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DE19681741T1 - Verbesserter optischer Beanspruchungsgenerator und -detektor - Google Patents

Verbesserter optischer Beanspruchungsgenerator und -detektor

Info

Publication number
DE19681741T1
DE19681741T1 DE19681741T DE19681741T DE19681741T1 DE 19681741 T1 DE19681741 T1 DE 19681741T1 DE 19681741 T DE19681741 T DE 19681741T DE 19681741 T DE19681741 T DE 19681741T DE 19681741 T1 DE19681741 T1 DE 19681741T1
Authority
DE
Germany
Prior art keywords
detector
improved optical
optical stress
stress generator
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19681741T
Other languages
English (en)
Other versions
DE19681741B4 (de
Inventor
Humphrey J Maris
Robert J Stoner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brown University Research Foundation Inc
Original Assignee
Brown University Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown University Research Foundation Inc filed Critical Brown University Research Foundation Inc
Publication of DE19681741T1 publication Critical patent/DE19681741T1/de
Application granted granted Critical
Publication of DE19681741B4 publication Critical patent/DE19681741B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19681741T 1996-01-23 1996-12-31 Verbesserter optischer Beanspruchungsgenerator und -detektor Expired - Lifetime DE19681741B4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US1054396P 1996-01-23 1996-01-23
US60/010,543 1996-01-23
US08/689,287 1996-08-06
US08/689,287 US5748318A (en) 1996-01-23 1996-08-06 Optical stress generator and detector
PCT/US1996/020917 WO1997027466A1 (en) 1996-01-23 1996-12-31 Improved optical stress generator and detector

Publications (2)

Publication Number Publication Date
DE19681741T1 true DE19681741T1 (de) 1998-12-17
DE19681741B4 DE19681741B4 (de) 2011-05-12

Family

ID=26681300

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681741T Expired - Lifetime DE19681741B4 (de) 1996-01-23 1996-12-31 Verbesserter optischer Beanspruchungsgenerator und -detektor

Country Status (4)

Country Link
US (2) US5748318A (de)
JP (2) JP4393585B2 (de)
DE (1) DE19681741B4 (de)
WO (1) WO1997027466A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19781728B4 (de) * 1996-04-26 2007-10-18 Brown University Research Foundation Optisches Verfahren und System zum Bestimmen mechanischer Eigenschaften eines Materials

Families Citing this family (237)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518168B1 (en) * 1995-08-18 2003-02-11 President And Fellows Of Harvard College Self-assembled monolayer directed patterning of surfaces
US6008906A (en) * 1995-08-25 1999-12-28 Brown University Research Foundation Optical method for the characterization of the electrical properties of semiconductors and insulating films
US6321601B1 (en) * 1996-08-06 2001-11-27 Brown University Research Foundation Optical method for the characterization of laterally-patterned samples in integrated circuits
US8603511B2 (en) 1996-08-27 2013-12-10 Baxter International, Inc. Fragmented polymeric compositions and methods for their use
US7435425B2 (en) * 2001-07-17 2008-10-14 Baxter International, Inc. Dry hemostatic compositions and methods for their preparation
US6066325A (en) * 1996-08-27 2000-05-23 Fusion Medical Technologies, Inc. Fragmented polymeric compositions and methods for their use
EP0841692A3 (de) * 1996-11-08 1998-12-23 Matsushita Electric Industrial Co., Ltd. Apparat und Methode zur optischen Halbleiterschaltungs-Kontrolle
US6849470B1 (en) 1996-11-08 2005-02-01 Matsushita Electric Industrial Co., Ltd. Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
US5920480A (en) * 1997-01-10 1999-07-06 Nakamura; Kaoru Method and apparatus for detecting pallet full load state in sheet metal machining line and method and apparatus for controlling sheet metal machining line and work identifying apparatus
US6108091A (en) * 1997-05-28 2000-08-22 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
WO1999013318A1 (en) * 1997-09-05 1999-03-18 Brown University Research Foundation Optical method for the characterization of the electrical properties of semiconductors and insulating films
AU784262B2 (en) * 1997-12-19 2006-03-02 Bernard Siu System and method for laser ultrasonic bond integrity evaluation
ATE319980T1 (de) * 1997-12-19 2006-03-15 Bernard Siu Verfahren und vorrichtung zur auswertung der integrität von verbindungen mittels laserinduziertem ultraschall
US6087242A (en) * 1998-02-26 2000-07-11 International Business Machines Corporation Method to improve commercial bonded SOI material
US6069703A (en) * 1998-05-28 2000-05-30 Active Impulse Systems, Inc. Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure
