DE2016211C3 - Verfahren zur Herstellung einer Halbleitervorrichtung - Google Patents
Verfahren zur Herstellung einer HalbleitervorrichtungInfo
- Publication number
- DE2016211C3 DE2016211C3 DE2016211A DE2016211A DE2016211C3 DE 2016211 C3 DE2016211 C3 DE 2016211C3 DE 2016211 A DE2016211 A DE 2016211A DE 2016211 A DE2016211 A DE 2016211A DE 2016211 C3 DE2016211 C3 DE 2016211C3
- Authority
- DE
- Germany
- Prior art keywords
- grains
- layer
- radiation
- metal
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 230000005855 radiation Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 10
- 229910003437 indium oxide Inorganic materials 0.000 claims description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 239000011230 binding agent Substances 0.000 claims 8
- 150000002739 metals Chemical class 0.000 claims 7
- 238000002844 melting Methods 0.000 claims 5
- 230000008018 melting Effects 0.000 claims 5
- 238000001816 cooling Methods 0.000 claims 2
- 230000001464 adherent effect Effects 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- 229910052745 lead Inorganic materials 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229910052716 thallium Inorganic materials 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 229910001887 tin oxide Inorganic materials 0.000 claims 1
- 230000003245 working effect Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 3
- 229920002635 polyurethane Polymers 0.000 description 3
- 239000004814 polyurethane Substances 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 239000006163 transport media Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/107—Melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/917—Electroluminescent
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
- Electroluminescent Light Sources (AREA)
- Led Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6905835A NL6905835A (ja) | 1969-04-16 | 1969-04-16 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2016211A1 DE2016211A1 (ja) | 1970-10-22 |
| DE2016211B2 DE2016211B2 (de) | 1978-10-12 |
| DE2016211C3 true DE2016211C3 (de) | 1979-06-13 |
Family
ID=19806702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2016211A Expired DE2016211C3 (de) | 1969-04-16 | 1970-04-04 | Verfahren zur Herstellung einer Halbleitervorrichtung |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3729342A (ja) |
| JP (1) | JPS4826985B1 (ja) |
| BE (1) | BE748953A (ja) |
| BR (1) | BR7018222D0 (ja) |
| CH (1) | CH506166A (ja) |
| DE (1) | DE2016211C3 (ja) |
| ES (1) | ES378556A1 (ja) |
| FR (1) | FR2043297A5 (ja) |
| GB (1) | GB1301585A (ja) |
| NL (1) | NL6905835A (ja) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4171991A (en) * | 1978-04-12 | 1979-10-23 | Semix, Incorporated | Method of forming silicon impregnated foraminous sheet by immersion |
| US4174234A (en) * | 1978-04-12 | 1979-11-13 | Semix, Incorporated | Silicon-impregnated foraminous sheet |
| US4169739A (en) * | 1978-04-12 | 1979-10-02 | Semix, Incorporated | Method of making silicon-impregnated foraminous sheet by partial immersion and capillary action |
| US4357368A (en) * | 1978-12-26 | 1982-11-02 | Rca Corporation | Method of making a photosensitive electrode and a photosensitive electrode made thereby |
| JPS5842960B2 (ja) * | 1980-06-13 | 1983-09-22 | 双葉電子工業株式会社 | エレクトロルミネセンス装置 |
| FR2555806B1 (fr) * | 1983-11-29 | 1986-03-28 | Thomson Csf | Ecran luminescent et procede de fabrication d'un tel ecran |
| US4853079A (en) * | 1984-12-03 | 1989-08-01 | Lumel, Inc. | Method for making electroluminescent panels |
| US4647337A (en) * | 1984-12-03 | 1987-03-03 | Luminescent Electronics, Inc. | Method of making electroluminescent panels |
| US4767966A (en) * | 1984-12-03 | 1988-08-30 | Luminescent Electronics, Inc. | Electroluminescent panels |
| US4904901A (en) * | 1984-12-03 | 1990-02-27 | Lumel, Inc. | Electrolumescent panels |
-
1969
- 1969-04-16 NL NL6905835A patent/NL6905835A/xx unknown
-
1970
- 1970-04-01 US US00024556A patent/US3729342A/en not_active Expired - Lifetime
- 1970-04-04 DE DE2016211A patent/DE2016211C3/de not_active Expired
- 1970-04-13 JP JP45031160A patent/JPS4826985B1/ja active Pending
- 1970-04-13 GB GB1301585D patent/GB1301585A/en not_active Expired
- 1970-04-13 BR BR218222/70A patent/BR7018222D0/pt unknown
- 1970-04-13 CH CH544770A patent/CH506166A/de not_active IP Right Cessation
- 1970-04-14 BE BE748953D patent/BE748953A/xx unknown
- 1970-04-14 FR FR7013382A patent/FR2043297A5/fr not_active Expired
- 1970-04-14 ES ES378556A patent/ES378556A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4826985B1 (ja) | 1973-08-17 |
| US3729342A (en) | 1973-04-24 |
| BR7018222D0 (pt) | 1973-03-15 |
| DE2016211A1 (ja) | 1970-10-22 |
| GB1301585A (ja) | 1972-12-29 |
| NL6905835A (ja) | 1970-10-20 |
| FR2043297A5 (ja) | 1971-02-12 |
| ES378556A1 (es) | 1972-07-16 |
| BE748953A (fr) | 1970-10-14 |
| DE2016211B2 (de) | 1978-10-12 |
| CH506166A (de) | 1971-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |