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DE10348250A1 - Interferometric measuring device - Google Patents

Interferometric measuring device Download PDF

Info

Publication number
DE10348250A1
DE10348250A1 DE2003148250 DE10348250A DE10348250A1 DE 10348250 A1 DE10348250 A1 DE 10348250A1 DE 2003148250 DE2003148250 DE 2003148250 DE 10348250 A DE10348250 A DE 10348250A DE 10348250 A1 DE10348250 A1 DE 10348250A1
Authority
DE
Germany
Prior art keywords
measuring device
str
interferometric measuring
guided
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2003148250
Other languages
German (de)
Inventor
Thomas Seiffert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE2003148250 priority Critical patent/DE10348250A1/en
Priority to PCT/DE2004/001748 priority patent/WO2005045403A1/en
Publication of DE10348250A1 publication Critical patent/DE10348250A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Die Erfindung bezieht sich auf eine interferometrische Messvorrichtung zur Messung geometrischer Oberflächeneigenschaften mit einer Lichtabgabeeinheit (LQ) zum Erzeugen eines Eingangsstrahls (EST), einem diesen in einem zur Oberfläche eines Objekts geführten Objektstrahl (STO) und einem zu einer Referenz (R) geführten Referenzstrahl (STR) aufteilenden Strahlteiler (ST) und einer Aufnahmeeinheit (BA, K), der der zurückgeworfene Objektstrahl und der zurückgeworfene Referenzstrahl unter Interferenz miteinander zugeführt werden. Einstellvorgänge der interferometrischen Messvorrichtung werden dadurch begünstigt, dass zumindest in den Strahlengang des Referenzstrahles (STR) eine Polfilteranordnung (PFR; PFR1, PFR2) eingefügt ist, mit der die Intensität des Referenzstrahles (STR) zum Ändern des von der Referenz (R) erhaltenen Grauwerts variierbar ist (Fig. 1).The invention relates to an interferometric measuring device for measuring geometric surface properties with a light emission unit (LQ) for generating an input beam (EST), an object beam (STO) guided to the surface of an object and a reference beam guided to a reference (R) ( STR) dividing beam splitter (ST) and a receiving unit (BA, K), which are returned to the reflected object beam and the reflected reference beam under interference with each other. Adjustments of the interferometric measuring device are facilitated by the fact that at least in the beam path of the reference beam (STR) a polarizing filter array (PFR, PFR1, PFR2) is inserted, with which the intensity of the reference beam (STR) for changing the gray value obtained from the reference (R) is variable (Fig. 1).

DE2003148250 2003-10-16 2003-10-16 Interferometric measuring device Withdrawn DE10348250A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2003148250 DE10348250A1 (en) 2003-10-16 2003-10-16 Interferometric measuring device
PCT/DE2004/001748 WO2005045403A1 (en) 2003-10-16 2004-08-04 Interferometric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003148250 DE10348250A1 (en) 2003-10-16 2003-10-16 Interferometric measuring device

Publications (1)

Publication Number Publication Date
DE10348250A1 true DE10348250A1 (en) 2005-05-12

Family

ID=34428450

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003148250 Withdrawn DE10348250A1 (en) 2003-10-16 2003-10-16 Interferometric measuring device

Country Status (2)

Country Link
DE (1) DE10348250A1 (en)
WO (1) WO2005045403A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9500468B2 (en) 2014-08-25 2016-11-22 Board Of Trustees Of Michigan State University Scanning interferometry technique for through-thickness evaluation in multi-layered transparent structures

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL68411A6 (en) * 1969-05-26 1973-02-28
JPH0663867B2 (en) * 1985-05-28 1994-08-22 キヤノン株式会社 Interfering device for wavefront condition detection
GB8702130D0 (en) * 1987-01-30 1987-03-04 Sira Ltd Surface inspection
US5155550A (en) * 1991-05-10 1992-10-13 Barger R L Accurate correlator of rotational and translational motions and control method and apparatus
US5923425A (en) * 1997-11-20 1999-07-13 Tropel Corporation Grazing incidence interferometry for measuring transparent plane-parallel plates
EP1203257B1 (en) * 1999-08-02 2004-12-15 Zetetic Institute Scanning interferometric near-field confocal microscopy

Also Published As

Publication number Publication date
WO2005045403A1 (en) 2005-05-19

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Legal Events

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8139 Disposal/non-payment of the annual fee