US6304328B1 (en) * 1998-08-14 2001-10-16 Research Foundation Of State University Of New York, The Office Of Technology Licensing, Suny Non-contact temperature and concentration measurement on liquid surfaces
US6608689B1 (en) * 1998-08-31 2003-08-19 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
WO2000020841A1 (en) * 1998-10-05 2000-04-13 Kla-Tencor Corporation Interferometric system for measurement disturbance of a sample
US6393915B1 (en) * 1999-07-29 2002-05-28 Koninklijke Philips Electronics N.V. Method and device for simultaneously measuring multiple properties of multilayer films
JP2001083022A (ja) * 1999-09-10 2001-03-30 Nikon Corp 応力測定装置及び応力測定方法
DE19944148C2 (de) * 1999-09-15 2003-08-21 Leica Microsystems Mikroskop
GB9921970D0 (en) * 1999-09-16 1999-11-17 Univ London An optical interferometer sensor array
CA2382675C (en) 1999-09-16 2009-01-06 Wayne State University Miniaturized contactless sonic ir device for remote non-destructive inspection
US6593574B2 (en) 1999-09-16 2003-07-15 Wayne State University Hand-held sound source gun for infrared imaging of sub-surface defects in materials
US6236049B1 (en) * 1999-09-16 2001-05-22 Wayne State University Infrared imaging of ultrasonically excited subsurface defects in materials
US6437334B1 (en) 1999-09-16 2002-08-20 Wayne State University System and method for detecting cracks in a tooth by ultrasonically exciting and thermally imaging the tooth
US6277659B1 (en) * 1999-09-29 2001-08-21 Advanced Micro Devices, Inc. Substrate removal using thermal analysis
US6277656B1 (en) * 1999-09-30 2001-08-21 Rama R. Goruganthu Substrate removal as a function of acoustic analysis
US6369888B1 (en) * 1999-11-17 2002-04-09 Applied Materials, Inc. Method and apparatus for article inspection including speckle reduction
US6621578B1 (en) * 1999-11-26 2003-09-16 Olympus Optical Co, Ltd. Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer
US6317216B1 (en) * 1999-12-13 2001-11-13 Brown University Research Foundation Optical method for the determination of grain orientation in films
US6569249B1 (en) 2000-04-18 2003-05-27 Clemson University Process for forming layers on substrates
US7190705B2 (en) 2000-05-23 2007-03-13 Imra America. Inc. Pulsed laser sources
US7088756B2 (en) * 2003-07-25 2006-08-08 Imra America, Inc. Polarization maintaining dispersion controlled fiber laser source of ultrashort pulses
US6381019B1 (en) 2000-06-30 2002-04-30 Brown University Research Foundation Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample
JP4614296B2 (ja) * 2000-07-17 2011-01-19 国立大学法人京都大学 近接場光学顕微鏡装置
US6621582B2 (en) 2000-09-11 2003-09-16 Rudolph Technologies, Inc. Optical metrology system and method employing laser-server supplying laser energy to distributed slave metrology heads
US6919957B2 (en) * 2000-09-20 2005-07-19 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
US7130029B2 (en) * 2000-09-20 2006-10-31 Kla-Tencor Technologies Corp. Methods and systems for determining an adhesion characteristic and a thickness of a specimen
US6694284B1 (en) 2000-09-20 2004-02-17 Kla-Tencor Technologies Corp. Methods and systems for determining at least four properties of a specimen
US6673637B2 (en) 2000-09-20 2004-01-06 Kla-Tencor Technologies Methods and systems for determining a presence of macro defects and overlay of a specimen
US6829559B2 (en) * 2000-09-20 2004-12-07 K.L.A.-Tencor Technologies Methods and systems for determining a presence of macro and micro defects on a specimen
US6782337B2 (en) * 2000-09-20 2004-08-24 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension an a presence of defects on a specimen
US7106425B1 (en) 2000-09-20 2006-09-12 Kla-Tencor Technologies Corp. Methods and systems for determining a presence of defects and a thin film characteristic of a specimen
US7349090B2 (en) * 2000-09-20 2008-03-25 Kla-Tencor Technologies Corp. Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
US6891627B1 (en) 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US6812045B1 (en) 2000-09-20 2004-11-02 Kla-Tencor, Inc. Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation
WO2002036015A1 (en) 2000-10-30 2002-05-10 The General Hospital Corporation Optical methods and systems for tissue analysis
US9295391B1 (en) 2000-11-10 2016-03-29 The General Hospital Corporation Spectrally encoded miniature endoscopic imaging probe
DE10056382B4 (de) * 2000-11-14 2004-07-01 Leica Microsystems Heidelberg Gmbh Scanmikroskop
US6504618B2 (en) 2001-03-21 2003-01-07 Rudolph Technologies, Inc. Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
