen quer zu diesen Trums erstrecken, wobei die Zahnriemen der drei Zugmittelgetriebe auf ihren einander zugekehrten Außenflächen mit quer verlaufenden Rippen oder Zähnen versehen sind, deren Abstände und Anzahl jeweils denjenigen der in die Zahnscheiben eingreifenden Zähnen der Zahnriemen entsprechen (DE-OS 43 41 634 Al).Layering system in which a motor drive unit with three flat, positive traction drives driven by it, each with at least two toothed pulleys and a toothed belt guided over each pair of toothed pulleys are provided, two of these traction drives being arranged in relation to one another in such a way that their toothed pulleys are in a common plane and their toothed belts extend parallel to one another with at least one strand each, and at a distance from one another, and the toothed pulleys of a third traction drive extend in a plane that runs at right angles to the plane of the toothed belts of the other two traction drives, at least one strand of the third traction drive runs parallel to the strand of the other two traction drives, and all three strands of the three traction drives inclined towards one another touch the outer edge of circular disk-shaped substrates, the diameter of which corresponds to the distance between the two parallel strands of the first two traction drives and which extend in planes transverse to these strands, the toothed belts of the three Traction gears are provided with transverse ribs or teeth on their mutually facing outer surfaces the spacing and number of which correspond to those of the teeth of the toothed belt engaging in the toothed pulleys (DE-OS 43 41 634 Al).
Der vorliegenden Neuerung liegt die Aufgabe zugrunde, eine Vorrichtung der infrage stehenden ArtThe present innovation is based on the task of developing a device of the type in question
zu schaffen, die bei minimalem Platzbedarf geeignet ist eine große Anzahl von Substraten, beispielsweise von Compact Discs (CD's) in der Vorrichtung zur Herstellung der Substrate zwischenzulagern, um diese abzukühlen oder bei Ausfall einer der Bearbeitungsstationen einer Fertigungslinie mit mehreren verschiedenen Bearbeitungsstationen zwischenzulagern, um sie zu einem späteren Zeitpunkt wieder dem Fertigungsprozeß zuzuführen.to create a device that is suitable for temporarily storing a large number of substrates, for example compact discs (CDs), in the device for producing the substrates, with minimal space requirements, in order to cool them down or, in the event of a failure of one of the processing stations in a production line with several different processing stations, to temporarily store them in order to feed them back into the production process at a later point in time.
Diese Aufgabe wird gemäß der Neuerung dadurch gelöst, daß die Zahnscheibe der drei Zugmittelgetriebe jeweils lotrecht zueinander angeordnet sind, die Rotationsachsen ihrer jeweils unteren und die Rotationsachsen ihrer jeweils oberen Zahnscheiben ein gleichschenkliges Dreieck miteinander bilden und ihre Zahnriemen jeweils mit einem Trum parallel und in gleichem Abstand zueinander verlaufen, wobei alle drei einander zugeneigten parallelen Trums die radial äußeren Ränder von kreisscheibenförmigen Substraten tangieren, die lotrecht übereinander in Ebenen quer zu den Trums gehalten sind, wobei die Durchmesser der Substrate und der Abstand der Trums voneinander so bemessen sind, daß die Substrate jeweils auf den Zahnflanken dreier einander zugekehrter Zähne der Trums aufliegen, wozu die Zahnriemen der drei Zugmittelgetriebe auf ihren einander zugekehrten Außenflächen mit quer zur Zugrichtung verlaufenden Rippen oder Zähnen versehen sind, deren Abstände und Anzahl jeweils gleich bemessen sind.According to the innovation, this task is solved in that the toothed disks of the three traction mechanisms are each arranged perpendicular to one another, the rotation axes of their respective lower and the rotation axes of their respective upper toothed disks form an isosceles triangle with one another, and their toothed belts each run parallel and at the same distance from one another with one strand, whereby all three parallel strands inclined towards one another touch the radially outer edges of circular disk-shaped substrates which are held perpendicularly one above the other in planes transverse to the strands, where the diameters of the substrates and the distance between the strands are dimensioned such that the substrates each rest on the tooth flanks of three teeth of the strands facing one another, for which purpose the toothed belts of the three traction mechanisms are provided on their mutually facing outer surfaces with ribs or teeth running transversely to the direction of pull, the distances and number of which are each dimensioned the same.
Vorzugsweise sind die drei Endlosriemen oder Zahnriemen mit jeweils einem Trum mit einem alle drei Riemen gemeinsam umschließenden Treibring verbunden, der über eine Spindelmutter mit einer von einem Motor angetriebenen Schraubenspindel zusammenwirkt und von dieser auf- bzw. abbewegbar ist.Preferably, the three endless belts or toothed belts are each connected to a strand with a drive ring that encloses all three belts together, which interacts via a spindle nut with a screw spindle driven by a motor and can be moved up or down by this.
Zweckmäßigerweise sind die drei Zahnriemen nur jeweils zur Hälfte ihrer Länge an ihrer Außenseite mit Zähnen versehen, wobei der Treibring jeweils am Anfang der mit Zähnen bestückten Partien der Zahnriemen fest mit diesen verbunden ist.For practical purposes, the three toothed belts are each provided with teeth on their outside only halfway along their length, with the drive ring being firmly connected to the toothed sections of the toothed belt at the beginning of each of them.
Mit Vorteil sind die Leitrollen oder Zahnscheiben zur Führung der drei Riemen paarweise einander gegenüberliegend in Böcken gelagert, die zum einen an einem ringförmigen Fußteil und zum anderen an einer Kopfplatte angeordnet sind.It is advantageous for the guide rollers or toothed pulleys for guiding the three belts to be mounted in pairs opposite one another in brackets which are arranged on the one hand on a ring-shaped base part and on the other hand on a head plate.
Gemäß der Neuerung ist unterhalb des ringförmigen Fußteils ein Stößel vorgesehen, der motorisch in vertikaler Richtung von einer unteren in eine obere Position bewegbar ist, wobei ein Substrat von einer Ausgangsposition in eine Position bewegt wird, in der die Zähne der drei Riemen das Substrat erfassen.According to the innovation, a plunger is provided below the annular base part, which is motor-driven and can be moved vertically from a lower to an upper position, whereby a substrate is moved from an initial position to a position in which the teeth of the three belts grip the substrate.
Die Neuerung läßt die verschiedensten Ausführungsmöglichkeiten zu; eine davon ist in den anhängenden Zeichnungen näher dargestellt, und zwar zeigen: The innovation allows for a wide range of possible designs; one of them is shown in more detail in the attached drawings, namely:
Fig. 1 die Vorrichtung in der Seitenansicht,Fig. 1 the device in side view,
Fig. 2 eine Schnittdarstellung nach den Linien A-A gemäß Fig. 1,Fig. 2 is a sectional view along the lines A-A of Fig. 1,
Fig. 3 eine Schnittdarstellung nach den Linien C-C gemäß Fig. 1 undFig. 3 is a sectional view along the lines C-C according to Fig. 1 and
Fig. 4 eine Schnittdarstellung nach den Linien B-B gemäß Fig. 1.Fig. 4 is a sectional view along the lines B-B of Fig. 1.
Die Vorrichtung gemäß Fig. 1 besteht im wesentlichen aus einem Rahmen 3 mit einem ringförmigen Kopfteil 4 und einem ringförmigen Fußteil 5 und insgesamt drei lotrecht angeordneten Streben 6,7,8; einer oberhalb des Kopfteils 4 angeordneten Kopfplatte 9 mit drei an ihr fest angeordneten Lagerböcken 10,11,12; drei weiteren, den Lagerböcken 10,11,12 gegenüberliegend auf dem Fußteil 5 befestigten Lagerböcken 13,14,15, einer in der Kopfplatte 9 einerseits und im Fußteil 5 andererseits drehbar gelagerten Schraubenspindel 16; drei jeweils in den oberen und den unteren Lagerböcken 10 bis 15 drehbar gelagerten Zahnscheiben oder Leitrollen 17 bis 22; den drei über die Leitrollen 17 bis 22 geführten Endlosriemen oder Zahnriemen; dem am Fußteil 5 gehaltenen Antriebsmotor 26 mit Getriebekasten 2 7 und Kegelradgetriebe 2 8 zum Antrieb der Schraubenspindel 16; einer mit der Schraubenspindel 16 zusammenwirkenden Spindelmutter 2 9 und einem von der Spindelmutter 2 9 bewegbaren Treibring 30, der einerseits alle drei Endlosriemen oder Zahnriemen 23 bis 25 umschließt undThe device according to Fig. 1 consists essentially of a frame 3 with an annular head part 4 and an annular foot part 5 and a total of three vertically arranged struts 6,7,8; a head plate 9 arranged above the head part 4 with three bearing blocks 10,11,12 fixed to it; three further bearing blocks 13,14,15 attached to the foot part 5 opposite the bearing blocks 10,11,12, a screw spindle 16 rotatably mounted in the head plate 9 on the one hand and in the foot part 5 on the other; three toothed disks or guide rollers 17 to 22 rotatably mounted in the upper and lower bearing blocks 10 to 15; the three endless belts or toothed belts guided over the guide rollers 17 to 22; the drive motor 26 held on the foot part 5 with gear box 2 7 and bevel gear 2 8 for driving the screw spindle 16; a spindle nut 2 9 interacting with the screw spindle 16 and a drive ring 30 movable by the spindle nut 2 9, which on the one hand encloses all three endless belts or toothed belts 23 to 25 and
andererseits jeweils mit einer Partie der drei Endlosriemen 23 bis 25 fest verbunden ist.on the other hand, is firmly connected to one section of the three endless belts 23 to 25.