US7002689B2 (en) * 2001-04-12 2006-02-21 Rudolph Technologies, Inc. Optically-based method and apparatus for detecting and characterizing surface pits in a metal film during chemical mechanical polish
US7865231B2 (en) 2001-05-01 2011-01-04 The General Hospital Corporation Method and apparatus for determination of atherosclerotic plaque type by measurement of tissue optical properties
US6828162B1 (en) * 2001-06-28 2004-12-07 Advanced Micro Devices, Inc. System and method for active control of BPSG deposition
EP1417450B1 (de) * 2001-07-13 2017-12-27 Rudolph Technologies, Inc. Verfahren und vorrichtung zur erhöhung des signal/rausch-verhältnisses in einem photoakustischen filmdickemesssystem
US7006221B2 (en) * 2001-07-13 2006-02-28 Rudolph Technologies, Inc. Metrology system with spectroscopic ellipsometer and photoacoustic measurements
JP4266548B2 (ja) * 2001-09-27 2009-05-20 富士フイルム株式会社 超音波受信装置及びそれを用いた超音波診断装置
US20040001523A1 (en) * 2001-11-20 2004-01-01 Kevin Holsinger Optimizing power for second laser
US6801322B2 (en) * 2001-12-13 2004-10-05 Freescale Semiconductor, Inc. Method and apparatus for IN SITU measuring a required feature of a layer during a polishing process
US7355716B2 (en) 2002-01-24 2008-04-08 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
US6786099B2 (en) 2002-02-14 2004-09-07 Kla-Tencor Technologies Corporation Surface photo-acoustic film measurement device and technique
US7322250B1 (en) * 2002-04-09 2008-01-29 Rockwell Automation Technologies, Inc. System and method for sensing torque on a rotating shaft
JP2003322628A (ja) * 2002-04-30 2003-11-14 National Institute Of Advanced Industrial & Technology 高速パルス高速時間応答測定方法並びに装置
US7027142B2 (en) * 2002-05-06 2006-04-11 Applied Materials, Israel, Ltd. Optical technique for detecting buried defects in opaque films
US7139081B2 (en) 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US6892926B2 (en) * 2002-10-11 2005-05-17 Exxonmobil Upstream Research Company Toughness-optimized weld joints and methods for producing said weld joints
EP1563277A1 (de) * 2002-11-06 2005-08-17 Koninklijke Philips Electronics N.V. Verfahren zur haftfestigkeitsmessung an grenzen zwischen schichten
US20040153300A1 (en) * 2002-11-20 2004-08-05 Symosek Peter F. Signature simulator
US7006222B2 (en) * 2003-01-08 2006-02-28 Kla-Tencor Technologies Corporation Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI)
US7643153B2 (en) 2003-01-24 2010-01-05 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
US7324214B2 (en) 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
AU2004225188B2 (en) 2003-03-31 2010-04-15 The General Hospital Corporation Speckle reduction in optical coherence tomography by path length encoded angular compounding
US8834864B2 (en) * 2003-06-05 2014-09-16 Baxter International Inc. Methods for repairing and regenerating human dura mater
KR20130138867A (ko) 2003-06-06 2013-12-19 더 제너럴 하스피탈 코포레이션 파장 동조 소스용 방법 및 장치
US7927626B2 (en) 2003-08-07 2011-04-19 Ethicon, Inc. Process of making flowable hemostatic compositions and devices containing such compositions
ATE513181T1 (de) 2003-10-27 2011-07-15 Gen Hospital Corp Verfahren und vorrichtung zur durchführung optischer abbildung durch verwendung von frequenzbereichs-interferometrie
JP2005138143A (ja) * 2003-11-06 2005-06-02 Disco Abrasive Syst Ltd レーザ光線を利用する加工装置
WO2005084393A2 (en) * 2004-03-05 2005-09-15 The Regents Of The University Of California Glass-modified stress waves for separation of ultra thin films and nanoelectronics device fabrication
US20050209744A1 (en) * 2004-03-17 2005-09-22 Ihbe Thomas S Commercial vehicle operation using dynamic rebranding
US7804864B2 (en) 2004-03-31 2010-09-28 Imra America, Inc. High power short pulse fiber laser
TW200604695A (en) * 2004-05-18 2006-02-01 Zygo Corp Methods and systems for determining optical properties using low-coherence interference signals
JP4750786B2 (ja) * 2004-05-29 2011-08-17 ザ ジェネラル ホスピタル コーポレイション 光コヒーレンストモグラフィ（ｏｃｔ）イメージングにおける屈折層を用いた色分散補償プロセス、システム及びソフトウェア構成
EP1771755B1 (de) 2004-07-02 2016-09-21 The General Hospital Corporation Endoskopische darstellungssonde mit doppelt kaschierter faser
US8081316B2 (en) 2004-08-06 2011-12-20 The General Hospital Corporation Process, system and software arrangement for determining at least one location in a sample using an optical coherence tomography
WO2006024014A2 (en) 2004-08-24 2006-03-02 The General Hospital Corporation Process, system and software arrangement for measuring a mechanical strain and elastic properties of a sample
EP2272420B1 (de) 2004-08-24 2013-06-19 The General Hospital Corporation Vorrichtung zur Abbildung von Gefäßsegmenten
US7274440B1 (en) * 2004-09-08 2007-09-25 Kla-Tencor Technologies Corp. Systems and methods for measuring stress in a specimen
WO2006039091A2 (en) 2004-09-10 2006-04-13 The General Hospital Corporation System and method for optical coherence imaging
US8132460B1 (en) * 2004-09-27 2012-03-13 Lsp Technologies, Inc. Laser induced bond delamination
KR101257100B1 (ko) 2004-09-29 2013-04-22 더 제너럴 하스피탈 코포레이션 광 간섭 영상화 시스템 및 방법
US7019845B1 (en) * 2004-10-06 2006-03-28 Rudolph Technologies, Inc. Measuring elastic moduli of dielectric thin films using an optical metrology system
EP2278266A3 (de) 2004-11-24 2011-06-29 The General Hospital Corporation Interferometer mit gemeinsamem Pfad für endoskopische optische Kohärenztomographie
JP2008521516A (ja) 2004-11-29 2008-06-26 ザ ジェネラル ホスピタル コーポレイション サンプル上の複数の地点を同時に照射し検出することによって光学画像生成を実行する構成、装置、内視鏡、カテーテル、及び方法
US7428057B2 (en) * 2005-01-20 2008-09-23 Zygo Corporation Interferometer for determining characteristics of an object surface, including processing and calibration
US7884947B2 (en) 2005-01-20 2011-02-08 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
US7372584B2 (en) * 2005-04-11 2008-05-13 Rudolph Technologies, Inc. Dual photo-acoustic and resistivity measurement system
WO2006111942A1 (en) * 2005-04-18 2006-10-26 Optical Metrology Patents Limited An optical inspection apparatus and method
ATE451669T1 (de) 2005-04-28 2009-12-15 Gen Hospital Corp Bewertung von bildmerkmalen einer anatomischen struktur in optischen kohärenztomographiebildern
US20060256916A1 (en) * 2005-05-13 2006-11-16 Rudolph Technologies, Inc. Combined ultra-fast x-ray and optical system for thin film measurements
EP1889037A2 (de) 2005-06-01 2008-02-20 The General Hospital Corporation Vorrichtung, verfahren und system zur abbildung phasenaufgelöster optischer frequenzdomänen
US20060272418A1 (en) * 2005-06-03 2006-12-07 Brown University Opto-acoustic methods and apparatus for perfoming high resolution acoustic imaging and other sample probing and modification operations
US7624640B2 (en) * 2005-06-03 2009-12-01 Brown University Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations
US7043104B1 (en) * 2005-06-14 2006-05-09 Hewlett-Packard Development Company, L.P. High gain optical probe
FR2887334B1 (fr) * 2005-06-20 2007-08-24 Centre Nat Rech Scient Dispositif et procede de caracterisation de structure par effet de longueur d'onde dans un systeme photo-acoustique
EP1913332B1 (de) 2005-08-09 2010-10-13 The General Hospital Corporation Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie
JP4732832B2 (ja) * 2005-08-17 2011-07-27 株式会社日立製作所 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
EP1937137B1 (de) 2005-09-29 2022-06-15 General Hospital Corporation Verfahren und gerät zur optischen darstellung via spektrale codierung
US7889348B2 (en) 2005-10-14 2011-02-15 The General Hospital Corporation Arrangements and methods for facilitating photoluminescence imaging
US20070171420A1 (en) * 2005-12-22 2007-07-26 Stmicroelectronics Sa Pulsed ellipsometer device
EP1971848B1 (de) 2006-01-10 2019-12-04 The General Hospital Corporation Systeme und verfahren zur datengenerierung auf der basis eines oder mehrerer spektral kodierter endoskopieverfahren
US20070238955A1 (en) * 2006-01-18 2007-10-11 The General Hospital Corporation Systems and methods for generating data using one or more endoscopic microscopy techniques
EP2289398A3 (de) 2006-01-19 2011-04-06 The General Hospital Corporation Verfahren und Systeme zur optischen Bildgebung von epithelialen Luminalorganen durch Strahlenabtastung dieser
WO2007084903A2 (en) 2006-01-19 2007-07-26 The General Hospital Corporation Apparatus for obtaining information for a structure using spectrally-encoded endoscopy techniques and method for producing one or more optical arrangements
WO2007149602A2 (en) * 2006-02-01 2007-12-27 The General Hospital Corporation Methods and systems for providing electromagnetic radiation to at least one portion of a sample using conformal laser therapy procedures
JP5680829B2 (ja) * 2006-02-01 2015-03-04 ザ ジェネラル ホスピタル コーポレイション 複数の電磁放射をサンプルに照射する装置
US9777053B2 (en) 2006-02-08 2017-10-03 The General Hospital Corporation Methods, arrangements and systems for obtaining information associated with an anatomical sample using optical microscopy
EP2309221A1 (de) 2006-02-24 2011-04-13 The General Hospital Corporation Verfahren und Systeme zur Durchführung von winkelaufgelöster optischer Kohärenztomografie im Fourier-Bereich
CN101466298B (zh) 2006-04-05 2011-08-31 通用医疗公司 用于样本的偏振敏感光频域成像的方法、装置和系统
US8175685B2 (en) 2006-05-10 2012-05-08 The General Hospital Corporation Process, arrangements and systems for providing frequency domain imaging of a sample