Die scheibenförmigen Substrate 31,31',... werden vom Arm 32 eines nicht näher dargestellten Manipulators in den Bereich unterhalb des Fußteils 5 gefördert und dort von einem elektromagnetisch bewegten Stößel 33 in Pfeilrichtung D so weit angehoben, bis sie in den Bereich der an den Außenseiten der Endlosriemen 23 bis 25 befestigten Zähne 34,34',... reichen, die, angetrieben vom Motor 26, schrittweise aufwärts bzw. abwärts bewegbar sind und das zugeführte Substrat 31,31',... gemeinsam greifen und in horizontaler Position auf- bzw. abwärts bewegen.The disk-shaped substrates 31, 31',... are conveyed by the arm 32 of a manipulator (not shown in detail) into the area below the foot part 5 and are raised there by an electromagnetically moved ram 33 in the direction of arrow D until they reach the area of the teeth 34, 34',... attached to the outsides of the endless belts 23 to 25, which, driven by the motor 26, can be moved up or down step by step and grip the supplied substrate 31, 31',... together and move it up or down in a horizontal position.
Die dargestellte Vorrichtung ist in der Lage, der Anzahl der Zähne 34,34',... entsprechend etwa 45 Substrate 31,31',... aufzunehmen und zwischenzulagern. Das Entleeren der Vorrichtung geschieht im umgekehrten Sinne, d. h. daß die einzelnen Substrate 31,31',... schrittweise von den drei Endlosriemen 23 bis 25 nach unten auf das Fußteil 5 zu transportiert werden und dann vom Manipulatorarm 32 übernommen und von der Vorrichtung weg transportiert werden.The device shown is able to accommodate and temporarily store approximately 45 substrates 31, 31',... corresponding to the number of teeth 34, 34',... The device is emptied in the opposite direction, i.e. the individual substrates 31, 31',... are transported step by step by the three endless belts 23 to 25 downwards towards the base part 5 and are then taken over by the manipulator arm 32 and transported away from the device.
11 9711 97
BezugszeichenlisteList of reference symbols
3 Rahmen3 frames
4 Kopfteil4 Headboard
5 Fußteil5 Foot part
6 Strebe6 Strut
7 Strebe7 Strut
8 Strebe8 Strut
9 Kopfplatte9 Headstock
10 Lagerbock oben10 Bearing block top
11 Lagerbock oben11 Bearing block top
12 Lagerbock oben12 Bearing block top
13 Lagerbock unten13 Bearing block bottom
14 Lagerbock unten14 Bearing block bottom
15 Lagerbock unten15 Bearing block bottom
16 Schraubenspindel16 Screw spindle
17 Leitrolle, Zahnscheibe17 Guide roller, toothed disc
18 Leitrolle, Zahnscheibe18 Guide roller, toothed disc
19 Leitrolle, Zahnscheibe 2 0 Leitrolle, Zahnscheibe19 Guide pulley, toothed disc 2 0 Guide pulley, toothed disc
21 Leitrolle, Zahnscheibe21 Guide roller, toothed disc
22 Leitrolle, Zahnscheibe22 Guide roller, toothed disc
23 Endlosriemen, Zahnriemen23 Endless belts, timing belts
24 Endlosriemen, Zahnriemen 2 5 Endlosriemen, Zahnriemen24 Endless belts, timing belts 2 5 Endless belts, timing belts
26 Antriebsmotor26 Drive motor
27 Getriebekasten27 Gearbox
2 8 Kegelradgetriebe 29 Spindelmutter2 8 Bevel gear 29 Spindle nut
3 0 Treibring 31,31', ... Substrat3 0 Drive ring 31,31', ... Substrate
97 52397 523
32 33 34,34' ,32 33 34,34' ,
ManipulatorarmManipulator arm
StößelPestle
ZahnTooth
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE29707657U DE29707657U1 (en) | 1997-04-28 | 1997-04-28 | Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE29707657U DE29707657U1 (en) | 1997-04-28 | 1997-04-28 | Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE29707657U1 true DE29707657U1 (en) | 1997-07-10 |
Family