WO2007133964A2 (en) 2006-05-12 2007-11-22 The General Hospital Corporation Processes, arrangements and systems for providing a fiber layer thickness map based on optical coherence tomography images
AU2007267338B2 (en) * 2006-05-31 2013-04-04 Baxter Healthcare S.A. Method for directed cell in-growth and controlled tissue regeneration in spinal surgery
US7903238B2 (en) * 2006-07-11 2011-03-08 Rudolph Technologies, Inc. Combination of ellipsometry and optical stress generation and detection
TWI436793B (zh) 2006-08-02 2014-05-11 Baxter Int 快速作用之乾密封膠及其使用和製造方法
EP3006920A3 (de) 2006-08-25 2016-08-03 The General Hospital Corporation Vorrichtungen und verfahren zur verstärkung von optischer kohärenztomografiebildgebung mithilfe volumetrischer filterungsverfahren
US8838213B2 (en) 2006-10-19 2014-09-16 The General Hospital Corporation Apparatus and method for obtaining and providing imaging information associated with at least one portion of a sample, and effecting such portion(s)
KR101395908B1 (ko) * 2006-11-21 2014-05-15 브라운 유니버시티 광학 공동을 통합한 피코초 초음파 시스템
JP4839481B2 (ja) * 2006-11-29 2011-12-21 独立行政法人科学技術振興機構 ポンププローブ測定装置及びそれを用いた走査プローブ顕微鏡装置
EP2097713A4 (de) 2006-12-22 2010-09-15 Zygo Corp Vorrichtung und verfahren zur messung von oberflächeneigenschaften
EP2662674A3 (de) 2007-01-19 2014-06-25 The General Hospital Corporation Drehscheibenreflexion zur schnellen Wellenlängendurchstimmung von dispergiertem Breitbandlicht
US7889355B2 (en) 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
EP2115450A4 (de) * 2007-02-05 2015-03-04 Univ Brown Erweitertes akustisches mikroskop mit ultrahoher auflösung
JP4885762B2 (ja) * 2007-02-27 2012-02-29 株式会社ディスコ チャックテーブルに保持された被加工物の計測装置およびレーザー加工機
US8312772B2 (en) 2007-02-28 2012-11-20 Rudolph Technologies, Inc. Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion
EP2132840A2 (de) 2007-03-23 2009-12-16 The General Hospital Corporation Verfahren, anordnungen und vorrichtung zur verwendung eines wellenlängengewobbelten lasers anhand von winkelabtastungs und dispersionsverfahren
US10534129B2 (en) 2007-03-30 2020-01-14 The General Hospital Corporation System and method providing intracoronary laser speckle imaging for the detection of vulnerable plaque
US8045177B2 (en) 2007-04-17 2011-10-25 The General Hospital Corporation Apparatus and methods for measuring vibrations using spectrally-encoded endoscopy
US8115919B2 (en) * 2007-05-04 2012-02-14 The General Hospital Corporation Methods, arrangements and systems for obtaining information associated with a sample using optical microscopy
JP4817328B2 (ja) * 2007-06-18 2011-11-16 独立行政法人産業技術総合研究所 熱物性値測定方法
US7619746B2 (en) * 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
US9375158B2 (en) 2007-07-31 2016-06-28 The General Hospital Corporation Systems and methods for providing beam scan patterns for high speed doppler optical frequency domain imaging
US8040608B2 (en) 2007-08-31 2011-10-18 The General Hospital Corporation System and method for self-interference fluorescence microscopy, and computer-accessible medium associated therewith
HUP0700635A2 (en) * 2007-09-28 2009-05-28 Mta Szegedi Biolog Koezpont Differential-polarizing accessory measuring block for laser scanning microscopes
WO2009059034A1 (en) 2007-10-30 2009-05-07 The General Hospital Corporation System and method for cladding mode detection
KR101274517B1 (ko) 2007-11-13 2013-06-13 지고 코포레이션 편광 스캐닝을 이용한 간섭계
US8264693B2 (en) 2007-12-06 2012-09-11 The Regents Of The University Of Michigan Method and system for measuring at least one property including a magnetic property of a material using pulsed laser sources
US8126677B2 (en) 2007-12-14 2012-02-28 Zygo Corporation Analyzing surface structure using scanning interferometry
WO2009109194A2 (en) 2008-02-29 2009-09-11 Ferrosan A/S Device for promotion of hemostasis and/or wound healing
NL1036682A1 (nl) * 2008-04-01 2009-10-02 Asml Netherlands Bv Lithographic apparatus and contamination detection method.
US7898656B2 (en) * 2008-04-30 2011-03-01 The General Hospital Corporation Apparatus and method for cross axis parallel spectroscopy
US8593619B2 (en) 2008-05-07 2013-11-26 The General Hospital Corporation System, method and computer-accessible medium for tracking vessel motion during three-dimensional coronary artery microscopy
US8861910B2 (en) 2008-06-20 2014-10-14 The General Hospital Corporation Fused fiber optic coupler arrangement and method for use thereof
WO2010009136A2 (en) 2008-07-14 2010-01-21 The General Hospital Corporation Apparatus and methods for color endoscopy
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
ES2957932T3 (es) 2008-12-10 2024-01-30 Massachusetts Gen Hospital Sistemas, aparatos y procedimientos para ampliar el rango de profundidad de imagen de tomografía de coherencia óptica mediante submuestreo óptico
WO2010090837A2 (en) 2009-01-20 2010-08-12 The General Hospital Corporation Endoscopic biopsy apparatus, system and method
JP2012515930A (ja) 2009-01-26 2012-07-12 ザ ジェネラル ホスピタル コーポレーション 広視野の超解像顕微鏡を提供するためのシステム、方法及びコンピューターがアクセス可能な媒体
US9351642B2 (en) 2009-03-12 2016-05-31 The General Hospital Corporation Non-contact optical system, computer-accessible medium and method for measurement at least one mechanical property of tissue using coherent speckle technique(s)
US9039783B2 (en) 2009-05-18 2015-05-26 Baxter International, Inc. Method for the improvement of mesh implant biocompatibility
JP5819823B2 (ja) 2009-07-14 2015-11-24 ザ ジェネラル ホスピタル コーポレイション 血管の内部の流れおよび圧力を測定する装置および装置の作動方法
CN102667442B (zh) * 2009-10-13 2015-07-29 派克米瑞斯有限责任公司 用于检测和测量单层和多层物体中的界面性质的系统和方法
AU2010339045B2 (en) * 2009-12-16 2014-06-05 Baxter Healthcare S.A. Hemostatic sponge
SI2542154T1 (sl) 2010-03-05 2021-03-31 The General Hospital Corporation Naprava za zagotavljanje elektromagnetnega sevanja v vzorec
SA111320355B1 (ar) 2010-04-07 2015-01-08 Baxter Heathcare S A إسفنجة لايقاف النزف
US9069130B2 (en) 2010-05-03 2015-06-30 The General Hospital Corporation Apparatus, method and system for generating optical radiation from biological gain media
WO2011150069A2 (en) 2010-05-25 2011-12-01 The General Hospital Corporation Apparatus, systems, methods and computer-accessible medium for spectral analysis of optical coherence tomography images
WO2011149972A2 (en) 2010-05-25 2011-12-01 The General Hospital Corporation Systems, devices, methods, apparatus and computer-accessible media for providing optical imaging of structures and compositions
AU2011260258B2 (en) 2010-06-01 2015-07-09 Baxter Healthcare S.A. Process for making dry and stable hemostatic compositions
WO2011153434A2 (en) 2010-06-03 2011-12-08 The General Hospital Corporation Apparatus and method for devices for imaging structures in or at one or more luminal organs
JP5883018B2 (ja) 2010-10-27 2016-03-09 ザ ジェネラル ホスピタル コーポレイション 少なくとも１つの血管内部の血圧を測定するための装置、システム、および方法
SG192203A1 (en) 2011-01-28 2013-09-30 Rudolph Technologies Inc Position sensitive detection optimization
DE112011104977B4 (de) * 2011-02-28 2024-12-24 Toshiba Mitsubishi-Electric Industrial Systems Corporation Eigenschaftmesssystem für ein Metallmaterial
US9329224B2 (en) 2011-04-22 2016-05-03 Brown University Optical testing of a multi quantum well semiconductor device
US9330092B2 (en) 2011-07-19 2016-05-03 The General Hospital Corporation Systems, methods, apparatus and computer-accessible-medium for providing polarization-mode dispersion compensation in optical coherence tomography
US10241028B2 (en) 2011-08-25 2019-03-26 The General Hospital Corporation Methods, systems, arrangements and computer-accessible medium for providing micro-optical coherence tomography procedures
DE102011112893A1 (de) * 2011-09-06 2013-03-07 Philipp Kubina Verfahren und Vorrichtung zur zeitaufgelösten Messung von Messsignalen
EP2766059B1 (de) 2011-10-11 2022-11-23 Baxter International Inc. Hämostatische zusammensetzungen
MX346958B (es) 2011-10-11 2017-04-06 Baxter Int Composición hemostatica.
US9341783B2 (en) 2011-10-18 2016-05-17 The General Hospital Corporation Apparatus and methods for producing and/or providing recirculating optical delay(s)
AU2012330450B2 (en) 2011-10-27 2017-04-27 Baxter Healthcare Sa Hemostatic compositions
DE102011055330B4 (de) * 2011-11-14 2024-10-31 Leica Microsystems Cms Gmbh Verfahren zum Messen der Lebensdauer eines angeregten Zustandes in einer Probe
US9140542B2 (en) * 2012-02-08 2015-09-22 Honeywell Asca Inc. Caliper coating measurement on continuous non-uniform web using THz sensor
CN104159527B (zh) 2012-03-06 2017-04-12 弗罗桑医疗设备公司 包含止血糊剂的压力容器
JP2013217909A (ja) * 2012-03-11 2013-10-24 Canon Inc 屈折率算出方法及び装置、屈折率算出用物質、及びトモグラフィ装置
EP2833776A4 (de) 2012-03-30 2015-12-09 Gen Hospital Corp Abbildungssystem, verfahren und distaler anschluss zur multidirektionalen sichtfeldendoskopie
US9121705B2 (en) * 2012-04-20 2015-09-01 Massachusetts Institute Of Technology Sensor for simultaneous measurement of thickness and lateral position of a transparent object
US11490797B2 (en) 2012-05-21 2022-11-08 The General Hospital Corporation Apparatus, device and method for capsule microscopy
JP6394916B2 (ja) 2012-06-12 2018-09-26 フェロサン メディカル デバイシーズ エイ／エス 乾燥止血組成物
US20140033821A1 (en) * 2012-07-31 2014-02-06 National Taiwan University Noninvasive measuring device and noninvasive measuring method for probing an interface
US9274089B2 (en) * 2012-10-31 2016-03-01 The Boeing Company Apparatus and a method for measuring in-plane elastic constants for a laminate