ID=8039652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE29707657U Expired - Lifetime DE29707657U1 (en) | 1997-04-28 | 1997-04-28 | Device for the transport of disk-shaped substrates in a vacuum coating system or for their storage |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE29707657U1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19839898C2 (en) * | 1998-09-02 | 2002-07-18 | Leybold Systems Gmbh | Device for the vertical transport of disk-shaped substrates in a vacuum coating system or for their storage |
| DE10123062A1 (en) * | 2001-05-11 | 2002-11-21 | Steag Hamatech Ag | Device for transport of media, such as DVDs during production has an improved mechanical coupling device for linking a lifting arrangement to a conveyor belt arrangement so that disks can be moved through a production zone |
| DE10162956A1 (en) * | 2001-12-20 | 2003-07-10 | Steag Hama Tech Ag | Substrate processing apparatus |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3124231A (en) * | 1964-03-10 | Transfer mechanism | ||
| DE2305789A1 (en) * | 1973-02-07 | 1974-08-08 | Vosswerke Gmbh | CONVEYOR DEVICE, IN PARTICULAR VERTICAL CONVEYORS |
| EP0137570A2 (en) * | 1983-10-10 | 1985-04-17 | Staat der Nederlanden (Staatsbedrijf der Posterijen, Telegrafie en Telefonie) | Accumulating conveyor apparatus for effecating vertical movement and storage of tubs, or similar containers |
| DE3740109C2 (en) * | 1987-02-16 | 1990-05-23 | Gebr. Bindler Maschinenfabrik Gmbh & Co Kg, 5275 Bergneustadt, De | |
| DE4341634A1 (en) * | 1993-12-07 | 1995-06-08 | Leybold Ag | Transport of substrate discs in a vacuum coating plant |
| DE4213936C2 (en) * | 1991-04-30 | 1995-11-09 | Murata Manufacturing Co | Heat treatment plant |
-
1997
- 1997-04-28 DE DE29707657U patent/DE29707657U1/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3124231A (en) * | 1964-03-10 | Transfer mechanism | ||
| DE2305789A1 (en) * | 1973-02-07 | 1974-08-08 | Vosswerke Gmbh | CONVEYOR DEVICE, IN PARTICULAR VERTICAL CONVEYORS |
| EP0137570A2 (en) * | 1983-10-10 | 1985-04-17 | Staat der Nederlanden (Staatsbedrijf der Posterijen, Telegrafie en Telefonie) | Accumulating conveyor apparatus for effecating vertical movement and storage of tubs, or similar containers |
| DE3740109C2 (en) * | 1987-02-16 | 1990-05-23 | Gebr. Bindler Maschinenfabrik Gmbh & Co Kg, 5275 Bergneustadt, De | |
| DE4213936C2 (en) * | 1991-04-30 | 1995-11-09 | Murata Manufacturing Co | Heat treatment plant |
| DE4341634A1 (en) * | 1993-12-07 | 1995-06-08 | Leybold Ag | Transport of substrate discs in a vacuum coating plant |
Non-Patent Citations (1)
| Title |
|---|
| Prospekt: Arcadia - The Replication Line for CD and DVD, der Fa. Leybold Systems GmbH, Hanau, 4, 1997, S. 6 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19839898C2 (en) * | 1998-09-02 | 2002-07-18 | Leybold Systems Gmbh | Device for the vertical transport of disk-shaped substrates in a vacuum coating system or for their storage |
| DE10123062A1 (en) * | 2001-05-11 | 2002-11-21 | Steag Hamatech Ag | Device for transport of media, such as DVDs during production has an improved mechanical coupling device for linking a lifting arrangement to a conveyor belt arrangement so that disks can be moved through a production zone |
| DE10162956A1 (en) * | 2001-12-20 | 2003-07-10 | Steag Hama Tech Ag | Substrate processing apparatus |
| DE10162956B4 (en) * | 2001-12-20 | 2005-11-03 | Steag Hama Tech Ag | Substrate processing apparatus |
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