WO2014117130A1 (en) 2013-01-28 2014-07-31 The General Hospital Corporation Apparatus and method for providing diffuse spectroscopy co-registered with optical frequency domain imaging
WO2014120791A1 (en) 2013-01-29 2014-08-07 The General Hospital Corporation Apparatus, systems and methods for providing information regarding the aortic valve
WO2014121082A1 (en) 2013-02-01 2014-08-07 The General Hospital Corporation Objective lens arrangement for confocal endomicroscopy
EP2967491B1 (de) 2013-03-15 2022-05-11 The General Hospital Corporation Ein transösophageales endoskopisches system zur bestimmung einer gemischten venösen sauerstoffsättigung einer lungenarterie
EP2997354A4 (de) 2013-05-13 2017-01-18 The General Hospital Corporation Erkennung einer selbstinterferierenden fluoreszenzphase und amplitude
AU2014283170B2 (en) 2013-06-21 2017-11-02 Ferrosan Medical Devices A/S Vacuum expanded dry composition and syringe for retaining same
US9759553B2 (en) 2013-07-09 2017-09-12 Auburn University Determining geometric characteristics of reflective surfaces
EP3021735A4 (de) 2013-07-19 2017-04-19 The General Hospital Corporation Bestimmung der augenbewegung mittels netzhautabbildung mit rückkopplung
EP3021734B1 (de) 2013-07-19 2020-04-08 The General Hospital Corporation Abbildungsvorrichtung unter verwendung einer endoskopie mit multidirektionalem sichtfeld
EP3025173B1 (de) 2013-07-26 2021-07-07 The General Hospital Corporation Vorrichtung mit optische dispersion nutzender laseranordnung zur anwendung in der fourier-raum optischen kohärenztomographie
BR112016013322B1 (pt) 2013-12-11 2020-07-21 Ferrosan Medical Devices A/S métodos para preparação de uma composição seca e para reconstituir uma composição seca, composição seca, uso de uma composição seca, e, kit
US9733460B2 (en) 2014-01-08 2017-08-15 The General Hospital Corporation Method and apparatus for microscopic imaging
US10736494B2 (en) 2014-01-31 2020-08-11 The General Hospital Corporation System and method for facilitating manual and/or automatic volumetric imaging with real-time tension or force feedback using a tethered imaging device
WO2015153982A1 (en) 2014-04-04 2015-10-08 The General Hospital Corporation Apparatus and method for controlling propagation and/or transmission of electromagnetic radiation in flexible waveguide(s)
FR3020683B1 (fr) 2014-04-30 2021-09-10 Menapic Dispositif et procede de caracterisation d'une interface d'une structure
JP5865946B2 (ja) * 2014-05-22 2016-02-17 株式会社ユニソク 過渡吸収測定方法及び過渡吸収測定装置
WO2015184162A1 (en) * 2014-05-29 2015-12-03 Brown University Optical system and methods for the determination of stress in a substrate
WO2016007950A1 (en) * 2014-07-11 2016-01-14 Vanderbilt Universtiy Apparatus and methods for probing a material as a function of depth using depth-dependent second harmonic generation
EP3171766B1 (de) 2014-07-25 2021-12-29 The General Hospital Corporation Einrichtung zur in-vivo-bildgebung und -diagnose
EP3201310B1 (de) * 2014-10-01 2021-02-17 Purdue Research Foundation Identifizierung von mikroorganismen
AU2015333206B2 (en) 2014-10-13 2019-07-11 Ferrosan Medical Devices A/S. Dry composition for use in haemostasis and wound healing
WO2016102446A1 (en) 2014-12-24 2016-06-30 Ferrosan Medical Devices A/S Syringe for retaining and mixing first and second substances
EP3316930B1 (de) 2015-07-03 2019-07-31 Ferrosan Medical Devices A/S Spritze zum mischen zweier komponenten und zum aufrechterhalten eines vakuums im lagerzustand
WO2017048893A1 (en) * 2015-09-15 2017-03-23 Cundin Luisiana Electromagnetic dosimeter
US10391292B2 (en) 2016-06-15 2019-08-27 Surmodics, Inc. Hemostasis sealing device with constriction ring
US10644801B2 (en) * 2016-06-30 2020-05-05 Arizona Board Of Regents On Behalf Of The University Of Arizona Proactive channel probing for wavelength switching in optical transmission systems
WO2018009517A1 (en) * 2016-07-05 2018-01-11 Massachusetts Institute Of Technology Systems and methods for quality control of a periodic structure
US10758719B2 (en) 2016-12-15 2020-09-01 Surmodics, Inc. Low-friction sealing devices
US10788765B2 (en) 2017-01-25 2020-09-29 Asml Netherlands B.V. Method and apparatus for measuring a structure on a substrate
US11111780B2 (en) * 2017-02-21 2021-09-07 Halliburton Energy Services, Inc. Distributed acoustic sensing system with phase modulator for mitigating faded channels
CN111656164A (zh) * 2018-01-19 2020-09-11 治疗诊断科技有限公司 扫描探头显微镜
US10352692B1 (en) * 2018-02-20 2019-07-16 Papalab Co., Ltd. Surface roughness determination apparatus using a white light source and determination method
JP6852008B2 (ja) * 2018-03-19 2021-03-31 株式会社東芝 光学検査装置、半導体素子及び光学検査方法
KR20210008479A (ko) 2018-05-09 2021-01-22 훼로산 메디칼 디바이스 에이/에스 지혈 조성물을 제조하는 방법
CN111220549B (zh) * 2018-11-08 2023-01-31 中国石油化工股份有限公司 测算待测区域污染物排放面浓度的测算方法
CN109990829B (zh) * 2018-12-25 2021-07-27 华中科技大学 一种元素、缺陷与残余应力同时检测的方法及装置
KR102720154B1 (ko) 2018-12-27 2024-10-21 삼성전자주식회사 하부막 두께의 비파괴적 측정 방법
US11654635B2 (en) 2019-04-18 2023-05-23 The Research Foundation For Suny Enhanced non-destructive testing in directed energy material processing
WO2020223584A1 (en) 2019-05-01 2020-11-05 Trustees Of Boston University Systems and methods for bond-selective transient phase imaging
CN110470639B (zh) * 2019-08-22 2024-05-28 合肥利弗莫尔仪器科技有限公司 一种基于激光诱导光热效应的多模式扫描显微镜成像系统
US11209369B2 (en) * 2019-09-30 2021-12-28 United States Of America, As Represented By The Secretary Of The Army Measuring deflection to determine a characteristic of a cantilever
FR3103896B1 (fr) * 2019-11-29 2024-03-08 Neta Dispositif de mesure photo-acoustique multipoints
CN111272881A (zh) * 2020-03-10 2020-06-12 南京理工大学 一种非接触式检测纳米薄膜热扩散率的激光超声系统及方法
IL273288B2 (en) * 2020-03-12 2023-10-01 Elbit Systems Ltd System and method for determining a relative motion between two or more objects
CN112556585A (zh) * 2020-11-19 2021-03-26 深圳中科飞测科技股份有限公司 一种测量系统及测量方法
CN113514399B (zh) * 2021-03-26 2024-09-17 深圳中科飞测科技股份有限公司 检测设备及检测方法
CN114397279B (zh) * 2022-01-19 2023-07-18 天津大学 任意应变状态下二维材料和应变物体的应变状态检测方法
CN116753839B (zh) * 2023-08-17 2023-11-07 苏州大学 一种利用光束偏振测量亚微米激光光斑尺寸的装置及方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3950987A (en) * 1975-05-13 1976-04-20 Isaak Isaevich Slezinger Piezo-optic measuring transducer and accelerometer, pressure gauge, dynamometer, and thermometer based thereon
US4484820A (en) * 1982-05-25 1984-11-27 Therma-Wave, Inc. Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy
US4522510A (en) * 1982-07-26 1985-06-11 Therma-Wave, Inc. Thin film thickness measurement with thermal waves
US4579463A (en) * 1984-05-21 1986-04-01 Therma-Wave Partners Detecting thermal waves to evaluate thermal parameters
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
US5042952A (en) * 1984-05-21 1991-08-27 Therma-Wave, Inc. Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor
US4636088A (en) * 1984-05-21 1987-01-13 Therma-Wave, Inc. Method and apparatus for evaluating surface conditions of a sample
US4952063A (en) * 1985-03-01 1990-08-28 Therma-Wave, Inc. Method and apparatus for evaluating surface and subsurface features in a semiconductor
EP0200301A1 (de) * 1985-03-01 1986-11-05 Therma-Wave Inc. Verfahren und Vorrichtung zum Auswerten von Eigenschaften der Oberfläche und des Inneren eines Halbleiters
US4632561A (en) * 1985-04-30 1986-12-30 Therma-Wave, Inc. Evaluation of surface and subsurface characteristics of a sample
US4710030A (en) * 1985-05-17 1987-12-01 Bw Brown University Research Foundation Optical generator and detector of stress pulses
US4750822A (en) * 1986-03-28 1988-06-14 Therma-Wave, Inc. Method and apparatus for optically detecting surface states in materials
US4795260A (en) * 1987-05-15 1989-01-03 Therma-Wave, Inc. Apparatus for locating and testing areas of interest on a workpiece
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
JP2718705B2 (ja) * 1988-07-27 1998-02-25 株式会社日立製作所 光音響信号検出方法及びその装置
US5042951A (en) * 1989-09-19 1991-08-27 Therma-Wave, Inc. High resolution ellipsometric apparatus
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US5074669A (en) * 1989-12-12 1991-12-24 Therma-Wave, Inc. Method and apparatus for evaluating ion implant dosage levels in semiconductors
US5131752A (en) * 1990-06-28 1992-07-21 Tamarack Scientific Co., Inc. Method for film thickness endpoint control
US5227912A (en) * 1991-10-30 1993-07-13 Ho Ping Pei Multiple-stage optical kerr gate system
US5379109A (en) * 1992-06-17 1995-01-03 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for non-destructively measuring local resistivity of semiconductors
US5481475A (en) * 1993-12-10 1996-01-02 International Business Machines Corporation Method of semiconductor device representation for fast and inexpensive simulations of semiconductor device manufacturing processes
US5574562A (en) * 1994-12-19 1996-11-12 The Board Of Trustees Of The Leland Stanford Junior University Method and apparatus for evaluation of high temperature superconductors
US5546811A (en) * 1995-01-24 1996-08-20 Massachusetts Instittue Of Technology Optical measurements of stress in thin film materials
US5585921A (en) * 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19781728B4 (de) * 1996-04-26 2007-10-18 Brown University Research Foundation Optisches Verfahren und System zum Bestimmen mechanischer Eigenschaften eines Materials

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